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TORUS^® Linear Sputtering Magnetrons

Applications:

Architectural Glass
Photovoltaics
Superconductors
Tool Coating
Wear Coating
Flat Panel Displays
Lighting
OLED/PLED's
Medical

Web Coating
Aerospace
Wear Coatings
Decorative
Photovoltaics
Nanotechnology
Optical

Overview

Our TORUS^® Linear Sputtering Magnetrons utilize industry proven technology in both magnetics and construction, providing reliable performance and longevity necessary for successful research and production applications.

Backed by over 65+ years of thin film experience, TORUS magnetrons are synonymous with quality and support. Our global field service and worldwide locations provide full technical support and can assist with integration and application support if needed.

Our Linear Sputtering Magnetrons feature enhanced erosion and uniformity profiles. Our custom design capabilities enable us to model a source ideal for your application and requirements. Our modeling software enables us to configure magnet arrays specific to your target and performance needs. We are also able to provide uniformity profiles based on the magnetron size and magnet profile.

With a full range of sizes including standard widths of 2", 3.5", 5", and 6" and lengths up to 160", KJLC^® is positioned to offer the sputter solution for your R&D or Production environment.

To request a quotation on one of our TORUS^® Linear Sputtering Magnetrons, please see the Linear Magnetron Questionnaire.

Features

Magnet Configurations include:
- High target utilization designs - ≥40%
- High Strength
- Unbalanced magnet options
Standard cross sections of 2", 3.5", 5", and 6" wide
Versatile HiPIMS, RF, DC, or Pulsed-DC operation
Internal or flange-mount configurations
Custom designs available
Magnet and Uniformity modeling

High Target Utilization

5x End Erosion

5x Middle Erosion

KJLC offers high target utilization designs that yield ≥40% target utilization. Below are some photos showing an eroded, 5" x 27" sputtering target measured at 41% utilization.

Note: Target erosion is impacted by power, pressure, and process gas. Higher pressures will generally yield lower utilization. Running at low power (≤15W/in²) and introducing reactive gas (oxygen) in your process will also result in reduced utilization.

Mounting Options

Internal: Single or Dual Feedthrough
configurations available
External: Flange mount configuration
(Flange Mount)

Internal

External

Options

Angular Flex Stem
Right Angle Stem
Deposition Chimney
Gas Ring
High Strength Magnets
Shutters
Cluster Assemblies

Power Supply Options

Magnetic Options

Standard (NdFeB)
- Optimized for up to 0.750" thick targets
High Strength (NdFeB)
- Optimized for up to 0.250" thick Ni targets

High Power Impulse Magnetron Sputtering (HiPIMS)

The Kurt J. Lesker Co™ / Starfire Industries HiPIMS IMPULSE™ supply is a versatile pulsed power module that converts a conventional DC sputtering system into a fully-functional High-Power Impulse Magnetron Sputtering (HiPIMS) system.

To learn more, view our IMPULSE - 2kW Pulsed Power Modules for Advanced Magnetron Sputtering page.

Targets

KJLC offers a broad range of linear sputtering target options for conductive and non-conductive materials to be used in clamped, bonded, or bolt-on configurations. We can provide anything from monolithic metals to exotic alloys. Our bonding capabilities include standard metallic and elastomer bonding. For larger target configurations, we can provide multi-piece configurations with beveled or butt joints.

Please contact our materials department by clicking here for a quotation on the targets you need for you application.

