Representative Image

UHV Bakeable Sensors

Overview

INFICON UHV Bakeable Crystal Sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. Made from 304 Stainless Steel, Molybdenum, Inconel, Nickel, and Alumina materials, the UHV Bakeable Sensor is designed to withstand continuous bakeout temperatures up to 450° C (for bakeout only, water flow required for actual deposition monitoring). The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion.

Each sensor comes completely assembled and includes integral water tubes, in-vacuum coaxial cable (Front Load) or in-vacuum conduit (Cool Drawer), water tube bending tool, crystal snatcher (Front Load), and operating instructions. All air and water tubes (except the bakeable sensor) are 1/8 inch (0.32cm) O.D. All shuttered sensors require the 750-420-G1 pneumatic control valve. Limited use with other controllers is possible call KJLC +1 800 245 1656 or click here to contact us with any technical questions.

Features

High temperature braze & welded construction
Bakeout temperatures to 450° C
Crystal shutter (option)
Front load crystal holder
Easy installation
CF40 feedthrough
No brazing or welding to feedthrough required
Sensor/feedthrough combination welded to customer specified lengths

Specifications

Type	Bakeable Sensor w/ Shutter	Bakeable Sensor w/out Shutter
Maximum temperature	400° C continuous (for bake only; water flow recommended for actual deposition monitoring)	450° C continuous (for bake only; water flow recommended for actual deposition monitoring)
Sensor head size (maximum envelope)	1.35" x 1.38" x 1.21" high (34 mm x 35 mm x 31 mm high	1.35" x 1.38" x 0.94" high (34 mm x 35 mm x 24 mm high)
Crystal exchange	Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange.	Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact.
Mounting	a) Standard-four #4-40 tapped holes on the back of the body b) Optional-right angle bracket; IPN 007-108	Four #4-40 tapped holes on the back of the body
Feedthrough	2.75" ConFlat^®, integral with sensor head. Water, air and coax tubes are semi-rigid, but easily formed (2.0" [50.8 mm] minimum bend radius)	2.75" ConFlat, integral with sensor head. Water and coax tubes are semi-rigid, but easily formed. (2.0" [50.8 mm] minimum bend radius)
Utilities	1) Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the 0.25" water tubes during bakeout.) 2) Filtered, oil-free air, regulated at 80 PSIG (5.5 bar) [552 kPa] 3) Solenoid valve, 750-420-G1, 24 VAC or VDC, or equivalent valve required	Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the 0.25" water tubes during bakeout.)
Materials
Body and holder	304 type stainless steel	304 type stainless steel
Springs	Molybdenum and Inconel X-750	Molybdenum and Inconel X-750
Water, air and coax lines	0.125" (3 mm) O.D. water and air x 0.015" (0.4 mm) wall thickness seamless 304 stainless steel; 0.188" (5 mm) O.D. coax	-
Other mechanical parts	18-8 or 304 stainless	18-8 or 304 stainless
Insulators	>99% Al₂O₃ in vacuum; other high density ceramics used elsewhere	>99% Al₂O₃ in vacuum; other high density ceramics used elsewhere
Wire	1) Ni (in vacuum) 2) Ni plated Cu (elsewhere)	1) Ni (in vacuum) 2) Ni plated Cu (elsewhere)
Braze	Vacuum process high temperature Ni-Cr alloy	Vacuum process high temperature Ni-Cr alloy
Crystal	0.550" (13.97 mm) diameter	0.550" (13.97 mm) diameter

X CLOSE

NOTES

Orders for sensors welded to the feedthroughs should be requested with a length, in cm, between 17 and 99 cm. If another length is needed, please contact us by clicking here . Once special length or manufactured order is confirmed, it can not be canceled.
Sensor lengths are measured from center of the crystal to the vacuum side (sealing surface) of the feedthrough.
For sensors ordered without a weld connection (option "0" or "8"), tubes are made to a length of 29.75" (756mm) for "E" length and Cool Drawer sensors and 44.75" (1137mm) for "G" length sensors.

