Ruthenium (Ru) Pieces Evaporation Materials

Ruthenium (Ru) Pieces Overview

We sell these pellets and pieces by unit weight for evaporation use in deposition processes. These approximate materials prices are published to provide budgetary guidelines. Actual prices can vary and may be higher or lower, as determined by availability and market fluctuations. To speak to someone directly about current pricing, please click here .

Ruthenium (Ru) General Information

Ruthenium is a rare metal which belongs to the platinum group of elements on the Periodic Table. It has a melting point of 2,310°C, a density of 12.3 g/cc, and a vapor pressure of 10^-4 Torr at 2,260°C. It is silvery white in appearance and typically alloyed with other metals to improve durability and corrosion resistance. Its compounds are often found in electrical contacts and computer microchips. It is evaporated under vacuum to produce semiconductors, magnetic storage media, and fuel cells.

Ruthenium (Ru) Specifications

Thermal Evaporation of Ruthenium (Ru)

Ruthenium is nearly impossible to deposit by thermal evaporation due to the high power required for the material to evaporate. Magnetron sputtering is the recommended method for ruthenium deposition.

E-beam Evaporation of Ruthenium (Ru)

Ruthenium is difficult to deposit by e-beam evaporation, but not impossible. Ruthenium has a vapor pressure of 10^-4 Torr at 2,260°C and is rated as 'poor' for e-beam evaporation due to the high temperatures required to achieve a decent deposition rate. We have not yet qualified a crucible liner material for e-beam evaporation of ruthenium and generally recommend using FABMATE^® as it is compatible with many materials.

As with any new material, we recommend doing a manual run to determine the material's melting point and deposition point. Due to ruthenium's high melting point (2,310°C), high powers are required in order to achieve an effective deposition rate. This will result in the vacuum chamber becoming very hot. Typically, ruthenium does not melt well to form a solid slug for evaporation. In other words, if the starting material is in pellet form, there is a high risk that even at high powers (>5kW), the pellets will not melt together uniformly which will increase the likelihood of the e-beam burning through the pellets and hitting the crucible. This can be evidenced by a sudden and steep fall-off of the deposition rate. It is then possible for the e-beam to drill a hole through the crucible liner and into the e-gun hearth. For these reasons, the e-beam evaporation of ruthenium should be closely monitored through at least welder's shade 9 glass. Great care should be taken during the entire evaporation cycle due to the high degree of difficulty and risk of equipment damage.

We recommend using a pre-machined slug (or starter source) instead of pellets. The two main benefits of using a starter source are ease of use and handling as well as superior packing density. We have also found that using a rod for high temperature materials like ruthenium helps to reduce the amount of power required for deposition. The diameter of the rod is the smallest inner diameter of the crucible liner. The rod is only in contact with the liner on the lower flat, which limits thermal conductivity into the hearth. A fixed, focused e-beam should be used and centered directly in the middle of the ruthenium rod. This will help maximize the deposition rate for a given power. The e-beam should be controlled so that it is always focused on the material and the run should be terminated if the e-beam or material is not cooperating. Ruthenium will still require high power for evaporation when using a starter source or rod, but less so than when using pellets.

KJLC^® can produce these starter sources or rods. Contact us by clicking here with your e-gun manufacturer, pocket size, and number of hearth pockets in order for us to produce a quote.

E-beam Crucible Liner Fill Rate Calculator

Instructions for use:
Input the Crucible Liner Volume, Select Material (if not available in menu, manually input Material Density in g/cm³), and input fill rate %.

KJLC recommends a fill rate between 67-75%. Overfilling the crucible will cause the material to spill over and create an electrical short between the liner and the hearth causing the crucible to crack. Placing too little material in the crucible or allowing the melt level to get too low can be detrimental to the process as well. When the melt level is below 30%, the e-beam is likely to strike the bottom or walls of the crucible which immediately results in breakage.

