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Manual SS Sapphire-Sealed Variable Leak Valve (CF Flanged)

Bakeable leak valves are used to control the flow of gas into a vacuum system from an external source. A soft metal pad is compressed against a harder metal seat, creating the necessary seal for precise gas flow control.

  • Typical applications include argon processing, sputtering, system purging, precision gas control, and laser back-filling
  • Stainless steel, sapphire and copper alloy construction for long life
  • Inlet pressure to 34 bar maximum
  • Operating pressure from 1 bar to 10-11 Torr
  • Extremely precise control mechanism
  • Bakeable to 450°C in either open or closed position
  • User serviceable

Specifications Table

Manufacturer
Pressure Torr
1.00 x 10-10 Torr
mbar
1.33 x 10-10 mbar
atm
1.00 atm
Rates Controlled Leak Rate
1.33 x 10-9 mbar*L/s
1.00 x 10-9 Torr*L/s
Max Flow
6.00 L/min
Temperature Bakeable
450 ºC
842 ºF

Valve Body
Material
304L SS
X CLOSE
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Note:
  • special case note
    No leak detectable on a helium mass spectrometer leak detector with sensitivity of 1 ×10-10 std cc/sec.

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