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QCM Crystals for Thin Film Deposition Rate Monitoring

QCM Crystals, used as a consumable part, to assist with monitor the deposition rate of your thin film deposition process. These crystals are available with either a gold, silver, or alloy coating, all dependent on the thin film deposition process. The 6 MHz crystals are compatible with all KJLC and INFICON monitors/controllers, whereas the 5 MHz crystals are only compatible with certain monitors/controllers.

Features & Benefits

• Minimize cost of consumables with the most consistent and stable crystals to ensure maximum crystal life during in-situ deposition rate monitoring
• Increase profitability and maximize continuous process runs with increased production time during the deposition process
• Optimize inventory management with flexible delivery schedules and in-stock products
• Stable supply from an ISO-certified company
• Maximize process performance and gain customized solutions with worldwide applications support
• Rapid troubleshooting of process variances with expert support

Areas Inspected

• Resistance - Indication of electrical contact and electrode adhesive
• Frequency - Verify to accurate thickness measurement
• Curvature - Tested to assure resonance stability, poor curvature results in measurement stability degrading more rapidly
• Visual Confirmation - Inspected for electrode uniformity, surface flaws, and other imperfections that are indicators of poor electrode adhesion or contamination