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KJLC® TruPlasma Pulsed DC Sputtering Power Supplies

Overview

The KJLC TruPlasma Pulsed DC power supply provides all of the advantages of a pulsed-DC solution for your reactive processes in a one-box package that delivers additional benefits in the form of ease of use, cost savings, and superior flexibility. Combining standard DC technology and process-proven pulsed-DC technology, the TruPlasma power supply provides higher deposition rates, more repeatable performance, and exceptional film quality compared to complicated and expensive AC-power solutions. The TruPlasma product line consists of single-output 1kW and 2kW models, as well as 5kW and 10kW models for higher power applications.

Features

  • Compact package
  • Adjustable pause duration of 1-10µs (1µs resolution)
  • Adjustable pulse frequency of 2-100 kHz
  • Reverse voltage (15% of input voltage)
  • Master slave capability
Pulsed DC Sputtering Technical Notes
Follow the link to learn more about the process of Pulsed DC Sputtering.
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Ordering Table

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Description Model Input Voltage Recommended Sputter Source Part Number Price In Stock Add Item
Description Model Input Voltage Recommended Sputter Source Part Number Price In Stock Add Item
TRUPLASMA DC 4001 1KW PULSED DC MAGNETRON DRIVE 0-800V, 208V 1kW DC Pulsed Power Supply 208 VAC TORUS® Sources (1", 2", & 3")
2018265-1A
$14,120.00
In Stock
TRUPLASMA DC 4001 1kW DC PULSED POWER SUPPLY 230V, SINGLE PH 1kW DC Pulsed Power Supply 230 VAC TORUS® Sources (1", 2", & 3")
1897680
$14,120.00
In Stock
TRUPLASMA DC 4002 2KW PULSED DC MAGNETRON DRIVE 0-800V, 208V, CE 2kW DC Pulsed Power Supply 208 VAC TORUS® Sources (1", 2", 3" & 4")
2018265-2A
$13,897.00
In Stock
TRUPLASMA DC 4002 2kW DC PULSED POWER SUPPLY 230V, SINGLE PHASE, AIR COOLED, 19" RACKMOUNT, NEGATIVE POLARITY, RS232, 485, ANALOG INTERFACE 2kW DC Pulsed Power Supply 230 VAC TORUS® Sources (1", 2", 3", & 4")
1595298
$16,541.00
Contact KJLC for Availability

Contact us by clicking here or +1 800 245 1656 for more information, including pricing and options, and to discuss your specific process application requirements.

Accessories Table

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Description Reference Type Part Number Price In Stock Add Item
Description Reference Type Part Number Price In Stock Add Item
CABLE,COAXIAL,RG213,3 FT OAL,MALE"HN" TO MALE "N" Type HN Plug To Type N Plug, RG213, 3ft LG Interconnect Cable
EJCBL3HN
$229.00
Contact KJLC for Availability
CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "N" Type N Plug To Type N Plug, RG213, 3ft LG Interconnect Cable
EJCBL3NN
$114.00
Contact KJLC for Availability
CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO PIGTAIL Type N Plug To Pigtail (1/4"Ring Lug Center Connector And Flying Ground Wire), RG213, 3ft LG Interconnect Cable
EJCBL3NP
$100.00
Contact KJLC for Availability
CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "UHF" Type N Plug To UHF Plug, RG213, 3ft LG Interconnect Cable
EJCBL3NU
P.O.R.
Contact KJLC for Availability
CABLE,COAXIAL,RG213,6 FT OAL,MALE"HN" TO MALE "N" Type HN plug to Type N Plug, RG213, 6ft LG Interconnect Cable
EJCBL6HN
$179.00
Contact KJLC for Availability
CABLE,COAXIAL,RG213,6 FT OAL,MALE"N" TO MALE "N" Type N plug to Type N Plug, 6ft LG Interconnect Cable
EJCBL6NN
$275.00
In Stock
CABLE,COAXIAL,RG213,6 FT OAL,MALE"N" TO PIGTAIL Type N Plug to Pigtail (1/4" Ring Lug Center Connector And Flying Ground Wire), RG213, 6ft LG Interconnect Cable
EJCBL6NP
$110.00
Contact KJLC for Availability
CABLE,COAXIAL,RG213,6 FT OAL,MALE"N" TO MALE "UHF" Type N Plug to UHF Plug, RG213, 6ft LG Interconnect Cable
EJCBL6NU
$150.00
Contact KJLC for Availability
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NOTE: If you require a configuration not shown in this table, please contact us by clicking here or call +1 800 245 1656.

Contact Us - KJLC TruPlasma Pulsed DC Sputtering Power Supplies