MKS® 628H Baratron® Temperature Regulated Capacitance Manometer

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MKS^® 628H Baratron^® Temperature Regulated Capacitance Manometer

(0.05 - 1000 Torr) Temperature Controlled to 100 Degrees C

The 628H Baratron manometer is the RoHS-compliant version of the industry standard for stability and accuracy. It is temperature controlled to 100°C, accurate to 0.25% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 100°C) is in control. This capacitance manometer is available in Full Scale ranges down to 50 mTorr (0.07 mbar) to accommodate today's lower process pressures.

Based on established Baratron capacitance manometer technology, the sensor's wetted surfaces are Inconel^® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier Types 128 and 628 Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices.

Features

Excellent long-term stability
Percent of Reading accuracy for more precise output signal in lower pressure ranges
Full Scale ranges low as 50 mTorr (0.07 mbar) for precise measurement of low pressure processes
Corrosion Resistant
Temperature Compensated
Clean room compliant

Dimensional Drawings

Specifications Table

Model	628H
Technology	Capacitance Manometer
Full Scale Range	0.05 Torr 0.10 Torr 0.25 Torr 1.00 Torr 2.00 Torr 10.0 Torr 20.0 Torr 100 Torr 1000 Torr 2000 Torr 5000 Torr 10000 Torr 15000 Torr 20000 Torr 25000 Torr
Temperature	Operating 50.0 ºC 122 ºF Storage 80.0 ºC 176 ºF Bakeout 65.0 ºC 149 ºF
Temperature Compensation, ºC	100
Materials Exposed to Vacuum	Incoloy® Nickel Alloys Inconel® and Incoloy® nickel alloys Inconel® Nickel Alloys
Connectors	15 Pin Sub D Male
Typical Accuracy	0.50% of reading 0.25% of reading
Accuracy Range	0.05 to 1%
Analog Output	0 to 10 VDC
Recommended Mounting Orientation	Any except for upside down
Input Power	±15 VDC ±5% @ 0.25 Amps (maximum
Communications (Standard)	Analog
Compliance and Standards	CE RoHS
Integrated Electronics	Yes

X CLOSE

Remote Controllers

946 Vacuum System Controller

Versatile vacuum controller that supports a wide variety of pressure sensors, MFC's, and valves for system control.

Features and Benefits:

Simultaneous control and readout for up to six MFC's and/or vacuum gauges
Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
Pressure readings from 1,000 Torr down to 10^-11 Torr, eliminating the need for individual electronics for each sensor
12 set point relays included in the base unit for system control flexibility
Standalone controller

PAC 100

Configurable and expandable module that can allow for full system control.

Features and Benefits:

Allows for continual module expansion for increased workload
Access to Control Workbench software to monitor, record, and control all connected devices
Compatible with MKS MFC's, direct and indirect gauging, valves, etc.
Controlled through a PLC
Low cost of ownership

Downloads:

946 Manual
946 Datasheet

PAC 100 Manual
PAC 100 Datasheet

For additional information, please contact us by clicking here .

Specifications Table


Power Supply and Readouts	946 Vacuum System Controller	PAC 100 Automation System
Display Type	320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure or flow displays. Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position.	PC (not included)
Channels	6 of any combination below. MKS MFC'sMKS Baratrons, MKS Piranis, MKS Convectron/Convection Series, MKS Hot and Cold Cathode Sensors, MKS Pressure Control Valves	4 of any combination below. MKS MFC's, MKS Baratrons **Other modules available
Setpoint Relays	Yes	Yes
Power Input	150 watts maximum 100 - 240 VAC 50/60 Hz	19VDC - 32VDC, Max - 5A (each for DC I/O and DC CORE)
Approximate List Price	$1814 to $5877 (region specific power cable included) (interface cables not included)	$1740 (interface cables not included)

Notes:

*Please reference the specific controller pages for further details on compatible units

Notes:

**Other configurations are available. Please contact us by clicking here for further details and configurations.

626, 627, 628, E27 & E28 Capacitance Manometer Pin-outs

15-pin Type "D"

Pin	Description
2	Signal Output
5	Power Common
6	-15 VDC
7	+15 VDC
12	Signal Common
15	Chassis Ground

Configuration Options

This chart is to help you review all the available options for the MKS^® 628H Baratron^® Temperature Regulated Capacitance Manometer. Please see below for an interactive product builder to assemble the options into a part number ready for order.

Ordering Code Example: 628H01TBE1B

Model	Code	Configuration
Type 628H	628H	628H
Pressure Range Full Scale	Code	Configuration
0.05	U5T	01T
0.1	.1T
0.25	RET
1	01T
2	02T
10	11T
20	21T
100	12T
1000	13T
2000	23T
5000	53T
10000	14T
15000	RBT
20000	24T
25000	RCT
Fittings	Code	Configuration
1/2" (12.7 mm) OD tube	A	B
8 VCR female	B
1.33" OD CF	C
NW16 KF (range < 5000 Torr)	D
8 VCO female	E
2.75" OD CF	L
NW25 KF (range < 5000 Torr)	Q
Accuracy	Code	Configuration
0.25% of Reading (ranges ≥ 1 Torr)	E	E
0.5% of Reading (ranges < 1 Torr)	F	E
Options	Code	Configuration
Vertical calibration, no heater status indication	1	1
Vertical calibration, heater status indication	2
Horizontal calibration, no heater status indication (< 1 Torr only)	5
Horizontal calibration, heater status indication (< 1 Torr only)	6
Profibus	4
24 VDC	9
Connector	Code	Configuration
15 pin Type D with Thread Lock	B	B
15 pin Type D with Slide Lock	P	B

A Complete Package Consists of

Note: Below you will find common methods to control your gauge / transducer. Please note that not all controllers are listed for every gauge / transducer. If you do not see the controller that you need, please contact your local KJLC Sales Representative.

This unit can either be:
- Powered via a controller. Suggested Controllers:
  - MKS 946 Vacuum System Controller
  - MKS PR4000 Controller
- Connected directly to a PLC (data acquisition system) or computer. The interconnector cable, will need to be supplied by the end user. The pinouts for this unit can be found in the manual.

Compatible Controller	Description	Components Needed
MKS 946 Vacuum System Controller	Multi-unit power supply and simultaneous display, up to 6 setpoint relays, RS485 communications, and pressure control capability.	MKS 946, MKS 628H Baratron, and interconnect cable. Power cable included.
MKS PR4000	1-2 unit controller, compatible with MKS Baratrons and MKS Mass Flow Controllers.	MKS PR4000, MKS 628H Baratron, and interconnect cable. Power cable included.