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KJLC DC Series - DC Sputtering & DC Bias

These proven DC power supplies are ideally suited for coating processes where reliability & performance are critical.

The KJLC DC Series power supplies range in power levels from 1kW to 120kW. They are intended primarily for DC magnetron sputtering and as DC bias sources. They are compact and over 90% efficient. As a safety feature, they have extremely low stored energy at the outlet. Special integrated circuitry enables arc suppression for arc-sensitive applications and arc control for sustained arcing applications. Front panel controls switch regulation between constant power, current, or voltage while permitting the power to be ramped to the set point.

PD500X Series

The KJLC PD500X Series offers low power option that can be configured for 500W, 1000W, or 1500W outputs. Its 1 U rack height is ideal for space constraints.

Features

Superior Arc Detection & Suppression - < 100 nsecs (.1 Î¼ secs)
500 watt, 1000 watt and 1500 watt Output Power Versions
Adjustable Arc Detection Delay & Off Time Before Restarting
Voltage, Current and Power Regulation Modes
Adjustable Power Ramping
Adjustable Run Timer
Stored Target Parameters for Up to 7 Separate Targets
kWh Counting & Time Limit
RS-232 & Analog Communication Capability
Wide 0-(-)1000 Volt Range - Full Rated
Power can be Applied Under Nearly all Conditions
Stable Operation Down to 20 watts for Non-Reactive Processes
Suitable for Use as a Substrate Bias Power Supply
No Transformer Tap Changes Are Necessary to Operate Across Entire Range

Benefits

Adaptable to many processes and applications
Deposit ultra-thin, homogeneous films
Optimize process parameters for high productivity and high yields
Compact design - 1 U rack height

Specifications Table

Control/Feedback	LCD Front Panel RS-232 RS-485 25-Pin Analog
Output Control	P - Power Control U - Voltage Control* I- Current Control *When parallel operation mode is enabled, voltage regulator is not active
Load Impedance	5.3 Ohm - 21.2 Ohm (1:4) full power
Operational Duty Cycle	100%
Arc Detection Time	<100ns

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Dimensional Drawings

KJLC DC Series - DC Sputtering & DC Biasdrawing

Ordering Table

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Description	Model	Input Voltage	Max Input Current	Output	Recommended Sputter Source	Part Number	Price	In Stock	Add Item
Description	Model	Input Voltage	Max Input Current	Output	Recommended Sputter Source	Part Number	Price	In Stock	Add Item
500WATT DC POWER SUPPLY,0-500V,0-2A,HN OUT,85-275V INPUT,CE	500 Watt DC Power Supply	100-250V Input	0-2A	0 to 500V @ 0 to 2A	TORUS 1, TORUS 2	PD500X1	$6,250.00
1 KW DC POWER SUPPLY,0-1000V,0-3A,HN OUT,85-275V INPUT,CE	1000 Watt DC Power Supply	100-250V Input	0-3A	0 to 1000V @ 0 to 3A	TORUS 2, TORUS 3	PD500X2	$6,570.00
1.5KW DC POWER SUPPLY,0-1000V,0-4A,HN OUT,100-240V INPUT,CE,ETL	1500 Watt DC Power Supply	100-250V Input	0-4A	0 to 1000V @ 0 to 4A	TORUS 2, TORUS 3, TORUS 4	PD500X3	$6,984.00

Click here to contact us for more information, including pricing and options, and to discuss your specific process application requirements.

Accessories Table

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Description	Reference	Type	Part Number	Price	In Stock	Add Item
Description	Reference	Type	Part Number	Price	In Stock	Add Item
CABLE,COAXIAL,RG213,3 FT OAL,MALE"HN" TO MALE "N"	Type HN Plug To Type N Plug, RG213, 3ft LG	Interconnect Cable	EJCBL3HN	$229.00
CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "N"	Type N Plug To Type N Plug, RG213, 3ft LG	Interconnect Cable	EJCBL3NN	$114.00
CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO PIGTAIL	Type N Plug To Pigtail (1/4"Ring Lug Center Connector And Flying Ground Wire), RG213, 3ft LG	Interconnect Cable	EJCBL3NP	$100.00
CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "UHF"	Type N Plug To UHF Plug, RG213, 3ft LG	Interconnect Cable	EJCBL3NU	P.O.R.
CABLE,COAXIAL,RG213,6 FT OAL,MALE"HN" TO MALE "N"	Type HN plug to Type N Plug, RG213, 6ft LG	Interconnect Cable	EJCBL6HN	$179.00
CABLE,COAXIAL,RG213,6 FT OAL,MALE"N" TO MALE "N"	Type N plug to Type N Plug, 6ft LG	Interconnect Cable	EJCBL6NN	$275.00
CABLE,COAXIAL,RG213,6 FT OAL,MALE"N" TO PIGTAIL	Type N Plug to Pigtail (1/4" Ring Lug Center Connector And Flying Ground Wire), RG213, 6ft LG	Interconnect Cable	EJCBL6NP	$110.00
CABLE,COAXIAL,RG213,6 FT OAL,MALE"N" TO MALE "UHF"	Type N Plug to UHF Plug, RG213, 6ft LG	Interconnect Cable	EJCBL6NU	$150.00

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NOTE: If you require a configuration not shown in this table, please contact us by clicking here or call +1 800 245 1656.