Zirconium Nitride (ZrN) Sputtering Targets

Zirconium Nitride (ZrN) Sputtering Targets Overview

Our comprehensive offering of sputtering targets, evaporation sources and other deposition materials is listed by material throughout the website. Below you will find budgetary pricing for sputtering targets and deposition materials per your requirements. Actual prices may vary due to market fluctuations. To speak to someone directly about current pricing or for a quote on sputtering targets and other deposition products not listed, please click here.

Zirconium Nitride (ZrN) Specifications

Material Type	Zirconium Nitride
Symbol	ZrN
Color/Appearance	Yellow, Crystalline solid
Melting Point (°C)	2,980

Theoretical Density (g/cc)	7.09
Z Ratio	**1.00
Sputter	RF, RF-R
Type of Bond	Indium, Elastomer
Export Control (ECCN)	1C234
Comments	Reactively evaporate in 10^-3 Torr N₂.

** The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally determined value. Please click here for instructions on how to determine this value.

Notes:

Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity. Request more information, please click here.
This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock. Please click here for Ramp Procedure for Ceramic Target Break-in.

Hazard Notes:

Export Controlled: This is an Export Controlled Material. Restrictions may apply.

Ordering Table

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Material	Description	Size	Purity	Compatible Guns	Notes	Part Number	Price	In Stock	Add To Cart
Material	Description	Size	Purity	Compatible Guns	Notes	Part Number	Price	In Stock	Add To Cart
Zirconium Nitride	EUDF ZIRCONIUM NITRIDE TARGET, ZrN, 99.5% PURE EX Hf, 1.00" DIAMETER X 0.125" THICK, +/-0.010" ALL	1.00" Dia. x 0.125" Thick	99.5%	Most Standard Guns	1	EJTZRNX251A2	P.O.R.
Zirconium Nitride	EUDF ZIRCONIUM NITRIDE TARGET, ZrN, 99.5% PURE EX Hf, 1.00" DIAMETER X 0.250" THICK, +/-0.010" ALL	1.00" Dia. x 0.250" Thick	99.5%	Most Standard Guns	1	EJTZRNX251A4	P.O.R.
Zirconium Nitride	EUDF ZIRCONIUM NITRIDE TARGET, ZrN, 99.5% PURE EX Hf, 2.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL	2.00" Dia. x 0.125" Thick	99.5%	Most Standard Guns	1	EJTZRNX252A2	P.O.R.
Zirconium Nitride	EUDF ZIRCONIUM NITRIDE TARGET, ZrN, 99.5% PURE EX Hf, 2.00" DIAMETER X 0.250" THICK, +/- 0.010" ALL	2.00" Dia. x 0.250" Thick	99.5%	Most Standard Guns	1	EJTZRNX252A4	P.O.R.
Zirconium Nitride	EUDF ZIRCONIUM NITRIDE TARGET, ZrN, 99.5% PURE EX Hf, 3.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL	3.00" Dia. x 0.125" Thick	99.5%	Most Standard Guns	1	EJTZRNX253A2	P.O.R.
Zirconium Nitride	Zirconium Nitride Circular Sputter Target (3.0" Diameter x 0.250" Thickness, 99.5% pure)	3.00" Dia. x 0.250" Thick	99.5%	Most Standard Guns	1	EJTZRNX253A4	P.O.R.

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Notes:

Dimensions vary by sputtering gun. Review sputtering gun manual to determine appropriate target size.

Bonded Assemblies Ordering Table

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	Material	Description	Target Size	Purity	Bonding Type	Backing Plate Size	Compatible Guns	Part Number	Price	In Stock	Add To Cart
	Material	Description	Target Size	Purity	Bonding Type	Backing Plate Size	Compatible Guns	Part Number	Price	In Stock	Add To Cart
	Zirconium Nitride	EUDF ZIRCONIUM NITRIDE TARGET, ZrN, 99.5% PURE EX Hf, 3.00" DIAMETER X 0.125" THICK, +/- 0.010" ALL, INDIUM BONDED TO COPPER BACKING PLATE, OFHC 101, Cu, 3.00" DIAMETER X 0.092" THICK, +/-0.010" DIA, +0/-0.010" THK, FOR TORUS 3	3.00" Dia. x 0.125" Thick	99.5%	Indium	3.00" Dia x 0.092" Thick	Standard TORUS 3	EJUZRNX253T4	P.O.R.

Target & Backing Plate Service Form

KJLC offers bonding services for both KJLC and customer supplied targets and backing plates. Please fill out our Target & Backing Plate Service Form to acquire a return authorization number.

Target & Backing Plate Service Form

Zirconium Nitride (ZrN) Sputtering Targets