MKS^® GE50A Digital Mass Flow Controller

The GE50A digitally-controlled mass flow controller is available with either RS485, Profibus™, EtherCAT^®, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of setpoint accuracy on the calibration gas. I/O protocols are designed to allow the GE50A to easily replace RS485 and DeviceNet™ versions of the MKS 1179A MFC with minor coding.

A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GE50A incorporates few elastomers - only one external elastomer seal and elastomer valve plug. All wetted surfaces are metal. The GE50A comes standard with Viton^® seals or optional Buna, Neoprene^® or Kalrez^® to support different gas requirements.

Dimensional Drawings

Specifications Table

Configuration Options

Ordering Code Example: GE50A013502R6V020

* The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten.

** The user should consult with their gas supplier on the appropriate elastomer which is compatible with the selected gas.

Included Software

Front Screen - Monitor Mode

Device Screen - Configuration Mode

Plot Screen - Configuration Mode

Free, downloadable software that allows for simple monitoring and configurations of the MKS MFC.

Features and Benefits

• Easy to use interface
• Ability to switch between a library of over 150 different gases
• Can plot and record the flow data
• Downloadable calibration report for the MFC unit

For further details, please reference the Software User Manual.

To record data using the plotting tool, please contact us by clicking here for the Java Policy update.

Notes:

Ethernet cable and PC not included

Remote Controllers

246 Power supply and Readout

247 Power supply and Readout

The MKS Instruments 246 single channel/readout is designed to control and display most MKS flow transducers. If multiple channels are required, the MKS Instruments 247 controller provides a four channel, sequentially selectable readout. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The unit supplies ±15 VDC power.

Features and Benefits:

• Power and control between 1 - 4 MFC units.
• Compatible with most MKS MFC units.
• Standalone controllers

946 Vacuum System Controller

Versatile vacuum controller that supports a wide variety of pressure sensors, MFC's, and valves for system control.

Features and Benefits:

• Simultaneous control and readout for up to six MFC's and/or vacuum gauges
• Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
• Pressure readings from 1,000 Torr down to 10^-11 Torr, eliminating the need for individual electronics for each sensor
• 12 set point relays included in the base unit for system control flexibility
• Standalone controller

PAC 100

Configurable and expandable module that can allow for full system control.

Features and Benefits:

• Allows for continual module expansion for increased workload
• Access to Control Workbench software to monitor, record, and control all connected devices
• Compatible with MKS MFC's, direct and indirect gauging, valves, etc.
• Controlled through a PLC
• Low cost of ownership

Downloads:

246 Manual

247 Manual

246/247 Datasheet

946 Manual

946 Datasheet

PAC 100 Manual

PAC 100 Datasheet

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For additional information about the 246/247, 946 or PAC 100 controllers, please contact us by clicking here .

Power Supply and Readouts	MFC Software	246 Power Supply and Display	247 Power Supply and Display	946 Vacuum System Controller	PAC 100 Automation System
Display Type	PC (not included)	3 1/2 digit 0.56" red LED, continuous display	3 1/2 digit 0.56" red LED, display is 1 of 4 sequentially selectable	320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure or flow displays. Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position.	PC (not included)
Channels	1 MFC	1 MFC	4 MFC's	6 of any combination below. MKS MFC's*MKS Baratrons*, MKS Piranis*, MKS Convectron/Convection Series*, MKS Hot and Cold Cathode Sensors*, MKS Pressure Control Valves*	4 of any combination below. MKS MFC's*, MKS Baratrons* **Other modules available
Setpoint Relays	Yes	No	No	Yes	Yes
Power Input	N/A	117/234 VAC ±15%, 50-60 Hz	117/234 VAC ±15%, 50-60 Hz	150 watts maximum 100 - 240 VAC 50/60 Hz	19VDC - 32VDC, Max - 5A (each for DC I/O and DC CORE)
Approximate List Price	Free (included with MFC purchase)	$1225 (interface cable not included)	$1850 (interface cable not included)	$1814 to $5877 (region specific power cable included) (interface cables not included)	$1740 (interface cables not included)

Notes:

*Please reference the specific controller pages for further details on compatible units

Notes:

**Other configurations are available. Please contact us by clicking here for further details and configurations.