Lesker U Live! is series of free webinars spanning many topics taught by leading vacuum experts.
Lesker U provides the following:
- High-value vacuum expert training
- A solid base of understanding surrounding vacuum technology
- Deep dives on specific vacuum technology topics
Physical Vapor Deposition by Reactive Magnetron Sputtering
Reactive Sputtering (RS) adds an element of inorganic chemistry to the process of sputtering where metal oxides, nitrides, and other species can be produced, as films, from elemental or compound sputtering sources. This class reviews the rational for reactive sputtering and covers a review of the sputtering process, a discussion of the gas-phase chemistry that takes place during RS, how the process is monitored, compositional control, substrate bias, the effect of magnetic fields, and a general review of the issues critical to successful RS. The class will include an opportunity for Q&A with our technical expert.
Duration: 1 Hour(s)
Expert(s): Dominic Fulgoni
Dr. Dominic Fulgoni is a vacuum technology expert and a member of our Process Equipment Division where he provides deposition system installation, service, and applications engineering for our clients in Europe and elsewhere. He has vast experience in the semiconductor industry with a variety of thin film deposition techniques including, SS-MBE, RP-CVD, MOCVD, and magnetron sputtering with a particular interest in HIPIMS and Reactive Sputtering. Dr. Fulgoni holds a PhD in Semiconductor Physics from The University of Warwick and a master’s degree in physics from the University of Leicester.
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REGISTERIntro to High Power Impulse Magnetron Sputtering (HiPIMS)
This course focuses on the theory and practice of High-Power Impulse Magnetron Sputtering (HiPIMS). The theoretical side this course covers how HiPIMS differs from other sputtering techniques, the functionalities of a HiPIMS supply, and process parameters of interest. The practical content will be going over a basic HiPIMS process and discuss applications where HiPIMS has been shown to be a beneficial technique. The class is suitable for researchers with some background with the sputtering technique and who are wondering if HiPIMS might be suitable for their application.
Duration: 1 Hour(s)
Expert(s): Nick Franzer
Nick Franzer is the Process Engineer in our Process Equipment Division for the Kurt J. Lesker Company. Nick's focus within KJLC is on the development of PVD technologies and processes to deposit an optimal film for a wide variety of applications. Nick has championed the integration of the novel High Power Impulse Magnetron Sputtering technology (HiPIMS) with deposition systems and, from sharing his technical experience with HiPIMS, has assisted researchers around the world to quickly master the HiPIMS process.
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REGISTERPhysical Vapor Deposition by Reactive Magnetron Sputtering
Reactive Sputtering (RS) adds an element of inorganic chemistry to the process of sputtering where metal oxides, nitrides, and other species can be produced, as films, from elemental or compound sputtering sources. This class reviews the rational for reactive sputtering and covers a review of the sputtering process, a discussion of the gas-phase chemistry that takes place during RS, how the process is monitored, compositional control, substrate bias, the effect of magnetic fields, and a general review of the issues critical to successful RS. The class will include an opportunity for Q&A with our technical expert.
Duration: 1 Hour(s)
Expert(s): Dominic Fulgoni
Dr. Dominic Fulgoni is a vacuum technology expert and a member of our Process Equipment Division where he provides deposition system installation, service, and applications engineering for our clients in Europe and elsewhere. He has vast experience in the semiconductor industry with a variety of thin film deposition techniques including, SS-MBE, RP-CVD, MOCVD, and magnetron sputtering with a particular interest in HIPIMS and Reactive Sputtering. Dr. Fulgoni holds a PhD in Semiconductor Physics from The University of Warwick and a master’s degree in physics from the University of Leicester.
Date:
REGISTER
