We are proud to announce a new development from our Process Equipment Division a Full Target Encapsulation (FTE) Shutter, focused on developing a magnetron shutter design that is both compact and effective in eliminating cross-contamination between sources. This dedication to innovation and customer satisfaction has led to the creation of a pioneering product that not only meets but exceeds performance expectations. That is why we are excited to announce a development in technical capabilities that significantly enhances the our magnetron shutter design, particularly in achieving near-zero cross-contamination.
Cross-contamination in a sputtering system can significantly compromise the quality and integrity of the thin films being deposited. It occurs when material from one target is unintentionally deposited onto another, leading to impurities in the layers. This can alter the physical and chemical properties of the films, such as electrical conductivity, optical transparency, and magnetic behavior, which are critical for the performance of the final product.
In applications where precise material composition is essential, such as in the production of semiconductors, sensors, or optical devices, cross-contamination can result in device failure or suboptimal performance. Therefore, a magnetron shutter design that effectively eliminates cross-contamination is crucial for ensuring the purity of the deposited films and the reliability of the devices they are used in.
For those of you that don’t know this year we celebrated our 70th anniversary. During much of that time Kurt J. Lesker III championed the pursuit of relentless customer support and continuous innovation, which are at the core of our mission to "Enable Technology for a Better World." He instituted "Garage" groups, to encourage ongoing innovation discussions, which would eventually lead to our Centers of Excellence. These principles continue to be carried forward enthusiastically under the leadership of Kurt J. Lesker IV and the commitment of our team, who embody the company's SPIRIT values. This FTE is the most recent example of our Sputter COE and we could not be more proud of the product and the collaboration of our team.
The FTE Shutter is offered exclusively on the KJLC Sputtering Systems.
The KJLC Shutter Evolution
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| Cross Contamination Prevention | SWING/FLIP | COMPACT DOME | FTE |
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| Can I operate this without a chimney? |  |
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| Can I operate this without secondary shielding? | |
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| Is the line of sight from adjacent sources to target blocked? | |
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Compact Dome vs. FTE Shutter Motion
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