MKS® Granville-Phillips® 902B Absolute Piezo Vacuum Transducer
0.1 to 1000 Torr pressure/vacuum gauges with MEMS-based Piezo sensors
The MKS 902B Piezo transducer combines the pressure measurement technology of a MEMS-based Piezo sensor with a metal sealed stainless steel 316 diaphragm and integrated electronics. The 902B provides economical, absolute pressure measurement that is independent of gas type.
Features
- Low cost transducer alternative to more expensive conventional transducers
- Gas independent pressure measurement for accurate, total pressure measurement
- Sensor is suitable for harsh processes due to robust design and stainless steel construction
- Solid state Piezo sensor resistant to damage from air inrush and vibrations
- Compact system design with integrated electronics and sensor in one unit
- Mountable in any orientation for ease of installation
- Reduced process cycle time due to sensor's fast, accurate and repeatable pressure measurements
- Ease of operation with both analog output and digital communication
- Multiple analog output emulations available
- Process control with up to three setpoint relays with fast response time
- Optional display version
Applications
- Semiconductor manufacturing
- Thin film coatings
- Freeze-drying
- Analytical instruments
- Medical devices
- Automotive
- Aerospace
Specifications Table
Model | 902B |
---|---|
Technology |
Piezo
|
Measurements |
Torr Min: 0.10 Max: 1330 mbar Min: 0.13 Max: 1330 |
Temperature |
Operating 40.0 ºC 104 ºF Storage 40.0 ºC 104 ºF Bakeout 100 ºC 212 ºF |
Materials Exposed to Vacuum |
316 Stainless Steel |
Connectors |
15 Pin Sub D Male 9 pin Sub D Male |
Typical Accuracy |
±1% of reading (10 to 1000 Torr)
|
Accuracy Range |
0.05 to 1%
|
Set-Point Relays |
0 - 3 |
Relay Response |
1 A @ 30VAC/DC
resistive N/A |
Analog Output |
0 to 10 VDC
|
Recommended Mounting Orientation |
Any
|
Input Power |
9 to 30 VDC
< 1.2 watts max |
Communications (Standard) |
Analog
|
Communications (Optional) |
RS485 DeviceNet
|
Compliance and Standards |
2004/108/EEC Electromagnetic Compatibility
|
Integrated Electronics |
Yes
|
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Configuration Options
This chart is to help you review all the available options for the MKS Granville-Phillips 902B Absolute Piezo Vacuum Transducer. Please see below for an interactive product builder to assemble the options into a part number ready for order.
Ordering Code Example: 902B-12124
Series Options | Code | Configuration |
902B Piezo Transducer | 902B | 902B |
Flange Options | Code | Configuration |
KF16 | 1 | 1 |
1/8" NPT | 3 | |
4 VCR | 4 | |
8 VCR | 5 | |
KF16 Ext | 8 | |
Interface Options | Code | Configuration |
RS232 / Analog | 1 | 2 |
RS485 / Analog | 2 | |
EtherCAT / Analog | E | |
Analog Out Options | Code | Configuration |
0-10 VDC (Linear 10 mV / Torr) | 0 | 1 |
0-5 VDC (Linear 5 mV / Torr) | 1 | |
Connector / Relays Options | Code | Configuration |
D-Sub 9 pin male/One Relay | 1 | 2 |
D-Sub 15 pin HD male/No Relay | 2 | |
D-Sub 15 pin HD male/Three Relays | 3 | |
D-Sub 15 pin HD male/One Relay (EtherCAT only) | V | |
Enclosure / Display Options | Code | Configuration |
Standard/Viton Sealing | 0 | 4 |
Standard/Viton Sealing/Display (not available with EtherCAT) | 4 |
902B Absolute Piezo Transducer Pressure Sensor Pin-outs
9 Pin "Sub-D"
Pin | Description |
1 | Relay Normally Open |
2 | Relay Normally Closed |
3 | Power + (9-30 VDC) |
4 | Power Return - |
5 | Analog Output + |
6 | Relay Common |
7 | RS485 -/ RS232 Transmit |
8 | Analog Output |
9 | RS485 +/ RS232 Receive |
15 Pin HD "Sub-D"
