KJLC R-Series RF Power Generator Packages

Representative Image

KJLC R-Series RF Power Generator Packages

R-Series RF generator packages provide reliable power for Magnetron Sputtering, Plasma Generation, & RF Biasing to meet your process requirements. Packages include all parts of a typical RF network, complete with necessary inter-unit and Torus Sputtering Cathode cabling as well as rack mounting kits.

Features:

Generator, Matching Network, and Controller Included
CE Marked Compliance
Microprocessor-Controlled, Solid-State Construction
Electronics Constructed to Minimize VSWR Conditions
Programmable High-Speed Pulsing
Automatic Gain Control
Programmable Presets
DC Probe Input
High Voltage Variable Capacitors
Displays Forward Power, Reflected Power, and DC Bias
Analog or Serial Interface
Low Loss Design
Auto/Manual Operation

Control modes to regulate power output:

DC Voltage
RF Voltage
Forward Power Leveling
Load Power Leveling

Dimensional Drawings

Specifications Table – Matching Network

Model	300W Matching Network	600W Matching Network
Power Output	300 Watts	600 Watts
Weight	10 lbs. (4.53 kg)	10 lbs. (4.53 kg)
Dimensions	5" H x 9" W x 15" D	5" H x 9" W x 15" D
Output Impedance	1.5 to 35 Ohms -100 to +75 Ohms	1.5 to 35 Ohms -100 to +75 Ohms
Input Connector	Type "N" Female	Type "N" Female
Output Connector	Type "HN" Female	Type "HN" Female
Cooling	Convection/Air	Convection/Air

X CLOSE

Specifications Table – Matching Network Controller

Model	300W/600W Controller
Input Power	98-125/196-250 VAC Selectable 47-63 Hz
Dimensions	3.5" H x 9.5" W x 12.8" D

X CLOSE

Specifications Table – RF Generator

Model	300W Generator	600W Generator
Power Output	High Range: 0–300 Watts	High Range: 0–600 Watts
Input Power	90–125V or 190–264V, 1P 47–63 Hz, (Factory Configured)	90–125V or 190–264V, 1P 47–63 Hz, (Factory Configured)
Frequency	13.56 MHz, (Fixed)	13.56 MHz, (Fixed)
Weight	27 lbs. (12.2 kg)	37 lbs. (16.8 kg)
Dimensions	5.25" H x 9.50" W x 18.35" D W = 8.00" (w/o Rackmount Kit)	7.00" H x 9.50" W x 18.38" D W = 8.00" (w/o Rackmount Kit)
Output Impedance	50 Ohms, ± 5 Ohms Nominal	50 Ohms, ± 5 Ohms Nominal
Interface Connector	Serial: DB-9 Female Analog: DB-25 Female CEX: Female BNC	Serial: DB-9 Female Analog: DB-25 Female CEX: Female BNC
Cooling	Forced Air, 110 CFM	Forced Air, 110 CFM
Metering Accuracy	± 1% Full Scale ± 3% of Reading	± 1% Full Scale ± 3% of Reading
Output Power Stability	± 0.5% Long Term	± 0.5% Long Term ± 1Watt
Harmonics	-50 dBc	-50 dBc
Pulsing	0–1KHz, 1-Hz Steps 50 micro-sec Minimum Pulse	0–1KHz, 1-Hz Steps 50 micro-sec Minimum Pulse

X CLOSE

Product Manuals

Click to download manuals for your product.

