Features and Benefits:
- Compact series of pumping stations for all high vacuum applications
- Various sizes for the turbo and backing pumps for ultimate flexibility
- Simple operation with touch display
- Remote control via web server available
- Reliable and robust
Applications:
- OEMs
- R&D
- System Integrators
- Universities
Specifications Table
Pump Model | HiCube 80 NEO | HiCube 300 NEO |
---|---|---|
Pumping Speeds |
Rough Pumping Speed 50 (Hz)
1.00 - 1.80 m3/hr
High Vacuum Pump Speed
N2: 35.0 - 67.0 L/s |
Rough Pumping Speed 50 (Hz)
1.80 m3/hr
High Vacuum Pump Speed
N2: 255 L/s |
Ultimate Pressure |
ConFlat Flange
5.00 x 10-10 mbar 3.75 x 10-10 Torr
ISO-K Flange
1.00 x 10-7 mbar 7.50 x 10-8 Torr |
ConFlat Flange
5.00 x 10-10 mbar 3.75 x 10-10 Torr
ISO-K Flange
1.00 x 10-7 mbar 7.50 x 10-8 Torr |
Foreline Flange | G 1/8" |
G 1/8" |
Inlet Flange | KF40 ISO63-K DN63CF (4.50" OD) DN63CF (4.5" OD) |
ISO100-K DN100CF (6.00" OD) |
Weight Lbs (kg) | 32.0 - 35.3 ( 14.5 - 16.0 ) | 20.5 - 45.2 ( 20.5 - 20.5 ) |
Technology Type | Turbo Pumping Station |
Turbo Pumping Station |
X CLOSE