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Erbium Oxide (Er2O3) Sputtering Targets

Erbium Oxide (Er2O3) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here.

Erbium Oxide (Er2O3) Specifications

Material TypeErbium Oxide
SymbolEr2O3
Color/AppearancePink, Solid
Melting Point (°C)2,350
Theoretical Density (g/cc)8.64
Z Ratio**1.00
SputterRF, RF-R
Type of BondIndium, Elastomer
CommentsLoses oxygen.

** The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally determined value. Please click here for instructions on how to determine this value.

Notes:
  • special case note
    Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity. Request more information, please click here.
  • special case note
    This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock. Please click here for Ramp Procedure for Ceramic Target Break-in.

SDS
Click here for the Erbium Oxide SDS.
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Deposition Materials FAQ
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Ordering Table

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Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Size Purity Compatible Guns Notes Part Number Price In Stock Add To Cart
Erbium Oxide ERBIUM OXIDE TARGET, Er2O3, 99.99% PURE, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 1.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTEROX401A2 P.O.R. Contact KJLC for Availability
Erbium Oxide ERBIUM OXIDE TARGET, Er2O3, 99.99% PURE, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 1.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTEROX401A4 P.O.R. Contact KJLC for Availability
Erbium Oxide ERBIUM OXIDE TARGET, Er2O3, 99.99% PURE, 2.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 2.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTEROX402A2 P.O.R. Contact KJLC for Availability
Erbium Oxide ERBIUM OXIDE TARGET, Er2O3, 99.99% PURE, 2.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 2.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTEROX402A4 P.O.R. Contact KJLC for Availability
Erbium Oxide ERBIUM OXIDE TARGET, Er2O3, 99.99% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTEROX403A2 P.O.R. Contact KJLC for Availability
Erbium Oxide ERBIUM OXIDE TARGET, Er2O3, 99.99% PURE, 3.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 3.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTEROX403A4 P.O.R. Contact KJLC for Availability
Erbium Oxide ERBIUM OXIDE TARGET, Er2O3, 99.99% PURE, 4.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 4.00" Dia. x 0.125" Thick 99.99% Most Standard Guns 1 EJTEROX404A2 P.O.R. Contact KJLC for Availability
Erbium Oxide ERBIUM OXIDE TARGET, Er2O3, 99.99% PURE, 4.00" DIAMETER X 0.250" THICK, +/-0.010" ALL 4.00" Dia. x 0.250" Thick 99.99% Most Standard Guns 1 EJTEROX404A4 P.O.R. Contact KJLC for Availability
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 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.

Bonded Assemblies Ordering Table

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Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Material Description Target Size Purity Bonding Type Backing Plate Size Compatible Guns Notes Part Number Price In Stock Add To Cart
Erbium Oxide ERBIUM OXIDE TARGET, Er2O3, 99.99% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.020" ALL, ELASTOMER BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.092" THICK, +/-0.010" DIA, +0/-0.010" THK, FOR TORUS 3 3.00" Dia x 0.125" Thick 99.99% Elastomer 3.00" Dia x 0.092" Thick Standard TORUS 3 EJUERO403TE4 P.O.R. Contact KJLC for Availability
Erbium Oxide ERBIUM OXIDE TARGET, Er2O3, 99.99% PURE, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.125" THICK, +/-0.010" ALL 3.00" Dia x 0.125" Thick 99.99% Indium 3.00" Dia x 0.125" Thick Most Standard Guns 1 EJUEROX403A4 P.O.R. Contact KJLC for Availability

 Notes: 
1.
Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.
Target & Backing Plate Service Form

Target & Backing Plate Service Form

KJLC offers bonding services for both KJLC and customer supplied targets and backing plates. Please fill out our Target & Backing Plate Service Form to acquire a return authorization number.

Target & Backing Plate Service Form
Contact Us - Erbium Oxide Er2O3 Sputtering Targets