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TORUS^® Circular HV (High Vacuum) Magnetron Sputtering Sources

KJLC offers a comprehensive line of circular TORUS^® magnetron sputter sources suited for most R&D applications. Traditional indirect-cooled, clamped style target design with integral anode shield assembly. Optimal for low to mid power, R&D and small scale production applications. These sputter cathodes range in size from one to four inches in diameter, are functional with virtually any material, have exceptional target utilization, and can be driven by RF, DC, or Pulsed-DC power supplies.

Engineered for Optimum Performance:

Wide pressure range operation to 10^-9 Torr
Low outgassing
Excellent thin film uniformity and deposition rates
Efficient sputter target utilization
Superior target hold down mechanism eliminates the need for thermal pastes, keepers, etc.
Compact, modular magnet array
Magnets NOT exposed to vacuum
Magnets NOT exposed to cooling water
Cooling water is not exposed to vacuum chamber during target change
Unbalanced operation and compatibility with magnetic materials is available (please contact us by clicking here for more information)
Full line of accessories available (gas injection, chimneys, shutters, cluster arrays, etc.)
Custom sputter source configurations available

TORUS^® Dimensions & Available Options All TORUS^® R&D circular sputter sources feature Type-N (male) power connectors, indirect water cooling, and balanced magnetic operation as standard. Unbalanced operation is available, please contact us by clicking here for more information.

Dimensional Drawings

Specifications Table

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Model	Figure	Head Mount Style	Target Diam.	Target Thickness	Dim. A	Dim. B	Dim. C	Dim. D	Dim. E	Deposition Chimney	Gas Injection Ring	Magnetic Materials
TM1	Fig 1	Axial	1.0" (25.4mm)	0.063" - 0.125" (1.6mm - 3.2mm)	4.05" (103mm)	4.28" (109mm)	N/A	9.56" (243mm)	18.48" (469mm)	No	No	No
TM1	Fig 2	Right Angle	1.0" (25.4mm)	0.063" - 0.125" (1.6mm - 3.2mm)	4.05" (103mm)	4.28" (109mm)	N/A	9.56" (243mm)	20.76" (527mm)	No	No	No
TM1	Fig 3	Flex	1.0" (25.4mm)	0.063" - 0.125" (1.6mm - 3.2mm)	5.55" (141mm)	5.78" (147mm)	N/A	9.56" (243mm)	N/A	No	No	No
TM2	Fig 1	Axial	2.0" (50.8mm)	0.080" - 0.25" (2mm - 6.3mm)	4.08" (104mm)	4.38" (111mm)	0.11" (2.8mm)	9.56" (243mm)	18.58" (472mm)	Yes	Yes	Yes
TM2	Fig 2	Right Angle	2.0" (50.8mm)	0.080" - 0.25" (2mm - 6.3mm)	4.08" (104mm)	4.38" (111mm)	0.11" (2.8mm)	9.56" (243mm)	20.88" (530mm)	Yes	Yes	Yes
TM2	Fig 3	Flex	2.0" (50.8mm)	0.080" - 0.25" (2mm - 6.3mm)	5.58" (142mm)	5.88" (149mm)	0.11" (2.8mm)	9.56" (243mm)	N/A	Yes	Yes	Yes
TM3	Fig 1	Axial	3.0" (76mm)	0.080" - 0.25" (2mm - 6.3mm)	3.41" (87mm)	3.79" (96mm)	0.11" (2.8mm)	9.56" (243mm)	18.11" (460mm)	Yes	Yes	Yes
TM3	Fig 2	Right Angle	3.0" (76mm)	0.080" - 0.25" (2mm - 6.3mm)	3.41" (87mm)	3.79" (96mm)	0.11" (2.8mm)	9.56" (243mm)	20.41" (518mm)	Yes	Yes	Yes
TM3	Fig 3	Flex	3.0" (76mm)	0.080" - 0.25" (2mm - 6.3mm)	4.91" (125mm)	5.40" (137mm)	0.11" (2.8mm)	9.56" (243mm)	N/A	Yes	Yes	Yes
TM4	Fig 1	Axial	4.0" (102mm)	0.080" - 0.25" (2mm - 6.3mm)	3.66" (93mm)	4.05" (103mm)	0.11" (2.8mm)	9.56" (243mm)	18.37" (466mm)	Yes	Yes	Yes
TM4	Fig 2	Right Angle	4.0" (102mm)	0.080" - 0.25" (2mm - 6.3mm)	3.66" (93mm)	4.05" (103mm)	0.11" (2.8mm)	9.56" (243mm)	20.67" (525mm)	Yes	Yes	Yes
TM4	Fig 3	Flex	4.0" (102mm)	0.080" - 0.25" (2mm - 6.3mm)	5.16" (131mm)	5.55" (141mm)	0.11" (2.8mm)	9.56" (243mm)	N/A	Yes	Yes	Yes