Pin | Description |
1 | RS485 - / RS232 Transmit |
2 | RS485 + / RS232 Receive |
3 | Power + (9-30 VDC) |
4 | Power Return - |
5 | Analog Output + |
6 | Analog Output - |
7 | Relay 1 Normally Open |
8 | Relay 1 Common |
9 | Relay 1 Normally Closed |
10 | Relay 2 Normally Closed |
11 | Relay 2 Common |
12 | Relay 2 Normally Open |
13 | Relay 3 Normally Closed or Analog Output 2 + |
14 | Relay 3 Common |
15 | Relay 3 Normally Open |
Start Your Configuration
Ordering Table
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Description | Technology | Display Type | Set-Point Relays | Connector Type | Flange | Communications (Standard) |
|
Part Number | Price | In Stock | Add To Cart | Accessories | ||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Description | Technology | Display Type | Set-Point Relays | Connector Type | Flange | Communications (Standard) |
|
Part Number | Price | In Stock | Add To Cart | Accessories | ||||
TRANSDUCER, |
Piezo | Digital | 1 | 9 pin Sub D Male | KF16 | Analog |
|
|
$682.00 | |||||||
TRANSDUCER, |
Piezo | Digital | 0 | 15 Pin Sub D Male | KF16 | Analog |
|
|
$693.00 | |||||||
TRANSDUCER, |
Piezo | No | 3 | 15 Pin Sub D Male | KF16 | Analog |
|
|
$503.00 | |||||||
TRANSDUCER, |
Piezo | Digital | - | 9 pin Sub D Male | KF16 | Analog |
|
|
$815.00 | — | ||||||
TRANSDUCER, |
Piezo | No | 0 | 15 Pin Sub D Male | KF16 | Analog |
|
|
$451.00 | — | ||||||
TRANSDUCER, |
Piezo | Digital | 3 | 15 Pin Sub D Male | KF16 | Analog |
|
|
$706.00 | — | ||||||
EUDF-SUPP TRANSDUCER, |
Piezo | Digital | - | 9 pin Sub D Male | 4 VCR Female | Analog |
|
|
P.O.R. | — | ||||||
GAUGE, |
MEMS Pirani | Digital | 1 | 9 pin Sub D Male | KF16 | Analog,RS232 |
|
|
$790.00 | — | ||||||
GAUGE, |
MEMS Pirani | None | 1 | 15 Pin Sub D Male | KF16 | Analog,RS232 |
|
|
$604.45 | — | ||||||
GAUGE, |
MEMS Pirani | Digital | 3 | 15 Pin Sub D Male | KF16 | Analog,RS232 |
|
|
$925.00 | — | ||||||
GAUGE, |
MEMS Pirani | None | 3 | 15 Pin Sub D Male | KF16 | Analog,RS485 |
|
|
$620.00 | — | ||||||
GAUGE, |
MEMS Pirani | Digital | 3 | 15 Pin Sub D Male | KF25 | Analog,RS232 |
|
|
$828.00 |
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Accessories Table
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Description | Accessory Type | Part Number | Price | In Stock | Add Item | |
---|---|---|---|---|---|---|
Description | Accessory Type | Part Number | Price | In Stock | Add Item | |
PDR900 to 9 Pin RS232, 10ft (3m) |
|
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PDR900 to 15 Pin RS232, 10ft (3m) |
|
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PDR900 to 9 Pin RS485, 10ft (3m) |
|
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PDR900 to 15 Pin RS485, 10ft (3m) |
|
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Power Supply, Convert 120 Vac to 12 Vdc, 15 pin, 6 ft (1.8 m) |
|
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Serial Communication Adaptor, 15 Pin to USB, RS232 or RS485 Communications for 900 Series MKS Transducers |
|
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PDR900 Single Channel Controller, RS232/RS485, EU power Supply |
|
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PDR900 Single Channel Controller, RS232/RS485, UK power Supply |
|
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PDR900 Single Channel Controller, RS232/RS485, US power Supply |
|
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Aluminum Clamp, DN16 ISO-KF Flange |
|
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Viton® Centering Ring for DN16 ISO-KF Flange |
|
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