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KJLC® 979 Series Wide-Range Combination Gauges
Specifically designed for UHV processes and ideal for measuring the wide cyclic pressures of PVD and Ion Implantation systems.
The dual sensor design and digital interface handle high-vacuum coating applications requiring long-term stability and accuracy. The compact package makes it ideal for system integrators and equipment manufacturers in both the semiconductor and analytical markets.
Features
- Miniature ion gauge combined with our compact Pirani sensor
- MEMS-based digital technology for real-time data access
- Wide measurement range of atmosphere to 10-10 Torr (mbar) for high-vacuum processes (13 decades)
- RS-485 communications and control
- 3 sensor independent set-point relays
- Low power—24 VDC, 10W
- Multi-sensor alternative with smoothed analog output (0.5–7 VDC)
- Reduced process cycle time due to the sensor's fast, accurate, and repeatable pressure measurement
- Two yttria-coated iridium filaments, designed for extended life, are controlled via RS-485 interface
- Unique sensor assembly design is easily serviceable
Specifications Table
| Measurement Range | 5 x 10-10 Torr (6.7 x 10-10 mbar) to atmosphere |
| Communications Interface | RS-485 |
| Power Requirements | 24 VDC (10W max) |
| Accuracy (% of measurement) | 10-9 to 10-3 Torr (mbar): 20% of Reading 10-3 to 100 Torr: 5% of Reading 100 Torr to atmosphere: 25% of Reading |
| Temperature (operating) | 0-40° C |
| Temperature (bakeout) | 100° C (non-operating) |
| Materials Exposed to Vacuum | Silicon, SiO2, SiN4, gold, glass, tungsten, 304 SS, Viton, Ultem 1000, platinumclad molybdenum, yttria-coated iridium, epoxy resin |
| Repeatability (Typical) | 10-9 to 10-3 Torr (mbar): 5% of Reading 10-3 to 100 Torr (10-3 to 133 mbar): 2% of Reading 100 Torr to atmosphere (133 mbar): 10% of Reading |
| Set-Point Range | 5 x 10-10 to 100 Torr (6.7 x 10-10 to 133 mbar) |
| Set-Point Relays | 3, SPDT, 1A @ 30 VAC/DC (resistive) |
| Mounting/Installation Orientation | Any |
| Calibration Gas | Nitrogen |
| Analog Outputs | 0.5-7 VDC (0.5 VDC/decade) |
| Internal Volume | 1.47 in3 |