Archives

Users of diffusion pumps for harsh processes or in non-optimized vacuum systems may be seeing crystallization of solids in their pump fluid. This crystallization results from decomposition of fluids due to over exposure to oxygen at high temperatures. This break down alters the viscosity of the pump fluid and may also obstruct flow passages. Further, the build-up of solids and crystals on internal surfaces can lead to inefficient heat transfer which may make operation of the pump unstable.

Greenhouse gas (GHG) emissions from the semiconductor industry comprise a tiny contribution to the global climate change issue, at less than <0.2% (ref 1). However, with a strategic act of brilliance, the industry has adopted voluntary measures, going back to the mid '90s. These measures have enabled this industry to reduce its contribution to emissions that may cause global climate change by more than 30%, when the goal of the initial program was only a 10% reduction. For most other industries that would have been an unachievable feat (ref 2, World Semiconductor Council).