Pascal C2 Semiconductor Compatible Series:
These pumps share the chemical-resistant features of the C1 series but differ in ways that increase their resistance to chloro- and fluoro-containing gases found in semiconductor processing.
- Vanes in both stages are made from a composite material that provides high chemical resistance
- Inlet and exhaust hardware is made of stainless steel
- Oil level sight tube is made from Lexan® to avoid HF etching
- An inert gas bubbler system, in place of the air ballast, works both to cool and to degas the oil
- A special epoxy paint coats the oil casing for additional protection to the pump
Motor Types:
- Pascal pumps are available with either 1-∅ or 3-∅ motors
- Both types are compatible with low and high voltage ranges given in the specification table
- 1-∅ motor features additional advantages - voltage change is made by a simple rocker switch
Specifications Table
Pump Model | 2010C2 | 2015C2 | 2021C2 |
---|---|---|---|
Pumping Speeds |
50 (Hz)
5.30 CFM 9.00 m3/hr
60 (Hz)
6.20 CFM 10.5 m3/hr |
50 (Hz)
8.24 CFM 14.0 m3/hr
60 (Hz)
9.70 CFM 16.5 m3/hr |
50 (Hz)
10.6 CFM 18.0 m3/hr
60 (Hz)
13.0 CFM 22.1 m3/hr |
Ultimate Pressure |
Partial With Gas Ballast
1.00 x 10-4 mbar 7.50 x 10-4 Torr
Partial Without Gas Ballast
5.00 x 10-4 mbar 3.75 x 10-3 Torr
Total With Gas Ballast
1.00 x 10-2 mbar 7.50 x 10-3 Torr
Total Without Gas Ballast
5.00 x 10-4 mbar 3.75 x 10-3 Torr |
Partial With Gas Ballast
1.00 x 10-4 mbar 7.50 x 10-4 Torr
Partial Without Gas Ballast
5.00 x 10-4 mbar 3.75 x 10-3 Torr
Total With Gas Ballast
1.00 x 10-2 mbar 7.50 x 10-3 Torr
Total Without Gas Ballast
5.00 x 10-4 mbar 3.75 x 10-3 Torr |
Partial With Gas Ballast
1.00 x 10-4 mbar 7.50 x 10-4 Torr
Partial Without Gas Ballast
5.00 x 10-4 mbar 3.75 x 10-3 Torr
Total With Gas Ballast
1.00 x 10-2 mbar 7.50 x 10-3 Torr
Total Without Gas Ballast
5.00 x 10-4 mbar 3.75 x 10-3 Torr |
Cooling Method(s) |
Method Convection |
Method Convection |
Method Convection |
Motor Power HP (kW) | 0.74 ( 0.55 ) | 0.74 ( 0.55 ) | 0.74 ( 0.55 ) |
Inlet Flange | KF25 |
KF25 |
KF25 |
Exhaust Flange | KF25 |
KF25 |
KF25 |
Oil Type(s) |
PFPE Part: MFY25/6-5KG |
PFPE Part: MFY25/6-5KG |
PFPE Part: MFY25/6-5KG |
Oil Capacity Quarts (Liters) *Unless otherwise noted |
1.00 ( 0.95 ) | 1.00 ( 0.95 ) | 1.03 ( 0.98 ) |
Noise db(A) | 54.0 | 54.0 | 55.0 |
Compression Stages | 2 |
2 |
2 |
Series | Chemical |
Chemical |
Chemical |
Weight Lbs (kg) | 57.0 ( 26.0 ) | 59.5 ( 27.0 ) | 62.0 ( 28.0 ) |
Dimensions in. (mm.) (W/D/H) |
8.03 x 9.65 x 5.37 (204 x 245 x 136 ) | 8.86 x 10.6 x 6.20 (225 x 270 x 157 ) | 9.69 x 11.5 x 7.03 (246 x 291 x 178 ) |
Lubrication Type | Wet |
Wet |
Wet |
Technology Type | Rotary Vane - Direct Drive |
Rotary Vane - Direct Drive |
Rotary Vane - Direct Drive |
X CLOSE