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* NOTE: Dimensions involving flange-to-target thickness assume a standard target thickness of 1/8 inch. Add or subtract accordingly based on your particular sputter target size.

Start Your Configuration

Select from the configuration options below to create a part number and price for the particular TORUS^Â® sputter source required. Be sure to reference the table above for valid options for a given source size.
Example Configuration: TM2RS10EGP is a 2in. OD right angle mount head on a 10in. long tube with a standard magnet array mounted to an 8in. CF flange with gas injection and pneumatic shaft-style shutter.

1. Target Diameter:
2. Mounting Style:
3. Magnet Array:
4. Tube Length:
5. Flange Size:
6. Gas Injection/Deposition Chimney:
7. Shutter:

Contact us by clicking here or +1 800 245 1656 to discuss your specific vacuum application and process equipment needs.

Ordering Table

Please reference the ordering table below for Magnetron Sputtering Sources that we generally have in stock in one of our global warehouses.

Target Diameter (in)	Magnet Array	Mounting Style	Length (in)	Gas Chimney	Shutter	Part Number	Price	In Stock	Add To Cart
Target Diameter (in)	Magnet Array	Mounting Style	Length (in)	Gas Chimney	Shutter	Part Number	Price	In Stock	Add To Cart
1	Standard	Flex Head	10	Gas Injection Ring	Pneumatic Actuation Swig Style	TM1FS10XGS	P.O.R.
1	Standard	Double Angle	5.15 (Beyond Angle)	—	—	TMS1SSXXX005	P.O.R.
2	High Strength	Flex Head + 45° Angle	10	—	—	TMS2SMXXX001	P.O.R.

Note:

If you require a flange or quick connect for mounting your magnetron to the chamber, we have several standard options. Please click links to see available options.
CF to Quick-Connect Couplings
KF (QF) to Quick-Connect Couplings
Feedthrough Baseplate Coupling Connectors

