Overview
The KJLC TruPlasma Pulsed DC power supply provides all of the advantages of a pulsed-DC solution for your reactive processes in a one-box package that delivers additional benefits in the form of ease of use, cost savings, and superior flexibility. Combining standard DC technology and process-proven pulsed-DC technology, the TruPlasma power supply provides higher deposition rates, more repeatable performance, and exceptional film quality compared to complicated and expensive AC-power solutions. The TruPlasma product line consists of single-output 1kW and 2kW models, as well as 5kW and 10kW models for higher power applications.
Features
- Compact package
- Adjustable pause duration of 1-10µs (1µs resolution)
- Adjustable pulse frequency of 2-100 kHz
- Reverse voltage (15% of input voltage)
- Master slave capability