Ordering Table

X CLOSE

Individual or Package	Description	Part Number	Price	In Stock	Add Item
Individual or Package	Description	Part Number	Price	In Stock	Add Item
R-Series Power Supply Component	AUTO MATCH NETWORK,1000W,3/8" SWAGE,INDUC LOAD,COIL CFG	EJAT10-3/8	$8,055.00
R-Series Power Supply Component	AUTOMATIC MATCHING NETWORK, 300W, LOW PASS FILTER.	EJAT3	$3,400.00
R-Series Power Supply Component	AUTOMATIC MATCHING NETWORK, 600W,	EJAT6	$5,800.00
R-Series Power Supply Component	AUTO MATCH NETWORK/CTRL,2000W,DUAL7/16 DIN,INDUC LOAD	EJATS20-DUAL-7/16DIN	$11,200.00
R-Series Power Supply Component	MATCHING NETWORK CONTROLLER MC2,200V	EJMC2	$2,300.00
R-Series Power Supply Component	MATCH NETWORK CONTROLLER REMOTE,ATS SERIES, 110 VAC	EJMCRS-110	$1,400.00
R-Series Power Supply Component	POWER SUPPLY,1kW, 13.56 MHZ,220V, RS232, CE, "N" OUTPUT	EJR1001-220	$10,835.00
R-Series Power Supply Component	GENERATOR,2000 WATT,13.56 MHZ, WATER COOLER,CE MARK,4 RU, 190-250VAC, 47-63 HZ	EJR2001-13	$21,600.00
R-Series Power Supply Component	POWER SUPPLY,300 WATTS,13.56 MHZ,120V,RS232,CE,"N" OUTPUT	EJR301-120	$6,534.00
R-Series Power Supply Component	POWER SUPPLY,300 WATTS,13.56 MHZ,220V,RS232,CE,"N" OUTPUT	EJR301-220	$6,534.00
R-Series Power Supply Component	POWER SUPPLY,600 WATTS,13.56 MHZ,220V,RS232,CE,"N" OUTPUT	EJR601-220	$6,720.00
Complete R-Series Power Supply Packages	KJLC 300W,120V RF PWR PKG,SUP,A-MATCH,CONT,RK MT,CBLS,CE	RF03A12XX300	$9,895.00
Complete R-Series Power Supply Packages	KJLC 300W,220V RF PWR PKG,SUP,A-MATCH,CONT,RK MT,CBLS,CE	RF03A22XX300	$9,895.00
Complete R-Series Power Supply Packages	KJLC 600W,220V RF PWR PKG,SUP,A-MATCH,CONT,RK MT,CBLS,CE	RF06A22XX300	$14,150.00
Complete R-Series Power Supply Packages	KJLC 1KW,220V RF PWR PKG,SUP,A-MATCH,CONT,RK MT,CBLS,CE NOTE: OUTPUT CONNECTIONS MUST BE VERIFIED WITH PED BEFORE QUOTING	RF10A22XX300	$21,430.00
Complete R-Series Power Supply Packages	KJLC 2KW,220V RF PWR PKG,SUP,A-MATCH,CONT,RK MT,CBLS,CE NOTE: OUTPUT CONNECTIONS MUST BE VERIFIED WITH PED BEFORE QUOTING	RF20A22XX300	$26,540.00

X CLOSE

NOTE: Contact us by clicking here for more information, including pricing and options, and to discuss your specific process application requirements.

Accessories Table

X CLOSE

Description	Reference	Type	Part Number	Price	In Stock	Add Item
Description	Reference	Type	Part Number	Price	In Stock	Add Item
CABLE,COAXIAL,RG213,3 FT OAL,MALE"HN" TO MALE "N"	Type HN Plug To Type N Plug, RG213, 3ft LG	Interconnect Cable	EJCBL3HN	$229.00
CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "N"	Type N Plug To Type N Plug, RG213, 3ft LG	Interconnect Cable	EJCBL3NN	$114.00
CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO PIGTAIL	Type N Plug To Pigtail (1/4"Ring Lug Center Connector And Flying Ground Wire), RG213, 3ft LG	Interconnect Cable	EJCBL3NP	$100.00
CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "UHF"	Type N Plug To UHF Plug, RG213, 3ft LG	Interconnect Cable	EJCBL3NU	P.O.R.
CABLE,COAXIAL,RG213,6 FT OAL,MALE"HN" TO MALE "N"	Type HN plug to Type N Plug, RG213, 6ft LG	Interconnect Cable	EJCBL6HN	$179.00
CABLE,COAXIAL,RG213,6 FT OAL,MALE"N" TO MALE "N"	Type N plug to Type N Plug, 6ft LG	Interconnect Cable	EJCBL6NN	$275.00
CABLE,COAXIAL,RG213,6 FT OAL,MALE"N" TO PIGTAIL	Type N Plug to Pigtail (1/4" Ring Lug Center Connector And Flying Ground Wire), RG213, 6ft LG	Interconnect Cable	EJCBL6NP	$110.00
CABLE,COAXIAL,RG213,6 FT OAL,MALE"N" TO MALE "UHF"	Type N Plug to UHF Plug, RG213, 6ft LG	Interconnect Cable	EJCBL6NU	$150.00

X CLOSE

NOTE: If you require a configuration not shown in this table, please contact us by clicking here or call +1 800 245 1656.