Manual SS Sapphire-Sealed Variable Leak Valve (CF Flanged)

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Manual SS Sapphire-Sealed Variable Leak Valve (CF Flanged)

Bakeable leak valves are used to control the flow of gas into a vacuum system from an external source. A soft metal pad is compressed against a harder metal seat, creating the necessary seal for precise gas flow control.

Typical applications include argon processing, sputtering, system purging, precision gas control, and laser back-filling
Stainless steel, sapphire and copper alloy construction for long life
Inlet pressure to 34 bar maximum
Operating pressure from 1 bar to 10^-11 Torr
Extremely precise control mechanism
Bakeable to 450°C in either open or closed position
User serviceable

Specifications Table

Manufacturer
Pressure	Torr 1.000 x 10^-10 Torr mbar 1.330 x 10^-10 mbar atm 1.00 atm
Rates	Controlled Leak Rate 1.330 x 10^-9 mbarL/s 1.000 x 10^-9 TorrL/s Max Flow 6.00 L/min
Temperature	Bakeable 450 ºC 842 ºF
Valve Body Material	304L SS

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Note:

No leak detectable on a helium mass spectrometer leak detector with sensitivity of 1 ×10^-10 std cc/sec.

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