Accessories Table

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Accessory Type	Description	Reference	Notes	Part Number	Price	In Stock	Add Item
Accessory Type	Description	Reference	Notes	Part Number	Price	In Stock	Add Item
Interconnect Cable	CABLE,COAXIAL,RG213,3 FT OAL,MALE"HN" TO MALE "N"	Type HN Plug To Type N Plug, RG213, 3ft LG	1	EJCBL3HN	$229.00
Interconnect Cable	CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "N"	Type N Plug To Type N Plug, RG213, 3ft LG	1	EJCBL3NN	$114.00
Interconnect Cable	CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO PIGTAIL	Type N Plug To Pigtail (1/4"Ring Lug Center Connector And Flying Ground Wire), RG213, 3ft LG	1	EJCBL3NP	$100.00
Interconnect Cable	CABLE,COAXIAL,RG213,3 FT OAL,MALE"N" TO MALE "UHF"	Type N Plug To UHF Plug, RG213, 3ft LG	1	EJCBL3NU	P.O.R.
Power Supply	500WATT DC POWER SUPPLY,0-500V,0-2A,HN OUT,85-275V INPUT,CE	500 Watt DC, 85-275V Input	-	PD500X1	$6,250.00
Power Supply	1 KW DC POWER SUPPLY,0-1000V,0-3A,HN OUT,85-275V INPUT,CE	1000 Watt DC, 85-275V Input	-	PD500X2	$6,570.00
Power Supply	1.5KW DC POWER SUPPLY,0-1000V,0-4A,HN OUT,100-240V INPUT,CE,ETL	1500 Watt DC, 85-275V Input	-	PD500X3	$6,984.00
Power Supply	KJLC 300W,220V RF PWR PKG,SUP,A-MATCH,CONT,RK MT,CBLS,CE	300W RF, Typically Recommended For 2" And 3" Cathodes	-	RF03A22XX300	$9,895.00
Power Supply	KJLC 600W,220V RF PWR PKG,SUP,A-MATCH,CONT,RK MT,CBLS,CE	600W RF, Typically Recommended For 4" Cathodes	-	RF06A22XX300	$14,150.00
Rebuild Kit	REBUILD KIT,TM01	Torus 1 Cathode (Includes All Screws, Washers, O-Rings, And Water Tubing)	-	TM01CC-RBKIT	$356.00
Rebuild Kit	REBUILD KIT FOR TORUS 3	Torus 3 Cathode (Includes All Screws, Washers, O-Rings, And Water Tubing)	-	TM03CC-RBKIT	$350.00
Rebuild Kit	REBUILD KIT,TM04	Torus 4 Cathode (Includes All Screws, Washers, O-Rings, And Water Tubing)	-	TM04CC-RBKIT	$380.00
Rebuild Kit	REBUILD KIT,TRS2	Torus 2 Cathode (Includes All Screws, Washers, O-Rings, And Water Tubing)	-	TRS2CC-RBKIT	$325.00
TM1 Spare Part	SCREW,SOCKET HEAD CAP,SS, 4-40 X 1/4",VENTED,AG PLATED	SCREW,SOCKET HEAD CAP,SS, 4-40 X 1/4",VENTED,AG PLATED	-	HCHU0440-025S4PV	$2.00
TM1 Spare Part	SCREW,SOCKET HEAD CAP,SS, 6-32 X 1/2",AG PLATED	SCREW,SOCKET HEAD CAP,SS, 6-32 X 1/2",AG PLATED	-	HCHU0632-050S4P0	$2.00