The fill rate above assumes that the material is fully melted and does not take into account packing density. It should be noted that the crucible liner may need to be loaded multiple times, pre-melted, and topped off in order to achieve the final desired melt level/fill rate. When loading the crucible, do not load more than 80% of the height of the crucible liner.

This calculator is for estimation purposes only.

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Crucible Liner Volume (in cc):

Material:
-- Please Select -- Aluminum Aluminum Antimonide Aluminum Arsenide Aluminum Bromide Aluminum Carbide Aluminum Fluoride Aluminum Nitride Aluminum Oxide Aluminum Phosphide Aluminum, 1% Copper Aluminum, 1% Silicon Antimony Antimony Oxide Antimony Selenide Antimony Sulfide Antimony Telluride Arsenic Arsenic Oxide Arsenic Selenide Arsenic Sulfide Arsenic Telluride Barium Barium Chloride Barium Fluoride Barium Oxide Barium Sulfide Barium Titanate Beryllium Beryllium Carbide Beryllium Chloride Beryllium Fluoride Beryllium Oxide Bismuth Bismuth Fluoride Bismuth Oxide Bismuth Selenide Bismuth Sulfide Bismuth Telluride Bismuth Titanate Boron Boron Carbide Boron Nitride Boron Oxide Boron Sulfide Cadmium Cadmium Antimonide Cadmium Arsenide Cadmium Bromide Cadmium Chloride Cadmium Fluoride Cadmium Iodide Cadmium Oxide Cadmium Selenide Cadmium Sulfide Cadmium Telluride Calcium Calcium Fluoride Calcium Oxide Calcium Silicate Calcium Sulfide Calcium Titanate Calcium Tungstate Carbon Cerium Cerium (III) Oxide Cerium (IV) Oxide Cerium Fluoride Cesium Cesium Bromide Cesium Chloride Cesium Fluoride Cesium Hydroxide Cesium Iodide Chiolite Chromium Chromium (II) Bromide Chromium Boride Chromium Carbide Chromium Chloride Chromium Oxide Chromium Silicide Cobalt † Cobalt Bromide Cobalt Chloride Cobalt Oxide Copper Copper Chloride Copper Oxide Copper Sulfide Cryolite Dysprosium Dysprosium Fluoride Dysprosium Oxide Erbium Erbium Fluoride Erbium Oxide Europium Europium Fluoride Europium Oxide Europium Sulfide Gadolinium † Gadolinium Carbide Gadolinium Oxide Gallium Gallium Antimonide Gallium Arsenide Gallium Nitride Gallium Oxide Gallium Phosphide Germanium Germanium (II) Oxide Germanium (III) Oxide Germanium Nitride Germanium Telluride Glass, Schott^® 8329 Gold Hafnium Hafnium Boride Hafnium Carbide Hafnium Nitride Hafnium Oxide Hafnium Silicide Holmium Holmium Fluoride Holmium Oxide Inconel^® Indium Indium (I) Oxide Indium (I) Sulfide Indium (II) Sulfide Indium (II) Telluride Indium (III) Oxide Indium (III) Sulfide Indium (III) Telluride Indium Antimonide Indium Arsenide Indium Nitride Indium Phosphide Indium Selenide Indium Tin Oxide Iridium Iron (II) Oxide Iron (III) Oxide Iron † Iron Bromide Iron Chloride Iron Iodide Iron Sulfide Kanthal Lanthanum Lanthanum Boride Lanthanum Bromide Lanthanum Fluoride Lanthanum Oxide Lead Lead Bromide Lead Chloride Lead Fluoride Lead Iodide Lead Oxide Lead Selenide Lead Stannate Lead Sulfide Lead Telluride Lead Titanate Lithium Lithium Bromide