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Protection Valve System
New from Kurt J. Lesker Company-our patented Protection Vacuum Gate Valve's fast action (<0.3 secs to close) protects products that are "in-process" in the event of a vacuum pump failure. This bellows sealed, pneumatic actuated, SS valve system monitors up to four pumps with local or remote control and LCD status display.
The internal mechanism has a low particle generation design and is shielded, in open and closed positions, against particulate accumulation-leading to long life under adverse process conditions
Features
- Fast pneumatic actuation-close in <0.3 seconds
- Patented shielding mechanism
- O-ring sealed actuator
- Long life cycle under adverse process conditions
- Local/remote control with status LCD display
- Easy routine maintenance
- 1, 2, 3, or 4 channel control (on request)
- UPS (on request)
- Separable protection ring down (delayed down time adjustable, on request)
- Heat jacket (on request)
Applications
For vacuum pump or chamber isolation in demanding processes:
- Plasma etching, cleaning, and desmearing
- CVD processes (including MO, PE, HDP, LP, and AP)
- Nanotechnology processes with high particulate levels
- Thin film photovoltaic panels
Specifications Table
| Pressure Range (torr) | 1.0 x 10-6 ~ 12 x 105 Pa (abs) |
| Differential Press (torr) | Opening Direction: 0.12MPa Closing Direction: 0.12MPa |
| Max ΔPress Before Open (torr) | 0.005MPa |
| Material | Bellows: STS 316L Gate (seat): STS 304, AL6061 Valve housing, Bonnet, Shaft (Stem), Bellows end piece: STS 304 Bonnet seal, Pneumatic seal: FKM (Viton®) Gate seal, Vacuum seal: FKM (Viton®), FFKM (Kalrez®) on request |
| Leak Rate (cc/sec) | Housing: <1.0 x 10-10 PA* m3/sec Seat (Gate): <1.3 x 10-10 PA* m3/sec (±) |
| Bakeout Limit. (°C) | Body: 105°C (Viton® o-ring) | 150°C (FFKM o-ring) Actuator: 60°C |
| Mounting | Horizontal |
Dimensional Drawings
Videos
Protection Valve System
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