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Leybold Scrollvac Series Scroll Vacuum Pumps

Features

  • Oil free
  • High effective pumping speed
  • Low ultimate pressure
  • Low vibration operation
  • Atmospheric inlet pressure allowable

Applications

  • Sputtering Equipment, vacuum deposition equipment, ion plating equipment
  • Surface modification, electron beam process
  • Accelerator, synchrotron radiation
  • Vacuum furnace, heat treatment furnace
  • Laboratory use

Dimensional Drawings

 
SC 5 D SC 15 D SC 30 D SC 60 D

Charts


Product Datasheet
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Remanufactured Vacuum Pumps
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Contact Us - Oerlikon Leybold Scrollvac Series Scroll Vacuum Pumps