TM1 Spare Part	SCREW,SOCKET HEAD CAP,SS 6-32 X 1-1/4",AG PLATED	SCREW,SOCKET HEAD CAP,SS 6-32 X 1-1/4",AG PLATED	-	HCHU0632-125S4P0	$6.00
TM1 Spare Part	O-RING,FKM,1.051"ID X .070"W (ACT),1-1/16"ID X 1/16"W (NOM)	O-RING,FKM,1.051"ID X .070"W (ACT),1-1/16"ID X 1/16"W (NOM)	-	O-V023	$16.00
TM1 Spare Part	O-RING,FKM,1.114"ID X .070"W (ACT),1-1/8"ID X 1/16"W (NOM)	O-RING,FKM,1.114"ID X .070"W (ACT),1-1/8"ID X 1/16"W (NOM)	-	O-V024	$13.00
TM1 Spare Part	SCREW,PAN HEAD,SLOTTED,SS, 4-40 X 3/4",AG PLATED	SCREW,PAN HEAD,SLOTTED,SS, 4-40 X 3/4",AG PLATED	-	SPHU0440-075S4P0	$2.00
TM1 Spare Part	TUBE FITTING, STAINLESS STEEL SWAGELOK, MALE CONNECTOR, 1/8 IN. TUBE OD X 5/16-24	TUBE FITTING, STAINLESS STEEL SWAGELOK, MALE CONNECTOR, 1/8 IN. TUBE OD X 5/16-24	-	SS-200-1-2ST	$22.65
TM1 Spare Part	FERRULE,PTFE,1/8",FOR 1/8" TUBE FITING	FERRULE,PTFE,1/8",FOR 1/8" TUBE FITING	-	T-200-SETS	$10.00
TM1 Spare Part	FITTING,SWAGELOK,PTFE,NUT 1/8"	FITTING,SWAGELOK,PTFE,NUT 1/8"	-	T-202-1	$10.00
TM1 Spare Part	FITTING,UNION,REDUCING,TEFLON, 1/4"TUBE X 1/8"TUBE	FITTING,UNION,REDUCING,TEFLON, 1/4"TUBE X 1/8"TUBE	-	T-400-6-2	$43.80
TM1 Spare Part	CAP,SCREW INSULATOR,#6,TORLON 5533	CAP,SCREW INSULATOR,#6,TORLON 5533	-	TM00CC-00802	$20.00
TM1 Spare Part	TORLON SCREW ISOLATOR,TRS1	TORLON SCREW ISOLATOR,TRS1	-	TM00CC-00805	$29.00
TM1 Spare Part	COPPER COOLING WELL,TORUS 1, FOR STD TORUS 1	COPPER COOLING WELL,TORUS 1, FOR STD TORUS 1	-	TM01CC-00100	$150.00
TM1 Spare Part	DARK SPACE SHIELD, TM1	DARK SPACE SHIELD, TM1	-	TM01CC-00410	$410.00
TM1 Spare Part	TARGET HOLD DOWN RING,TORUS 1, FOR STD TORUS 1	TARGET HOLD DOWN RING,TORUS 1, FOR STD TORUS 1	-	TM01CC-00600	$180.00
TM1 Spare Part	CATHODE BODY WELDMENT,TORUS 1, FOR STD TORUS 1	CATHODE BODY WELDMENT,TORUS 1, FOR STD TORUS 1	-	TM01CC-00710	$400.00
TM1 Spare Part	ISOLATION RING,TORUS 1,FOR STD TORUS 1	ISOLATION RING,TORUS 1,FOR STD TORUS 1	-	TM01CC-00800	$105.00
TM1 Spare Part	REBUILD KIT,TM01	REBUILD KIT, TM1	-	TM01CC-RBKIT	$356.00
TM1 Spare Part	MAGNET ASSEMBLY,STD,TORUS 1,HV	MAGNET ASSEMBLY,STD,TORUS 1,HV	-	TRS802-A1050	$425.00
TM1, TM2 Spare Part	SCREW,SOCKET HEAD CAP,SS, 4-40 X 1/8",AG PLATED	SCREW,SOCKET HEAD CAP,SS, 4-40 X 1/8",AG PLATED	-	HCHU0440-013S4P0	$2.00
TM1, TM2, TM3, TM4 Spare Part	SPUTTERING SOURCE TOOL KIT, 1”, 2”, 3” AND 4”, COMMON TOOLS FOR SERVICE OF HEAD ASSEMBLY, FLEX ASSEMBLY AND BAYONETT CONNECTOR	SPUTTERING SOURCE TOOL KIT, 1”, 2”, 3” AND 4”, COMMON TOOLS FOR SERVICE OF HEAD ASSEMBLY, FLEX ASSEMBLY AND BAYONETT CONNECTOR	-	TM00AC-00011	$20.00
