Titanium Monoxide (TiO) Tablets Evaporation Materials
Titanium Monoxide (TiO) Tablets Overview
We sell these pellets and pieces by unit weight for evaporation use in deposition processes. These approximate materials prices are published to provide budgetary guidelines. Actual prices can vary and may be higher or lower, as determined by availability and market fluctuations. To speak to someone directly about current pricing, please click here .
Titanium Monoxide (TiO) Specifications
Material Type | Titanium (II) Oxide |
Symbol | TiO |
Color/Appearance | Dark, Crystalline Solid |
Melting Point (°C) | 1,750 |
Theoretical Density (g/cc) | 4.95 |
Z Ratio | **1.00 |
E-Beam | Good |
Thermal Evaporation Techniques |
Boat: W, Mo Crucible: VitC |
E-Beam Crucible Liner Material | FABMATE®, Tantalum |
Temp. (°C) for Given Vap. Press. (Torr) | 10-4: ~1,500 |
Comments | Preheat gently to outgas. |
Suggested QCM Crystal | Alloy Crystal: 750-1002-G10**** |
** The z-ratio is unknown. Therefore, we recommend using 1.00 or an experimentally determined value. Please click here for instructions on how to determine this value.
**** Suggestion based on previous experience but could vary by process. Contact local KJLC Sales Manager for further information
Empirical Determination of Z-Factor
Unfortunately, Z Factor and Shear Modulus are not readily available for many materials. In this case, the Z-Factor can also be determined empirically using the following method:
- Deposit material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
- Place a new substrate adjacent to the used quartz sensor.
- Set QCM Density to the calibrated value; Tooling to 100%
- Zero thickness
- Deposit approximately 1000 to 5000 A of material on the substrate.
- Use a profilometer or interferometer to measure the actual substrate film thickness.
- Adjust the Z Factor of the instrument until the correct thickness reading is shown.
Another alternative is to change crystals frequently and ignore the error. The graph below shows the % Error in Rate/Thickness from using the wrong Z Factor. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.
See highlighted results that match your result in the table below.
Ordering Table
Material | Description | Size | Quantity | Purity | Part Number | Price | In Stock | Add To Cart | |
---|---|---|---|---|---|---|---|---|---|
Material | Description | Size | Quantity | Purity | Part Number | Price | In Stock | Add To Cart | |
Titanium Monoxide |
TITANIUM MONOXIDE PIECES, |
3mm–6mm Pieces | 1 kg | 99.9% | EVMTIO3-6KG | P.O.R. | |||
Titanium Monoxide |
TITANIUM MONOXIDE TABLETS, |
8mm–9mm Dia. x 6mm –7mm Thick Tablets | 50 g | 99.9% | EVMTIO30TABB | P.O.R. | |||
Titanium Monoxide |
TITANIUM MONOXIDE TABLETS, |
8mm–9mm Dia. x 6mm –7mm Thick Tablets | 1 kg | 99.9% | EVMTIO30TABKG | P.O.R. |