MKS® AA02A a-Baratron® Absolute Analog Heated Capacitance Manometer
General purpose vacuum /pressure measurement from 0.1 to 1000 Torr (13.3 Pa to 133.3 kPa)
The MKS a-Baratron manometer is an advanced general purpose absolute heated capacitance manometer developed specifically for use in vacuum and pressure measurement applications where high accuracy and excellent repeatability are crucial to process success. These capacitance manometers are internally heated to 45°, 80°, or 100°C. They can be equipped with either the standard sensor or MKS' patented Etch Baffle sensor technology that greatly reduces process contamination, and they can be configured for both new and existing processing systems. These manometers operate on ±15 VDC or +24 VDC input voltage, and have legacy 0-10 VDC analog serial output signals.
Features
- All-digital architecture and improved thermal management provides better long-term stability, improved accuracy, and increased reliability
- Sensor temperatures of 45°, 80°, or 100°C
- Fully welded sensor built entirely from Inconel® and Incoloy® nickel alloys for best-available corrosion resistance; uses no intermediate brazing or joining materials
- Pushbutton zero permits adjustment of zero position up to 20% of product's Full Scale range
- Standard or MKS' patented Etch sensor for use in processes with condensable byproducts
- CE and RoHS compliant
- 100% backwards-compatible with previous MKS 127, 128, 627, 628, E27, & E28 analog Baratron manometers
Applications
- Semiconductor etching / deposition
- Optical coating
- Medical sterilization
Dimensional Drawings
Specifications Table
| Model | AA02A |
|---|---|
|
Technology |
Capacitance Manometer
|
|
Full Scale Range |
0.10
Torr
0.25 Torr 1.00 Torr 2.00 Torr 10.0 Torr 20.0 Torr 100 Torr 200 Torr 500 Torr 1000 Torr |
| Temperature |
Operating 50.0 ºC 122 ºF Storage 80.0 ºC 176 ºF Bakeout ≤ 50.0 ºC ≤ 122 ºF |
|
Temperature Compensation, ºC |
45
80 100 |
| Materials Exposed to Vacuum |
Incoloy® Nickel Alloys Inconel® Nickel Alloys |
| Connectors |
15 Pin Sub D Male |
|
Typical Accuracy |
±0.12% of reading (<1 Torr)
±0.1% of reading (≥1 Torr) ±0.2% of reading (≥1 Torr) |
|
Accuracy Range |
0.05 to 1%
|
|
Analog Output |
0 to 10 VDC
|
|
Recommended Mounting Orientation |
Any except for upside down
|
|
Input Power |
±15 VDC (±5%) @ 0.40 amps (max) or +24 VDC ±10% @ 11 watts (max)
±15 VDC (±5%) @ 0.60 amps (max) or +24 VDC ±10% @ 22 watts (max) |
|
Communications (Standard) |
Analog
|
|
Compliance and Standards |
CE
RoHS |
|
Integrated Electronics |
Yes
|
Remote Controllers
946 Vacuum System Controller |
Versatile vacuum controller that supports a wide variety of pressure sensors, MFC's, and valves for system control.
Features and Benefits:
- Simultaneous control and readout for up to six MFC's and/or vacuum gauges
- Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
- Pressure readings from 1,000 Torr down to 10-11 Torr, eliminating the need for individual electronics for each sensor
- 12 set point relays included in the base unit for system control flexibility
- Standalone controller
PAC 100 |
Configurable and expandable module that can allow for full system control.
Features and Benefits:
- Allows for continual module expansion for increased workload
- Access to Control Workbench software to monitor, record, and control all connected devices
- Compatible with MKS MFC's, direct and indirect gauging, valves, etc.