Lithium Chloride Lithium Fluoride Lithium Iodide Lithium Niobate Lithium Oxide Lutetium Lutetium Oxide Magnesium Magnesium Aluminate Magnesium Bromide Magnesium Chloride Magnesium Fluoride Magnesium Iodide Magnesium Oxide Manganese Manganese (II) Oxide Manganese (III) Oxide Manganese (IV) Oxide Manganese Bromide Manganese Chloride Manganese Sulfide Mercury Mercury Sulfide Molybdenum Molybdenum Boride Molybdenum Carbide Molybdenum Oxide Molybdenum Silicide Molybdenum Sulfide Neodymium Neodymium Fluoride Neodymium Oxide Nichrome IV^® Nickel † Nickel Bromide Nickel Chloride Nickel Oxide Nickel/Iron † Nimendium † Niobium Niobium (II) Oxide Niobium (III) Oxide Niobium (V) Oxide Niobium Boride Niobium Carbide Niobium Nitride Niobium Telluride Niobium-Tin Osmium Osmium Oxide Palladium Palladium Oxide Parylene Permalloy^® † Phosphorus Phosphorus Nitride Platinum Platinum Oxide Plutonium Polonium Potassium Potassium Bromide Potassium Chloride Potassium Fluoride Potassium Hydroxide Potassium Iodide Praseodymium Praseodymium Oxide PTFE Radium Rhenium Rhenium Oxide Rhodium Rubidium Rubidium Chloride Rubidium Iodide Ruthenium Samarium Samarium Oxide Samarium Sulfide Scandium Scandium Oxide Selenium Silicon Silicon (II) Oxide Silicon (IV) Oxide Silicon (N-type) Silicon (P-type) Silicon Boride Silicon Carbide Silicon Nitride Silicon Selenide Silicon Sulfide Silicon Telluride Silver Silver Bromide Silver Chloride Silver Iodide Sodium Sodium Bromide Sodium Chloride Sodium Cyanide Sodium Fluoride Sodium Hydroxide Spinel Strontium Strontium Chloride Strontium Fluoride Strontium Oxide Strontium Sulfide Strontium Titanate Sulfur Supermalloy^® † Tantalum Tantalum Boride Tantalum Carbide Tantalum Nitride Tantalum Pentoxide Tantalum Sulfide Technetium Tellurium Terbium Terbium Fluoride Terbium Oxide Terbium Peroxide Thallium Thallium Bromide Thallium Chloride Thallium Iodide Thallium Oxide Thorium Thorium Bromide Thorium Carbide Thorium Fluoride Thorium Oxide Thorium Oxyfluoride Thorium Sulfide Thulium Thulium Oxide Tin Tin Oxide Tin Selenide Tin Sulfide Tin Telluride Titanium Titanium (II) Oxide Titanium (III) Oxide Titanium (IV) Oxide Titanium Boride Titanium Carbide Titanium Nitride Tungsten Tungsten Boride Tungsten Carbide Tungsten Disulfide Tungsten Oxide Tungsten Selenide Tungsten Silicide Tungsten Telluride Uranium Uranium (II) Sulfide Uranium (III) Oxide Uranium (IV) Oxide Uranium (IV) Sulfide Uranium Carbide Uranium Fluoride Uranium Phosphide Vanadium Vanadium (IV) Oxide Vanadium (V) Oxide Vanadium Boride Vanadium Carbide Vanadium Nitride Vanadium Silicide Ytterbium Ytterbium Fluoride Ytterbium Oxide Yttrium Yttrium Aluminum Oxide Yttrium Fluoride Yttrium Oxide Zinc Zinc Antimonide Zinc Bromide Zinc Fluoride Zinc Nitride Zinc Oxide Zinc Selenide Zinc Sulfide Zinc Telluride Zirconium Zirconium Boride Zirconium Carbide Zirconium Nitride Zirconium Oxide Zirconium Silicate Zirconium Silicide
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Density of the material in g/cm³:

