Representative Image
V44 Series:
Soft Start Valves
Applications
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/flat panel processes
- All other cluster vacuum systems
Features
- Pneumatic actuator with position indicators
- 2 Step (Soft or Fast) pumping
- Inline and right angle configurations available
- 1 million plus cycle life plus easy maintenance reduces overall cost of ownership
- Available in ISO 25 to ISO 200 sizes as standard
Options
- Custom sizes available
- Bellows Material (SS316L, Inconel)
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
Specifications Table
| Temperature (°C) | Valve body: 120°C Valve actuator: 80°C |
| Pressure Range (torr) | 1 X 10-9 mbar - ATM |
| Differential Press (torr) | ≤ 1.2 bar in either direction |
| Material | Valve Body: 304SS Gate: 304SS Bonnet Seal: AL6061 Welded Bellows: AM350 Valve Actuator: 304SS, AL6061 |
| Seal Material | Fluorocarbon (option KALREZ, ETC) |
| Leak Rate (cc/sec) | <1 X 10-9 mbar. l/s |
| Cycles Until Service (approx.) | ≥ 1 million |
| Position Indicator | SMC D-A93 |
| Operation | Double acting |