TM1, TM2, TM3, TM4 Spare Part	ASSEMBLY, SOLDER, WIRE ASSEMBLY,10 AWG HV	ASSEMBLY, SOLDER, WIRE ASSEMBLY,10 AWG HV	-	TM00CC-00210	$54.00
TM2 SPARE PART	TRS2 MAGNET ASSEMBLY,HIGH STRENGTH	MAGNET ASSEMBLY, 2” HIGH STRENGTH	-	TRS2CC-HS300	$1,470.00
TM2 Spare Part	DOWEL, PIN, SST, .125 DIA X .31 LG	DOWEL, PIN, SST, .125 DIA X .31 LG	-	90145A878	$2.33
TM2 Spare Part	SCREW,SOCKET HEAD CAP,SS, 4-40 X 3/4",AG PLATED	SCREW,SOCKET HEAD CAP,SS, 4-40 X 3/4",AG PLATED	-	HCHU0440-075S4P0	$1.20
TM2 Spare Part	SCREW,SOCKET HEAD CAP,SS, 4-40 X 1",AG PLATED	SCREW,SOCKET HEAD CAP,SS, 4-40 X 1",AG PLATED	-	HCHU0440-100S4P0	$1.30
TM2 Spare Part	SCREW,SOCKET HEAD CAP,SS, 4-40 X 1-1/4",AG PLATED	SCREW,SOCKET HEAD CAP,SS, 4-40 X 1-1/4",AG PLATED	-	HCHU0440-125S4P0	$2.10
TM2 Spare Part	SCREW,SOCKET HEAD CAP,SS, 6-32 X 1-1/4",VENTED,AG PLATED	SCREW,SOCKET HEAD CAP,SS, 6-32 X 1-1/4",VENTED,AG PLATED	-	HCHU0632-125S4PV	$7.05
TM2 Spare Part	WASHER,FLAT,SS,SPL,SIZE 4, .209"OD,.115"ID,.016"THICKNESS	WASHER,FLAT,SS,SPL,SIZE 4, .209"OD,.115"ID,.016"THICKNESS	-	NAS620C-4	P.O.R.
TM2 Spare Part	O-RING,FKM,1.612"ID X .103"W (ACT),1-5/8"ID X 3/32"W (NOM)	O-RING,FKM,1.612"ID X .103"W (ACT),1-5/8"ID X 3/32"W (NOM)	-	O-V130	$21.15
TM2 Spare Part	O-RING,FKM,2.112"ID X .103"W (ACT),2-1/8"ID X 3/32"W (NOM)	O-RING,FKM,2.112"ID X .103"W (ACT),2-1/8"ID X 3/32"W (NOM)	-	O-V138	$16.10
TM2 Spare Part	FITTING,SWAGELOK,ADAPTER,SS, 1/4"TUBE TO 1/8"MNPT	FITTING,SWAGELOK,ADAPTER,SS, 1/4"TUBE TO 1/8"MNPT	-	SS-400-1-2	$16.75
TM2 Spare Part	TORLON SLEEVE,CAP SCREW, ELECTRICAL ISOLATION	TORLON SLEEVE,CAP SCREW, ELECTRICAL ISOLATION	-	TM00CC-00206	$30.00
TM2 Spare Part	H.S. COPPER COOLING WELL,HIGH STRENGTH MAGNET/MAG MATL'S	H.S. COPPER COOLING WELL,HIGH STRENGTH MAGNET/MAG MATLS	-	TRS2CC-00110	$250.00
TM2 Spare Part	TTRS2 STD STRENGTH MAGNET ASSY	TTRS2 STD STRENGTH MAGNET ASSY	-	TRS2CC-00300	$555.00
TM2 Spare Part	DARK SPACE SHIELD, TM2	DARK SPACE SHIELD, TM2	-	TRS2CC-00410	$425.00
TM2 Spare Part	REAR DARK SPACE SHIELD	REAR DARK SPACE SHIELD	-	TRS2CC-00415	P.O.R.
TM2 Spare Part	H.S. WATER INLET/OUTLET PLATE, HIGH STRENGTH MAGNET/MAG MATLS	H.S. WATER INLET/OUTLET PLATE, HIGH STRENGTH MAGNET/MAG MATLS	-	TRS2CC-00510	$150.00
