Edwards combines the proven design of their nEXT/DX Series turbo pumps with a backing pump in an integrated unit.
Features:
Fully assembled turnkey pumping solution
Turbo pump and backing pump with integrated TIC controller
Rotary vane or scroll backing pumps available
System start/stop from on-board controller
Pumping and gauge control from integrated TIC controller
RS232 and RS485 communication protocols available
Integrated air-cooling kit
Ultimate pressures to 5 x 10-10 mbar (CF flange models)
Accessories:
Gauge heads and cables(order separately)
Oil mist eliminators(included)
Applications:
UHV systems
Beam lines
Load locks
Surface science
Surface science
Configuration Options:
This chart is to help you review all the available options for the Edwards nEXT/DX TIC Controlled Pumping Station. Please see below for an interactive product builder to assemble the options into a part number ready for order.
Ordering Code Example: TSD6E0002
Turbomolecular Pump
Code
Configuration
nEXT240
TSB
TSD
nEXT300
TSC
nEXT400
TSD
nEXT240T
TSE
nEXT300T
TSF
nEXT400T
TSG
nEXT85D
TSJ
nEXT85H
TSK
Inlet Flange
Code
Configuration
DN40NW
1
6
DN63ISO-K
2
DN63CF
3
DN100ISO-K
4
DN100CF
5
DN160ISO-K
6
DN160CF
7
Backing Pump
Code
Configuration
E2M1.5
1
E
RV5
2
RV12
3
XDD1
A
nXDS6i
D
nXDS10i
E
nXDS15i
F
nXDS20i
G
Vent Option
Code
Configuration
Manual Vent
0
0
TAV5 Vent Valve
1
Electrical Supply
Code
Configuration
220-240 V 50/60 Hz (Europe)
001
002
110-120 V 50/60 Hz (USA)
002
200 V 50/60 Hz (Japan)
003
220-240 V 50/60 Hz (UK)
004
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