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KJLC® 925 Series Pirani Gauges & PDR900 Controller
These transducers are thermal conductivity gauges based on a unique, MEMS-based sensor.
- Commonly used for vacuum pressure measurement applications in semiconductor and analytical environments, as well as general vacuum applications
- Wide measurement range from 1 x 10-5 Torr (mbar) to atmosphere —based on measurement of thermal conductivity in a small cavity where gas enters by diffusion only, instead of flow
Our transducers experience significantly less problems with temperature drift, low accuracy, calibration, and sensitivity to mounting position compared to traditional Pirani gauges.
Features
- Increased pressure measurement range from 10-5 Torr (mbar) to atmosphere, two decades beyond a standard Pirani
- Set-point relay features a fast response time for reliable process control
- Compact dimensional design
- High accuracy and reduced process cycle time
- Ease of operation via analog output and digital communication
- CE marked, compliant with EMC Directive 89/336/EEC
Sensor
- One-millimeter square silicon chip enables measurements to be made in a very small volume
- Small size and repeatable geometry gives it a range from atmosphere down to 10-5 Torr (mbar)
- Design minimizes the effects of convection—operation is possible in any position without compromising accuracy, simplifying installation
- Solid-state design is highly resistant to air inrush, vibrations, and mechanical force, resulting in less system downtime due to broken filaments
Controls
- Zero adjust
- Atmospheric adjust
- Gas type selection
- Pressure unit selection
- Baud rate and addressing
- Factory default
- Set-point functions
Specifications Table
| Measurement Method | Pirani |
| Measurement Range | 1.0 x 10-5 Torr (2.7 x 10-5 mbar) to Atmosphere |
| Communications Interface | Digital RS-485 or RS-232 |
| Power Requirements | 10-30 VDC, <1.5 W |
| Accuracy (% of measurement) | 10-4 to 10-3 Torr (mbar): 10% of reading 10-3 to 100 Torr (10-3 to 133 mbar): 5% of reading 100 Torr (133 mbar) to Atmosphere: 25% of reading |
| Temperature (operating) | 0-40° C |
| Temperature (bakeout) | 85° C for Shielded model (gauge tube only) |
| Materials Exposed to Vacuum | SiO, SiO2, SiN4, gold, epoxy resin, 304 stainless steel, Kovar®, Viton® |
| Repeatability (Typical) | 10-4 to 10-3 Torr: 8% of reading 10-3 to 100 Torr: 2% of reading 100 Torr to Atmosphere: 10% of reading |
| Set-Point Range | 2.0 x 10-3 to 990 Torr (2.67 x 10-3 to 1,320 mbar) |
| Set-Point Relays | 1 SPDT @ 1A (resistive) |
| Relay Response | 50ms (maximum) |
| Mounting/Installation Orientation | Any |
| Calibration Gas | Air, argon, helium, nitrogen, hydrogen, water vapor |
| Analog Outputs | 1-9 VDC (1 volt per Decade) |