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Busch Cobra Series Screw Vacuum Pump

The COBRA dry screw vacuum pumps offer state-of-the-art harsh duty process and high capacity load lock solutions for the most demanding solar, flat panel, semiconductor or coating applications. These vacuum pumps have best-in-class pumping speed combined with superior hydrogen throughput and excellent powder handling capabilities resulting from their unique screw pump design.

COBRA BA 0100 C series pumps use a high performing, air cooling method eliminating the need for cooling water. The unique "flying bearing" screw suspension design eliminates inlet bearing issues and allows for a reduced footprint.

The COBRA BC 0100 F series pumps include PLC controls and are provided with a special coating for handling of corrosive gases and vapors. These vacuum pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket. The BC series also utilizes the unique "flying bearing" screw suspension design eliminates inlet bearing issues and allows for a reduced footprint.

Features:

• Cost-effective, long uptime, energy-efficient
• Long service intervals
• Operationally reliable
• Application-oriented
• Quiet operation ≤ 58 dB (A)

Applications:

• Atomic layer deposition (ALD)
• High-density plasma CVD (HDP CVD)
• Sub-atmospheric CVD (SACVD)
• Metal-organic CVD (MOCVD)
• Plasma-enhanced CVD (PECVD)
• Low-pressure CVD (LPCVD)
• Rapid thermal processing (RTP)
• Load-lock application

Dimensional Drawings

 

Specifications Table