TM2 Spare Part	TARGET HOLD DOWN RING	TARGET HOLD DOWN RING	-	TRS2CC-00600	$170.00
TM2 Spare Part	TARGET HOLD DOWN RING SPACER (TO USE 1/4"THICK TARGETS)	TARGET HOLD DOWN RING SPACER (TO USE 1/4"THICK TARGETS)	-	TRS2CC-00650	$60.00
TM2 Spare Part	CATHODE BODY WELDMENT	CATHODE BODY WELDMENT	-	TRS2CC-00710	$362.22
TM2 Spare Part	PTFE ISOLATION RING	PTFE ISOLATION RING	-	TRS2CC-00800	$195.00
TM2 Spare Part	REBUILD KIT,TRS2	REBUILD KIT, TM2	-	TRS2CC-RBKIT	$325.00
TM2 Spare Part	WASHER,SS,.275"OD X .170"ID X .032" THICK	WASHER,SS,.275"OD X .170"ID X .032" THICK	-	W8SPL	P.O.R.
TM2, TM3, TM4 Spare Part	FITTING,UNION CONNECTOR TUBE,SUPER SPEEDFIT,R,1/4"	FITTING,UNION CONNECTOR TUBE,SUPER SPEEDFIT,R,1/4"	-	58159	$6.00
TM2, TM3, TM4 Spare Part	SCREW,SOCKET HEAD CAP,SS, 8-32 X 1/4",AG PLATED	SCREW,SOCKET HEAD CAP,SS, 8-32 X 1/4",AG PLATED	-	HCHU0832-025S4P0	$3.05
TM2, TM3, TM4 Spare Part	TUBING,PTFE,5/32"ID,1/4"OD, PER FOOT	TUBING,PTFE,5/32"ID,1/4"OD, PER FOOT	-	TT025	$5.25
TM3 SPARE PART	MAGNET ASSY, HIGH STRENGTH TORUS 3	MAGNET ASSEMBLY, 3” HIGH STRENGTH	-	TM03CC-HS300	$540.00
TM3 Spare Part	O-RING,FKM,2.425"ID X .103"W (ACT),2-7/16"ID X 3/32"W (NOM)	O-RING,FKM,2.425"ID X .103"W (ACT),2-7/16"ID X 3/32"W (NOM)	-	O-V143	$15.00
TM3 Spare Part	O-RING,FKM,2.612"ID X .103"W (ACT),2-5/8"ID X 3/32"W (NOM)	O-RING,FKM,2.612"ID X .103"W (ACT),2-5/8"ID X 3/32"W (NOM)	-	O-V146	$20.00
TM3 Spare Part	SPACER,.312"OD X .156"ID X .050"THK, +/- .005", 304SST	SPACER,.312"OD X .156"ID X .050"THK, +/- .005", 304SST	-	TM00CC-00903	$2.00
TM3 Spare Part	3" COOLING WELL MACHINING	3" COOLING WELL MACHINING	-	TM03CC-00101	$2,050.00
TM3 Spare Part	MAGNET ASSEMBLY,3" STD	MAGNET ASSEMBLY,3" STD	-	TM03CC-00300	$520.00
TM3 Spare Part	STANDOFF,ROUND,1/4"OD X 1-5/16 LG,6-32 THREAD,MF,ALUMINUM	STANDOFF,ROUND,1/4"OD X 1-5/16 LG,6-32 THREAD,MF,ALUMINUM	-	TM03CC-00306	$5.00
TM3 Spare Part	DARK SPACE SHIELD, TM3	DARK SPACE SHIELD, TM3	-	TM03CC-00410	$210.00
TM3 Spare Part	DARK SPACE SHIELD LIP,3"	DARK SPACE SHIELD LIP,3"	-	TM03CC-00441	$265.00
TM3 Spare Part	CATHODE BODY ASSEMBLY	CATHODE BODY ASSEMBLY	-	TM03CC-00710	$410.00
TM3 Spare Part	INSULATOR,TRS3,TORLON 5530	INSULATOR,TRS3,TORLON 5530	-	TM03CC-00800	$400.00
TM3 Spare Part	REBUILD KIT FOR TORUS 3	REBUILD KIT, TM3	-	TM03CC-RBKIT	$350.00
TM3 Spare Part	TARGET HOLD DOWN RING,TORUS 3UHV	TARGET HOLD DOWN RING,TORUS 3UHV	-	TM03UC-00600	$180.00
