MKS^® 626D Baratron^® Absolute Ambient Temperature Capacitance Manometer

The Baratron 626D ambient temperature capacitance manometer is the latest of MKS' analog RoHS-compliant, capacitance-based, high-performance vacuum and pressure transducers. It requires ±15VDC input voltage and provides a high-level 0-10VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. The radially-tensioned Inconel^® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system.

Dimensional Drawings

Specifications Table

Remote Controllers

946 Vacuum System Controller

Versatile vacuum controller that supports a wide variety of pressure sensors, MFC's, and valves for system control.

Features and Benefits:

• Simultaneous control and readout for up to six MFC's and/or vacuum gauges
• Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
• Pressure readings from 1,000 Torr down to 10^-11 Torr, eliminating the need for individual electronics for each sensor
• 12 set point relays included in the base unit for system control flexibility
• Standalone controller

PAC 100

Configurable and expandable module that can allow for full system control.

Features and Benefits:

• Allows for continual module expansion for increased workload
• Access to Control Workbench software to monitor, record, and control all connected devices
• Compatible with MKS MFC's, direct and indirect gauging, valves, etc.
• Controlled through a PLC
• Low cost of ownership

Specifications Table

Power Supply and Readouts	946 Vacuum System Controller	PAC 100 Automation System
Display Type	320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure or flow displays. Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position.	PC (not included)
Channels	6 of any combination below. MKS MFC's*MKS Baratrons*, MKS Piranis*, MKS Convectron/Convection Series*, MKS Hot and Cold Cathode Sensors*, MKS Pressure Control Valves*	4 of any combination below. MKS MFC's*, MKS Baratrons* **Other modules available
Setpoint Relays	Yes	Yes
Power Input	150 watts maximum 100 - 240 VAC 50/60 Hz	19VDC - 32VDC, Max - 5A (each for DC I/O and DC CORE)
Approximate List Price	$1814 to $5877 (region specific power cable included) (interface cables not included)	$1740 (interface cables not included)

Notes:

*Please reference the specific controller pages for further details on compatible units

Notes:

**Other configurations are available. Please contact us by clicking here for further details and configurations.

626, 627, 628, E27 & E28 Capacitance Manometer Pin-outs

15-pin Type "D"

Configuration Options

This chart is to help you review all the available options for the MKS^® 626D Baratron^® Absolute Ambient Temperature Capacitance Manometer. Please see below for an interactive product builder to assemble the options into a part number ready for order.

Ordering Code Example: 622D11TBE