Fill Rate %:

Result

See highlighted results that match your result in the table below.

Material Needed to Deposit a 1 Micron Film Calculator

Instructions for use:
Select source type, input distance from source to substrate and Select Material (if not available in menu, manually input Material Density in kg/m³).

This calculator is for estimation purposes only. The estimated mass is that needed to produce a desired film thickness (1 micron in this case) on a flat substrate at a point directly above the source, accounting for the approximate plume distribution of the selected source type. It does not account for any expected nonuniformity in thickness over a larger substrate area. More complex geometries, e.g. those with offset and/or tilted sources, may have higher material requirements. The estimated mass is for the film deposition only; additional margin should be included to account for loss during ramp-up, burn-in, stabilisation and ramp-down.

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Source:
Point Directional - Thermal Boat Directional - EBeam Directional - LTE/HTE

Distance of source to substrate (in cm):

Material:
-- Please Select -- Aluminum Aluminum Antimonide Aluminum Arsenide Aluminum Bromide Aluminum Carbide Aluminum Fluoride Aluminum Nitride Aluminum Oxide Aluminum Phosphide Aluminum, 1% Copper Aluminum, 1% Silicon Antimony Antimony Oxide Antimony Selenide Antimony Sulfide Antimony Telluride Arsenic Arsenic Oxide Arsenic Selenide Arsenic Sulfide Arsenic Telluride Barium Barium Chloride Barium Fluoride Barium Oxide Barium Sulfide Barium Titanate Beryllium Beryllium Carbide Beryllium Chloride Beryllium Fluoride Beryllium Oxide Bismuth Bismuth Fluoride Bismuth Oxide Bismuth Selenide Bismuth Sulfide Bismuth Telluride Bismuth Titanate Boron Boron Carbide Boron Nitride Boron Oxide Boron Sulfide Cadmium Cadmium Antimonide Cadmium Arsenide Cadmium Bromide Cadmium Chloride Cadmium Fluoride Cadmium Iodide Cadmium Oxide Cadmium Selenide Cadmium Sulfide Cadmium Telluride Calcium Calcium Fluoride Calcium Oxide Calcium Silicate Calcium Sulfide Calcium Titanate Calcium Tungstate Carbon Cerium Cerium (III) Oxide Cerium (IV) Oxide Cerium Fluoride Cesium Cesium Bromide Cesium Chloride Cesium Fluoride Cesium Hydroxide Cesium Iodide Chiolite Chromium Chromium (II) Bromide Chromium Boride Chromium Carbide Chromium Chloride Chromium Oxide Chromium Silicide Cobalt † Cobalt Bromide Cobalt Chloride Cobalt Oxide Copper Copper Chloride Copper Oxide Copper Sulfide Cryolite Dysprosium Dysprosium Fluoride Dysprosium Oxide Erbium Erbium Fluoride Erbium Oxide Europium Europium Fluoride Europium Oxide Europium Sulfide Gadolinium † Gadolinium Carbide Gadolinium Oxide Gallium Gallium Antimonide Gallium Arsenide Gallium Nitride Gallium Oxide Gallium Phosphide Germanium Germanium (II) Oxide Germanium (III) Oxide Germanium Nitride Germanium Telluride Glass, Schott^® 8329 Gold Hafnium Hafnium Boride Hafnium Carbide Hafnium Nitride Hafnium Oxide Hafnium Silicide Holmium Holmium Fluoride Holmium Oxide Inconel^® Indium Indium (I) Oxide Indium (I) Sulfide Indium (II) Sulfide Indium (II) Telluride Indium (III) Oxide Indium (III) Sulfide Indium (III) Telluride Indium Antimonide Indium Arsenide Indium Nitride Indium Phosphide Indium Selenide Indium Tin Oxide Iridium Iron (II) Oxide Iron (III) Oxide Iron † Iron Bromide Iron Chloride Iron Iodide Iron Sulfide Kanthal Lanthanum Lanthanum Boride Lanthanum Bromide Lanthanum Fluoride Lanthanum Oxide Lead Lead Bromide Lead Chloride Lead Fluoride Lead Iodide Lead Oxide Lead Selenide Lead Stannate Lead Sulfide Lead Telluride Lead Titanate Lithium Lithium Bromide Lithium Chloride Lithium Fluoride Lithium Iodide Lithium Niobate Lithium Oxide Lutetium Lutetium Oxide Magnesium Magnesium Aluminate Magnesium Bromide Magnesium Chloride Magnesium Fluoride Magnesium Iodide Magnesium Oxide Manganese Manganese (II) Oxide Manganese (III) Oxide Manganese (IV) Oxide Manganese Bromide Manganese Chloride Manganese Sulfide Mercury Mercury Sulfide Molybdenum Molybdenum Boride Molybdenum Carbide Molybdenum Oxide Molybdenum Silicide Molybdenum Sulfide Neodymium Neodymium Fluoride Neodymium Oxide Nichrome IV^® Nickel † Nickel Bromide Nickel Chloride Nickel Oxide Nickel/Iron † Nimendium † Niobium Niobium (II) Oxide Niobium (III) Oxide Niobium (V) Oxide Niobium Boride Niobium Carbide Niobium Nitride Niobium Telluride Niobium-Tin Osmium Osmium Oxide Palladium Palladium Oxide Parylene Permalloy^® † Phosphorus Phosphorus Nitride Platinum Platinum Oxide Plutonium Polonium Potassium Potassium Bromide Potassium Chloride Potassium Fluoride Potassium Hydroxide Potassium Iodide Praseodymium Praseodymium Oxide PTFE Radium Rhenium Rhenium Oxide Rhodium Rubidium Rubidium Chloride Rubidium Iodide Ruthenium Samarium Samarium Oxide Samarium Sulfide Scandium Scandium Oxide Selenium Silicon Silicon (II) Oxide Silicon (IV) Oxide Silicon (N-type) Silicon (P-type) Silicon Boride Silicon Carbide Silicon Nitride Silicon Selenide Silicon Sulfide Silicon Telluride Silver Silver Bromide Silver Chloride Silver Iodide Sodium Sodium Bromide Sodium Chloride Sodium Cyanide Sodium Fluoride Sodium Hydroxide Spinel Strontium Strontium Chloride Strontium Fluoride Strontium Oxide Strontium Sulfide Strontium Titanate Sulfur Supermalloy^® † Tantalum Tantalum Boride Tantalum Carbide Tantalum Nitride Tantalum Pentoxide Tantalum Sulfide Technetium Tellurium Terbium Terbium Fluoride Terbium Oxide Terbium Peroxide Thallium Thallium Bromide Thallium Chloride Thallium Iodide Thallium Oxide Thorium Thorium Bromide Thorium Carbide Thorium Fluoride Thorium Oxide Thorium Oxyfluoride Thorium Sulfide Thulium Thulium Oxide Tin Tin Oxide Tin Selenide Tin Sulfide Tin Telluride Titanium Titanium (II) Oxide Titanium (III) Oxide Titanium (IV) Oxide Titanium Boride Titanium Carbide Titanium Nitride Tungsten Tungsten Boride Tungsten Carbide Tungsten Disulfide Tungsten Oxide Tungsten Selenide Tungsten Silicide Tungsten Telluride Uranium Uranium (II) Sulfide Uranium (III) Oxide Uranium (IV) Oxide Uranium (IV) Sulfide Uranium Carbide Uranium Fluoride Uranium Phosphide Vanadium Vanadium (IV) Oxide Vanadium (V) Oxide Vanadium Boride Vanadium Carbide Vanadium Nitride Vanadium Silicide Ytterbium Ytterbium Fluoride Ytterbium Oxide Yttrium Yttrium Aluminum Oxide Yttrium Fluoride Yttrium Oxide Zinc Zinc Antimonide Zinc Bromide Zinc Fluoride Zinc Nitride Zinc Oxide Zinc Selenide Zinc Sulfide Zinc Telluride Zirconium Zirconium Boride Zirconium Carbide Zirconium Nitride Zirconium Oxide Zirconium Silicate Zirconium Silicide
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Density of the material in kg/m³:

Multiplier:

Mass for 1 micron layer