MKS® 627H Baratron® Temperature Regulated Capacitance Manometer
(0.02 - 1000 Torr) Temperature Controlled to 45 Degrees C
The 627H Baratron manometer is the RoHS-compliant version of the industry standard for stability and accuracy. It is temperature controlled to 45°C, accurate to 0.12% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 45°C) is in control.
Based on established Baratron capacitance manometer technology, the sensor's wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is inter-changeable with earlier Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices.
Features
- Excellent long-term stability
- Percent of Reading accuracy for more precise output signal in lower pressure ranges
- Full Scale ranges low as 20 mTorr (0.03 mbar) for precise measurement of low pressure processes
- Corrosion Resistant
- Temperature Compensated
- Clean room compliant
Dimensional Drawings
Specifications Table
| Model | 627H | 627F |
|---|---|---|
|
Technology |
Capacitance Manometer
|
Capacitance Manometer
|
|
Full Scale Range |
0.02
Torr
0.05 Torr 0.25 Torr 1.00 Torr 2.00 Torr 10.0 Torr 20.0 Torr 100 Torr 1000 Torr 2000 Torr 5000 Torr 10000 Torr 15000 Torr 20000 Torr 25000 Torr |
0.10
Torr
|
| Temperature |
Operating 40.0 ºC 104 ºF Storage 80.0 ºC 176 ºF Bakeout ≤ 50.0 ºC ≤ 122 ºF |
Operating 50.0 ºC 122 ºF Storage 80.0 ºC 176 ºF Bakeout ≤ 50.0 ºC ≤ 122 ºF |
|
Temperature Compensation, ºC |
45
|
45
|
| Materials Exposed to Vacuum |
Incoloy® Nickel Alloys Inconel® Nickel Alloys |
Incoloy® Nickel Alloys Inconel® Nickel Alloys |
| Connectors |
15 Pin Sub D Male |
15 Pin Sub D Male |
|
Typical Accuracy |
0.25% of reading
0.15% of reading 0.12% of reading |
0.15% of reading
|
|
Accuracy Range |
0.05 to 1%
|
0.05 to 1%
|
|
Analog Output |
0 to 10 VDC
|
0 to 10 VDC
|
|
Recommended Mounting Orientation |
Any except for upside down
|
Any except for upside down
|
|
Input Power |
±15 VDC ±5% @ 0.25 Amps (maximum
|
±15 VDC ±5% @ 0.25 Amps (maximum
|
|
Communications (Standard) |
Analog
|
Analog
|
|
Compliance and Standards |
CE
RoHS |
CE
RoHS UL CSA |
|
Integrated Electronics |
Yes
|
Yes
|
Remote Controllers
946 Vacuum System Controller |
Versatile vacuum controller that supports a wide variety of pressure sensors, MFC's, and valves for system control.
Features and Benefits:
- Simultaneous control and readout for up to six MFC's and/or vacuum gauges
- Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
- Pressure readings from 1,000 Torr down to 10-11 Torr, eliminating the need for individual electronics for each sensor
- 12 set point relays included in the base unit for system control flexibility
- Standalone controller
PAC 100 |
Configurable and expandable module that can allow for full system control.
Features and Benefits:
- Allows for continual module expansion for increased workload
- Access to Control Workbench software to monitor, record, and control all connected devices
- Compatible with MKS MFC's, direct and indirect gauging, valves, etc.
- Controlled through a PLC
- Low cost of ownership
Specifications Table
|
|
|
|
| Power Supply and Readouts | 946 Vacuum System Controller | PAC 100 Automation System |
| Display Type | 320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure or flow displays. Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position. | PC (not included) |
| Channels | 6 of any combination below. MKS MFC's*MKS Baratrons*, MKS Piranis*, MKS Convectron/Convection Series*, MKS Hot and Cold Cathode Sensors*, MKS Pressure Control Valves* |
4 of any combination below. MKS MFC's*, MKS Baratrons* **Other modules available |
| Setpoint Relays | Yes | Yes |
| Power Input | 150 watts maximum 100 - 240 VAC 50/60 Hz | 19VDC - 32VDC, Max - 5A (each for DC I/O and DC CORE) |
| Approximate List Price | $1814 to $5877 (region specific power cable included) (interface cables not included) | $1740 (interface cables not included) |
626, 627, 628, E27 & E28 Capacitance Manometer Pin-outs
15-pin Type "D"
| Pin | Description |
| 2 | Signal Output |
| 5 | Power Common |
| 6 | -15 VDC |
| 7 | +15 VDC |
| 12 | Signal Common |
| 15 | Chassis Ground |
Configuration Options
This chart is to help you review all the available options for the MKS® 627H Baratron® Temperature Regulated Capacitance Manometer. Please see below for an interactive product builder to assemble the options into a part number ready for order.
Ordering Code Example: 627H01TBC1B
| Model | Code | Configuration |
| Type 627H | 627H | 627H |
| Pressure Range Full Scale - Torr | Code | Configuration |
| 0.02 | U2T | 01T |
| 0.05 | U5T | |
| 0.1 | .1T | |
| 0.25 | RET | |
| 1 | 01T | |
| 2 | 02T | |
| 10 | 11T | |
| 20 | 21T | |
| 100 | 12T | |
| 1000 | 13T | |
| 2000 | 23T | |
| 5000 | 53T | |
| 10000 | 14T | |
| 15000 | RBT | |
| 20000 | 24T | |
| 25000 | RCT | |
| Fittings | Code | Configuration |
| 1/2" (12.7 mm) OD tube | A | B |
| 8 VCR female | B | |
| 1.33" OD CF | C | |
| NW16 KF (range < 5000 Torr) | D | |
| 8 VCO female | E | |
| 2.75" OD CF | L | |
| NW25 KF (range < 5000 Torr) | Q | |
| Accuracy | Code | Configuration |
| 0.12% of Reading (Ranges ≥ 1 Torr) | C | C |
| 0.15% of Reading (0.25, 0.1, and 0.05 Torr units only) | D | |
| 0.25% of Reading (0.02 Torr units only) | E | |
| Options | Code | Configuration |
| Vertical calibration, no heater status indication | 1 | 1 |
| Vertical calibration, heater status indication | 2 | |
| Horizontal calibration, no heater status indication (< 1 Torr only) | 5 | |
| Horizontal calibration, heater status indication (< 1 Torr only) | 6 | |
| Profibus | 4 | |
| 24 VDC | 9 | |
| Connector | Code | Configuration |
| 15 pin Type D with Thread Lock | B | B |
| 15 pin Type D with Slide Lock | P |
Start Your Configuration
Ordering Table
| Description | Flange | Full Scale Range | Temperature Compensation, ºC |
|
Part Number | Price | In Stock | Add To Cart | ||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Description | Flange | Full Scale Range | Temperature Compensation, ºC |
|
Part Number | Price | In Stock | Add To Cart | ||||
|
EUDF, |
8 VCR Female | 0.1 Torr | 45 |
|
|
P.O.R. |
|
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