- Controlled through a PLC
- Low cost of ownership
Specifications Table
|
|
|
|
| Power Supply and Readouts | 946 Vacuum System Controller | PAC 100 Automation System |
| Display Type | 320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure or flow displays. Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position. | PC (not included) |
| Channels | 6 of any combination below. MKS MFC's*MKS Baratrons*, MKS Piranis*, MKS Convectron/Convection Series*, MKS Hot and Cold Cathode Sensors*, MKS Pressure Control Valves* |
4 of any combination below. MKS MFC's*, MKS Baratrons* **Other modules available |
| Setpoint Relays | Yes | Yes |
| Power Input | 150 watts maximum 100 - 240 VAC 50/60 Hz | 19VDC - 32VDC, Max - 5A (each for DC I/O and DC CORE) |
| Approximate List Price | $1814 to $5877 (region specific power cable included) (interface cables not included) | $1740 (interface cables not included) |
a-Baratron® Capacitance Manometer Pin-outs
9-pin D-subminiature Connectors
| Pin | Description |
| 1 | Pressure Signal Output |
| 2 | Reserved |
| 3 | Reserved |
| 4 | +15 VDC |
| 5 | -15 VDC |
| 6 | Reserved |
| 7 | Reserved |
| 8 | Pressure Signal Output Return (signal common) |
| 9 | Power Return (power common) |
15-pin D-subminiature Connectors
| Pin | Description |
| 1 | Reserved |
| 2 | Pressure Signal Output |
| 3 | Reserved |
| 4 | SP1-NO |
| 5 | Power Return (power common) |
| 6 | -15 VDC |
| 7 | +15 VDC or +24V |
| 8 | SP1-RTN |
| 9 | SP2-NO |
| 10 | Reserved |
| 11 | SP2-RTN |
| 12 | Pressure Signal Output Return (signal common) |
| 13 | Reserved |
| 14 | Reserved |
| 15 | Chassis Ground |
Configuration Options
This chart is to help you review all the available options for the MKS® AA02A a-Baratron® Absolute Analog Heated Capacitance Manometer. Please see below for an interactive product builder to assemble the options into a part number ready for order.
Ordering Code Example: AA02A.1TCES44B000V00
| Model | Code | Configuration |
| Type AA02A | AA02A | AA02A |
| Range | Code | Configuration |
| 0.1 | .1 | .1 |
| 0.25 | RE | |
| 1 | 01 | |
| 2 | 02 | |
| 10 | 11 | |
| 20 | 21 | |
| 100 | 12 | |
| 200 | 22 | |
| 500 | 52 | |
| 1000 | 13 | |
| Units of Measurement | Code | Configuration |
| Torr absolute | T | T |
| mbar absolute | M | |
| kPa absolute | K | |
| Fittings | Code | Configuration |
| 1/2" (12.7 mm) OD tube | BAS | BAS |
| 4 VCR female (V sensor only) | CDV | |
| 8 VCR female | CES | |
| 8 VCR male | CFS | |
| NW16-KF | GAS | |
| NW25-KF | GCS | |
| NW25-KF, Short Stem | GCT | |
| 1.33" (33.8 mm) Conflat, rotatable | HAS | |
| 1.33" (33.8 mm) Conflat, rotatable, short stem | HAT | |
| 2.75" OD Conflat, rotatable | HCS | |
| 8 VCO female | DAS | |
| Input Voltage | Code | Configuration |
| +24 VDC | 3 | 4 |
| ±15 VDC | 4 | |
| +24 VDC (required with trip point option) | 5 | |
| +15 VDC (required with trip point option) | 6 | |
| Sensor Temperature | Code | Configuration |
| 100°C | 1 | 4 |
| 80°C | 8 | |
| 45°C | 4 | |
| Electrical Connector | Code | Configuration |
| 15 pin D-subminiature, thread locks | B | B |
| 15 pin D-subminiature, slide locks | P | |
| Trip Points | Code | Configuration |
| None | 00 | 00 |
| Trip A above 50%, Trip B above 50% of FS Range | AA | |
| Trip A above 50%, Trip B below 50% of FS Range | AB | |
| Trip A below 50%, Trip B below 50% of FS Range | BB | |
| Trip A below 50%, Trip B above 50% of FS Range | BA | |
| Reserved | Code | Configuration |
| Reserved | 0 | 0 |
| Calibration Orientation (ranges < 1 Torr only) | Code | Configuration |
| Standard (all ranges ≥ 1 Torr) | 0 | V |
| Vertical (ranges < 1 Torr only) | V | |
| Horizontal (ranges < 1 Torr only) | H | |
| Accuracy | Code | Configuration |
| Standard Accuracy | 0 | 0 |
| Reserved | Code | Configuration |
| Reserved | 0 | 0 |
Please select the model, range, units, fittings, input, temperature, connector, trip points, orientation, and accuracy to configure your part number.
