A new PVD 200 e-beam and thermal deposition system was installed by us in the newly launched micro-and nano-fabrication facility at Nazarbayev University. Among other projects, the research group is working on the fabrication of various field-effect transistors (FETs), microwave kinetic inductance detectors (MKIDs) and other devices. The PVD 200 system will be used for metal lift-off processes and is equipped with an electron beam source and two thermal sources along with a load lock for fast processing. We're looking forward to hearing more about this project in the future!