Specifications

Model	2" Wide	3.5" Wide	5" Wide	6" Wide
Target Size	2.35" wide x 0.25" Standard Thickness Total target thickness 0.25" (1)	3.5" wide x 0.375" Standard Thickness 0.50" Maximum Recommended Total target thickness (1)	5.0" wide x 0.50" Standard Thickness 0.750" Maximum Recommended Total target thickness (1)	6.0" wide x 0.625" Standard Thickness 0.750" Maximum Recommended Total target thickness (1)
Assembly Size	3.930" wide x Target Length + (1.93") (w\0.250" Ground Shields)	5.30" wide x Target Length + (1.80") (w\0.375" Ground Shields)	6.80" wide x Target Length + (1.80") (w\0.375" Ground Shields)	7.80" wide x Target Length + (1.80") (w\0.375" Ground Shields)
Membrane (Optional)	3.930" Wide x 0.020" Standard Thickness	4.30" Wide x 0.020" Standard Thickness	5.80" Wide x 0.020" Standard Thickness	6.80" Wide x 0.020" Standard Thickness
Backing Plate (Optional)	3.230" Wide x 0.125" Thick	4.30" Wide x 0.125" Thick	5.8" Wide x 0.250" Thick	6.8" Wide x 0.250" Thick
Utilization	~20% (2)	40% to 48% (2)	40% to 43% (2)(3)	40% to 47% (2)(3)
Operating Pressure	0.5 - 50 mT (3)	0.5 - 50 mT (3)	0.5 - 50 mT (3)(4)	0.5 - 50 mT (3)(4)
Power	RF, AC, DC, Pulsed DC	RF, AC, DC, Pulsed DC	RF, AC, DC, Pulsed DC	RF, AC, DC, Pulsed DC
Maximum Power	150 watts per square inch (5)	200 watts per square inch (5)	250 watts per square inch (5)	250 watts per square inch (5)
Water Requirements	1.5 Gallons/min per 5 kw, 25 psi max. inlet pressure (6) 1 megohm of resistance between the cathode and earth ground	1.5 Gallons/min per 5 kw, 25 psi max. inlet pressure (6) 1 megohm of resistance between the cathode and earth ground	20°C inlet temperature, 1.5 Gallons/min per 5 kw, 25 psi max. inlet pressure (6) 1 megohm of resistance between the cathode and earth ground	20°C inlet temperature, 1.5 Gallons/min per 5 kw, 25 psi max. inlet pressure (6) 1 megohm of resistance between the cathode and earth ground

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Total Thickness includes Target + Backing Plate if Applicable

Utilization based on target weight change using aluminum and copper targets @ 3 mT Argon, 50 watts per square inch, and approximately 75% to 100% of target thickness utilized

Lower target utilization occurs as pressures increase

Pressures above 100 mT possible with custom designs

Higher powers are possible, contact engineering for support

Higher pressures are possible, the target material properties and thickness determine the ultimate maximum water pressure

Some specifications vary depending on the process, target materials, etc.

Note:

If you require a flange or quick connect for mounting your magnetron to the chamber, we have several standard options. Please click links to see available options.
CF to Quick-Connect Couplings
KF (QF) to Quick-Connect Couplings
Feedthrough Baseplate Coupling Connectors

Accessories Table

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Accessory Type	Description	Reference	Notes	Part Number	Price	In Stock	Add Item
Accessory Type	Description	Reference	Notes	Part Number	Price	In Stock	Add Item
Interconnect Cable	CABLE,COAXIAL,RG213,3 FT OAL,MALE"HN" TO MALE "N"	Type HN Plug to Type N Plug, RG213, 3 ft Long	1	EJCBL3HN	$229.00
Interconnect Cable	CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "N"	Type N Plug to Type N Plug, RG213, 3 ft Long	1	EJCBL3NN	$114.00
Interconnect Cable	CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO PIGTAIL	Type N Plug to Pigtail (1/4” Ring Lug Center Connector and Flying Ground Wire), RG213, 3 ft Long	1	EJCBL3NP	$100.00
Interconnect Cable	CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "UHF"	Type N Plug to UHF Plug, RG213, 3 ft Long	1	EJCBL3NU	P.O.R.
Power Supply	TRUPLASMA DC 3005 G1 5kW DC POWER SUPPLY 400V 3PH	TRUPLASMA DC 3005 G1 5kW DC Power Supply 400V 3PH	-	1534405	$15,160.00
Power Supply	TRUPLASMA DC 3010 G1 10kW DC POWER SUPPLY 400V 3PH	TRUPLASMA DC 3010 G1 10kW DC Power Supply 400V 3PH	-	1534597	$15,215.00
Power Supply	TRUPLASMA DC 3005 G1 5kW DC POWER SUPPLY 208V 3PH	TRUPLASMA DC 3005 G1 5kW DC Power Supply 208V 3PH	-	1558202	P.O.R.
Power Supply	TRUPLASMA DC 3005 G1 10kW DC POWER SUPPLY 208V 3PH	TRUPLASMA DC 3005 G1 10kW DC Power Supply 208V 3PH	-	1601465	$15,770.00

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Notes:

Other cable lengths available by replacing the '3' with the desired length in feet.

TORUS® Linear Sputtering Magnetrons

Applications:

Overview

Features

High Target Utilization

Mounting Options

Options

Power Supply Options

Magnetic Options

High Power Impulse Magnetron Sputtering (HiPIMS)

Targets

Specifications

Accessories Table

TORUS^® Linear Sputtering Magnetrons