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KJLC® 972 Series
Features
- Single transducer provides a wide measurement range of 10-8 Torr to atmosphere, eliminating the need for multiple vacuum gauges
- The MEMS based MicroPirani™ sensors allows low auto cold cathode turn-on pressure (user programmable from 2x10-4 to 1x10-3 Torr) for enhanced reliability
- Includes both analog and digital communication for ease of operation
- MicroPirani™ is automatically zeroed during pump down cycle for improved accuracy
- Mountable in any orientation
- Simplified interface via a single smoothed analog output that combines the individual vacuum sensor measurements
- Alternate analog output and electrical connectors available to match other vendors' vacuum gauges and facilitate an easy upgrade
- Can be used with the PDR900 Vacuum Gauge Controller and Display for Series 900 Transducers for easy set up
- RoHS and CE Compliant
Specifications Table
| Sensor Type | Cold Cathode/MicroPirani™(MEMS Thermal Conductivity) |
| Measurement Range | 1x10-8 Torr to Atmosphere |
| Communications Interface | RS-485 or RS-232 |
| Power Requirements | 9-30VDC, 2W |
| Temperature (operating) | 0° to 40°C (32° to 104°F) |
| Temperature (bakeout) | 85°C (185°F), non-operating |
| Max. Pressure | 1500 Torr |
| Materials Exposed to Vacuum | 304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic |
| Accuracy (typical) | 5x10-8 Torr to 10-3 ± 30% of reading 10-3 to 100 ± 5% of reading |
| Repeatability (Typical) | 5x10-8 Torr to 10-3 ± 30% of reading 10-3 to 100 ± 2% of reading |
| Mounting/Installation Orientation | Any |
| Calibration Gas | Nitrogen |
| Analog Outputs | 0.5 VDC/decade |