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Thin Films Systems
Thin Film Systems

High Vacuum Systems
NANO 36™

Compact, full-featured computer controlled PVD tool.

PRO Line PVD Series

R&D, Pilot-production, and production tools.

AXXIS

Glancing Angle Deposition systems.

Ultra High Vacuum Systems
LAB Line

Ultra-High vacuum sputtering systems (10-10 Torr), with up to 15 cathodes. Electron Beam and thermal options available.

CMS Series

Combinatorial Materials Science tool, specifically designed for electron-beam or sputtering applications.

Glove Box Interfaced Systems
NANO 36™

Compact, full-featured computer controlled PVD tool.

SPECTROS™ Series

Glovebox integrated Sputtering, Electron Beam, Thermal, & Organic Evaporation Deposition.

Custom Deposition Systems
Custom Vacuum Systems

Customized solutions for pioneering applications such as TVAC/space simulation, Diamond Like coatings, etc.

Cluster Deposition Systems
OCTOS™

Robotic sample transfer system with up to 10 process modules; Including PVD, ALD, Organics, PLD, CVD, etch; insitu analysis and glovebox options.

Production Systems
BATCH Coaters

Linear batch coaters, and multi-substrate dome coaters for high-throughput applications.

KDF In-Line Solutions

KDF systems can be customized to cover mainstream silicon, emerging materials and flat panel display markets.

Atomic Layer Deposition Systems
ALD150LE™

Thermal Atomic Layer Deposition.

ALD150LX™

Thermal or Plasma-enhanced, load locked Atomic Layer Deposition System.

The Right System for Your Research

The Right System for Your Research

Application Research
Application Research
Perovskite Thin Films for Photovoltaics & Electronics Superconducting PVD Thin Films for Quantum Applications; Qubits & Josephson Junctions PVD of Magnetic Thin Films: Spintronics, GMR & TMR Thin Films & Heusler Alloys
Solid-State Lithium Thin Film Batteries Organic Electronics (OLEDs & OPVs) Reactive Sputtering Research
PVD of Indium Bumps Thin Film Deposition for Lift-Off Processes Physical Vapor Deposition for Medical Devices
Power Your Application Research

Power Your Application Research

Techniques & Capabilities
Techniques & Capabilities
Electron Beam Evaporation Thermal Evaporation Magnetron Sputtering
Organic (Point Source) Evaporation ALD (Atomic Layer Deposition) Multi-Chamber
Glove Box Integration Pulsed Filtered Cathodic Arc Deposition HiPIMS
Techniques That Drive Your Process

Techniques That Drive Your Process

Thin Film Knowledge Base
Thin Film Knowledge Base
Magnetron Performance Optimization Guide Evaporation Process Notes by Material Vacuum Reference Tables Vacuum Technology Concepts Calculators & Conversion Tools Frequently Asked Questions Material Deposition Chart Vacuum Technical Information
System Service & Support
System Service & Support
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Production Vacuum Systems

BATCH Coaters
KDF In-Line Solutions

BATCH Coaters

KJLC Linear Batch Coaters, and Multi Substrate Dome Coaters for Mid-Level Throughput Applications

KDF In-Line Solutions

Vertical and Horizontal Batch Coaters for Mainstream Silicon, Emerging Materials and Flat Panel Display Markets

Magnetron Sputtering Sources

Up to 7 linear cathodes

  • 5" x 15"
  • 5" x 17"
  • 5" x 24"

Up to 4 linear cathodes

  • 5" x 15"
  • 5" x 17"
  • 5" x 24"
  • 5" x 30"

Platen / Deposition Zone

Overall Drum = 30.5" OD x ≈21" LG

  • 1,440 sq/in
  • Heating, Cooling, Bias, Removable Panels
  • Single and Dual Axis Rotation For 3D Components
  • Ion Etch Option

Any Sized Substrate That Fits Within Pallet Area

  • 12" x 12"
  • 20" x 20"
  • 26.5" x 30"
  • Options for RF Bias, Heat over Etch, Backside Cooling

Load Lock

N/A

Dual pallet Standard
Options for Heat and Five Pallet Stacker

Software

Full eKLipse™ Control Software/Hardware Suite

Allen Bradley 'i' PLC with Full Automated Software Control

BATCH Coaters

BATCH CoatersKJLC Linear Batch Coaters, and Multi Substrate Dome Coaters for Mid-Level Throughput Applications

More Info

Magnetron Sputtering Sources

Up to 7 linear cathodes

  • 5" x 15"
  • 5" x 17"
  • 5" x 24"

Platen / Deposition Zone

Overall Drum = 30.5" OD x ≈21" LG

  • 1,440 sq/in
  • Heating, Cooling, Bias, Removable Panels
  • Single and Dual Axis Rotation For 3D Components
  • Ion Etch Option

Load Lock

N/A

Software

Full eKLipse™ Control Software/Hardware Suite
KDF In-Line Solutions

KDF In-Line SolutionsVertical and Horizontal Batch Coaters for Mainstream Silicon, Emerging Materials and Flat Panel Display Markets

More Info

Magnetron Sputtering Sources

Up to 4 linear cathodes

  • 5" x 15"
  • 5" x 17"
  • 5" x 24"
  • 5" x 30"

Platen / Deposition Zone

Any Sized Substrate That Fits Within Pallet Area

  • 12" x 12"
  • 20" x 20"
  • 26.5" x 30"
  • Options for RF Bias, Heat over Etch, Backside Cooling

Load Lock

Dual pallet Standard
Options for Heat and Five Pallet Stacker

Software

Allen Bradley 'i' PLC with Full Automated Software Control
Would You Like More Information?

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Contact Us - Production Vacuum Systems