MKS^® 946 Vacuum System Controller

The MKS 946 is a versatile half-rack vacuum gauge measurement and control system. It provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure.

This highly flexible vacuum system controller supports a wide range of sensor technologies, including Baratron^® capacitance manometers, cold cathode, hot cathode, standard Pirani and convection Pirani sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. In addition, the Series 946 Controller will also monitor and control MKS I, G, or P-Series and legacy mass flow controllers as well as MKS pressure control valves.

Features & Benefits

• Simultaneous control and readout for up to six vacuum gauges and/or six mass flow controllers
• Pressure readings from 1,000 Torr down to 10^-11 Torr, eliminating the need for individual electronics for each sensor
• Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
• RS232/485 computer control standard in all configurations for ease of system integration
• Flow ratio control using multiple mass flow controllers
• Intelligent communication between gauges enables a reference sensor to span or zero another gauge allowing accurate, continuous measurement over wide pressure ranges
• 12 set point relays included in the base unit for system control flexibility

Dimensional Drawings

Specifications Table

Compatible MKS^® Baratrons^® and Piezo Gauges

The MKS 946 Vacuum System Controller is compatible with, but not limited to, the following MKS Baratrons for fast, accurate, and gas independent pressure measurement.

If you don't see the gauge you are looking for, please contact us by clicking here or +1 800 245 1656 for additional gauges.

Gauge		Description
	MKS® AA01A a-Baratron® Absolute, Ambient Temperature Capacitance Manometer	(0.1 to 1000 Torr) Advanced, High Performance Pressure/Vacuum Measurement - Ambient Temperature Operation
	MKS® AA02A a-Baratron® Absolute Analog Heated Capacitance Manometer*	(1 to 1000 Torr) for General Purpose Vacuum / Pressure Measurement - Temperature Controlled to 45°C, 80°C, or 100°C
	MKS® 626D Baratron® Absolute Ambient Temperature Capacitance Manometer	(0.1 to 1000 Torr) Direct, Absolute, Analog Pressure/Vacuum Measurement - Ambient Temperature Operation
	MKS® 627H Baratron® Temperature Regulated Capacitance Manometer	(0.02 to 1000 Torr) Direct, Absolute, Analog Pressure/Vacuum Measurement - Temperature Controlled to 45°C
	MKS® 628H Baratron® Temperature Regulated Capacitance Manometer**	(0.05 to 1000 Torr) Direct, Absolute, Analog Pressure/Vacuum Measurement - Temperature Controlled to 100°C
	MKS® 722C Baratron® General Purpose Absolute Capacitance Manometer	(1 to 1000 Torr) Compact, Low-Cost Capacitance Manometer Analog Pressure/Vacuum Measurement - Ambient Temperature Operation
	MKS® Granville-Phillips® 902B Absolute Piezo Vacuum Transducer	Low cost, highly accurate, gas independent gauge for pressure measurement down to 0.1 Torr.
	423 IMAG Cold Cathode Gauge	The 423 IMAG is an inverted magnetron cold cathode gauge with a measurement range from 1e-11 to 1e-2 Torr.

*The AA02A must be +/-15 VDC to be compatible with the 946 Controller.
**If running 2x 628H Baratrons, it is recommended to have 1 warmed-up prior to warming up the second, as to avoid an inrush of current and exceed the 1 amp max.

Compatible MKS^® MFCs

The MKS 946 Vacuum System Controller is compatible with, but not limited to, the following MKS MFCs.

If you don't see the MFC that you need, please contact us by clicking here or +1 800 245 1656 for additional MFCs.

Mass Flow Controller		Description
	MKS® GE50A Digital Mass Flow Controller (MFC)	Elastomer-sealed MFC, Flow Rates up to 50 slm, general purpose Multi-gas, Multi-range, Mass Flow Controller
	MKS® GM50A Digital Mass Flow Controller (MFC) & Meter	Metal-sealed MFC, Flow Rates up to 50 slm, general purpose Multi-gas, Multi-range, Mass Flow Controller
	MKS® GV50A Digital Mass Flow Controller (MFC)	Elastomer-sealed MFC with an Integrated Shut-off Valve, Flow Rates up to 50 slm, general purpose Multi-gas, Multi-range, Mass Flow Controller
	MKS® GM100A Digital Mass Flow Controller (MFC)	Metal-sealed MFC, Flow Rates up to 100 slm, general purpose Multi-gas, Multi-range, Mass Flow Controller
	MKS® GE250A Digital Mass Flow Controller (MFC)	Elastomer-sealed MFC, Flow Rates up to 250 slm, general purpose Multi-gas, Multi-range, Mass Flow Controller

Configuration Options

This chart is to help you review all the available options for the MKS^® 946 Vacuum System Controller. Please see below for an interactive product builder to assemble the options into a part number ready for order.

Ordering Code Example: 946-US-CMFCNA-PC

*NOTE: Cold Cathode with Fast Response Relay (TTL) is generally used to meet the requirements for a fast control vacuum system (such as to close a valve rapidly to protect a UHV system). For further information, please contact gauging@lesker.com.