TM3 Spare Part	HOLD DOWN RING SPACER,TORUS 3UHV	HOLD DOWN RING SPACER,TORUS 3UHV	-	TM03UC-00650	$38.00
TM3, TM4 Spare Part	SCREW,PTFE FLAT HEAD SLOTTED MACHINE,6-32 X 1/2"LONG	SCREW,PTFE FLAT HEAD SLOTTED MACHINE,6-32 X 1/2"LONG	-	94701A148	$8.00
TM3, TM4 Spare Part	SCREW,SOCKET HEAD CAP,SS, 4-40 X 3/16",AG PLATED	SCREW,SOCKET HEAD CAP,SS, 4-40 X 3/16",AG PLATED	-	HCHU0440-018S4P0	$3.25
TM3, TM4 Spare Part	SCREW, SLOTTED PAN HEAD,SS,4-40 X 1/2", AG PLATED	SCREW, SLOTTED PAN HEAD,SS,4-40 X 1/2", AG PLATED	-	SPHU0440-050S4P0	$3.25
TM3, TM4 Spare Part	FERRULE,SS,1/4",FOR 1/4" TUBE FITTING	FERRULE,SS,1/4",FOR 1/4" TUBE FITTING	-	SS-400-SETS	$5.10
TM3, TM4 Spare Part	FITTING,SWAGELOK,SS,NUT,1/4"	FITTING,SWAGELOK,SS,NUT,1/4"	-	SS-402-1	$4.75
TM3, TM4 Spare Part	SCREW,NATURAL TECATOR,10-24 X 1.11"LG	SCREW,NATURAL TECATOR,10-24 X 1.11"LG	-	TM00CC-00902	$25.00
TM4 SPARE PART	MAGNET ASSEMBLY,4" HIGH STRENGTH	MAGNET ASSEMBLY, 4” HIGH STRENGTH	-	TM04CC-HS300	$750.00
TM4 Spare Part	O-RING,FKM,3.237"ID X .103"W (ACT),3-1/4"ID X 3/32"W (NOM)	O-RING,FKM,3.237"ID X .103"W (ACT),3-1/4"ID X 3/32"W (NOM)	-	O-V152	$22.00
TM4 Spare Part	O-RING,FKM,3.487"ID X .103"W (ACT),3-1/2"ID X 3/32"W (NOM)	O-RING,FKM,3.487"ID X .103"W (ACT),3-1/2"ID X 3/32"W (NOM)	-	O-V153	$25.00
TM4 Spare Part	COOLING WELL ASSEMBLY MACHINING	COOLING WELL ASSEMBLY MACHINING	-	TM04CC-00104	$1,650.00
TM4 Spare Part	MAGNET ASSEMBLY, 4" STANDARD	MAGNET ASSEMBLY, 4" STANDARD	-	TM04CC-00300	$565.00
TM4 Spare Part	STANDOFF, ALUMINUM, ROUND, ¼” OD X 1-7/8” LONG, 6-32 X ¼” LONG MALE & 3/8” DEEP FEMALE THREAD	STANDOFF, ALUMINUM, ROUND, ¼” OD X 1-7/8” LONG, 6-32 X ¼” LONG MALE & 3/8” DEEP FEMALE THREAD	-	TM04CC-00307	$5.00
TM4 Spare Part	DARK SPACE SHIELD, TM4	DARK SPACE SHIELD, TM4	-	TM04CC-00410	$420.00
TM4 Spare Part	DARK SPACE SHIELD LIP, 4"	DARK SPACE SHIELD LIP, 4"	-	TM04CC-00441	P.O.R.
TM4 Spare Part	TARGET HOLD DOWN RING. TORUS 4	TARGET HOLD DOWN RING. TORUS 4	-	TM04CC-00600	$275.00
TM4 Spare Part	HOLD DOWN RING SPACER,TORUS 4	HOLD DOWN RING SPACER,TORUS 4	-	TM04CC-00650	$25.00
TM4 Spare Part	CATHODE BODY ASSEMBLY	CATHODE BODY ASSEMBLY	-	TM04CC-00710	$675.00
TM4 Spare Part	INSULATOR,TRS4,TORLON 5530	INSULATOR,TRS4,TORLON 5530	-	TM04CC-00800	$750.00
TM4 Spare Part	REBUILD KIT,TM04	REBUILD KIT, TM4	-	TM04CC-RBKIT	$380.00