Configuration Options

Ordering Code Example: BK-A0F-10

Type of Sensor (Includes crystal snatcher and user manual. Crystals sold separately)	Code	Configuration
Standard (water lines parallel to crystal face)	A	A
Shutter Assembly (see note 3)	Code	Configuration
None	0	0
Standard shutter	1	0
Length of Sensor (see note 1)	Code	Configuration
Standard length: Shuttered sensors: 17-99 cm (28-39") Non-shuttered sensors: 10-99 cm (28-39") *** Sensor lengths over 71 cm (28") are subject to an additional charge as well as 2-4 weeks additional lead time.	F	F
Welded Sensor Length (see notes 1 and 2)	Code	Configuration
Weld length in centimeters, 10-70 cm (4-27.5")	10-70	10
Weld length in centimeters, 71-99 cm (28-39")	71-99	10

NOTES

UHV Bakeable Sensor orders are measured from center of the crystal to the vacuum side (sealing surface) of the feedthrough. Once a welded sensor order is confirmed, it cannot be canceled.
All UHV Bakeable Sensors are welded to a CF40 feedthrough.
Shutter air tube is connected to the feedthrough tube using VCR fittings for field replacement.

A Complete Package Consists of

Note: Below you will find common methods to either monitor or control the deposition rate of your process. Please note that not all controllers are listed. If you do not see the equipment that you need, please contact your local KJLC Sales Representative.

If you would like to monitor the deposition rate:

FTM-2400

If you would like to control the deposition rate:

FTC-2800
XTC/3S
XTC/3M
IC6

Compatible Part	Description	Components Needed
KJLC FTM-2400 Multi-Channel Quartz Crystal Monitor	The KJLC FTM-2400 is a user-friendly deposition monitor with digital input, relay outputs, and the capability to connect up to 6 single QCMs or 1 dual QCM for sequential display.	Inficon UHV Bakeable Sensor with feedthrough, KJLC FTM-2400, oscillator kit, and crystals.
KJLC FTC-2800 Multi-Channel Quartz Crystal Controller	The KJLC FTC-2800 is an economical, user-friendly deposition controller, able to control your deposition rate and connect up to 4 single QCMs or 2 dual QCMs. The KJLC FTC-2800C also allows for co-deposition.	Inficon UHV Bakeable Sensor with feedthrough, KJLC FTC-2800, oscillator kit, and crystals.
Inficon XTC/3S Deposition Controller	The Inficon XTC/3S is a deposition controller that includes the patented ModeLock frequency measurement to provide highly accurate control of a single layer process. The XTC/3S allows the control of up to 2 sources, 2 single QCMs, or 2 dual QCMs.	Inficon UHV Bakeable Sensor with feedthrough, Inficon XTC/3S, ModeLock oscillator kit, and crystals.
Inficon XTC/3M Multi-Layer Deposition Controller	The Inficon XTC/3M is a deposition controller that includes the patented ModeLock frequency measurement to provide highly accurate control of a multi-layer process. The XTC/3M allows the control of up to 2 sources, 2 single QCMs, or 2 dual QCMs.	Inficon UHV Bakeable Sensor with feedthrough, Inficon XTC/3S, ModeLock oscillator kit, and crystals.
Inficon IC6 Thin Film Deposition Controller	The Inficon IC6 is the industry standard for deposition and includes the patented ModeLock frequency measurement for high-resolution rates and thicknesses. The IC6 has the capability to control up to 6 sources, 8 single QCMs or 4 dual QCMs.	Inficon UHV Bakeable Sensor with feedthrough, Inficon IC6, CrystalTwo Switch , ModeLock oscillator kit, and crystals.

Start Your Configuration

1. Base Unit:	UHV Bakeable Sensors [BK-]
2. Type of Sensor:	Standard [A]
3. Shutter Assembly:
4. Feedthrough:	Shuttered sensors: 17-99 cm (28-39"), Non-shuttered sensors: 10-99 cm (28-39") [F-]
5. Length:

NOTES

All shuttered sensors require the 750-420-G1 pneumatic control valve.
Sensor Lengths over 76.2 cm (30 inches) are subject to an additional charge as well as 2-4 weeks additional lead time.
All Bakeable Sensors are welded to a CF40 flange.
The STM-2 USB Thin Film Thickness/Rate Deposition Monitor cannot be used with shuttered versions of this sensor.

Part Number:
Price as Configured:	$

UHV Bakeable Sensors

Overview

Features

Specifications

Configuration Options

Start Your Configuration

Related Products