A new, economical single-channel controller that is ideal for applications in the rough to high vacuum range of 100 down to 10-4 Torr (133 to 10-4 mbar) including vacuum pump base pressure measurement and system process startup using the two standard set points.
Features
- Rugged filament design for reliable operation
- Designed for harsh process environments
- Rapid response to pump down and vent operations
- Repeatable measurements and independent relay set points for optimum process control
- Digital LED display
- CE marked
Applications
- Semiconductor
- Load locks
- Leak detection
- Vacuum coating
- Freeze dryers
Specifications Table
Measurement Method | Pirani |
Measurement Range | 1.0 x 10-4 Torr (1.3 x 10-4 mbar) to Atmosphere: 5% of reading Tconst |
Communications Interface | 9-pin, Sub-D-socket |
Temperature (operating) | 0-50° C |
Temperature (bakeout) | 50° C |
Materials Exposed to Vacuum | Stainless steel, nickel 200, alumina, ceramic, platinum, silver brazing alloy |
Repeatability (Typical) | 5% of indicated pressure |
Mounting/Installation Orientation | Any |
Calibration Gas | Air/Nitrogen |