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MKS^® 1179C Mass Flow Controller

General Purpose, Fast Warm-up Time, Elastomer-sealed Mass Flow Controller for Flow Rates up to 20 slm.

The MKS 1179C is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179C Mass-Flo^® controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. It can also be used as a pressure controller when connected to a suitable pressure transducer.

The 1179C is a direct form-fit-function replacement for the most common MFC's on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type "D" connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1179C is compatible with MFC power supply and display electronics from MKS or other manufacturers.

Features & Benefits

Patented sensor design provides exceptional zero stability
Full scale flow ranges from 10 sccm to 20 slm for precise and repeatable flow measurement and control
Percent of full scale accuracy for analog configurations
Fast warm-up time minimizes expensive production downtime
Compatible with earlier MKS MFC and power supply/readout modules
Rigorous design and testing includes MTBF analysis and STRIFE testing to ensure long-term performance
Surface finish of wetted stainless surfaces, cleanroom processing, and minimal use of elastomer seals enable use in demanding clean processes
CE Mark and RoHS compliant - meets requirements for European Union

Applications

1179C is a general purpose MFC suited for a wide variety of applications requiring flow control capability from 10 sccm to 20 slm Full Scale for precise and repeatable flow measurement and control.

Dimensional Drawings

Specifications Table

Model	1179C
Full Scale Flow Ranges	10 - 20000 sccm (N₂ equivalent) (consult factory for available flow ranges)
Maximum Inlet Pressure	150 psig (cannot exceed pressure differential requirement across MFC)
Normal Operating Pressure Differential	10 to 5000 sccm; 10 to 40 psid 10000 to 30000 sccm; 15 to 40 psid
Control Range	2% to 100% of Full Scale
Typical Accuracy	±1% of Full Scale (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
Repeatability	± 0.2% of Full Scale
Resolution	0.1% of Full Scale
Typical Controller Settling Time	< 0, 8 seconds (to within 2% of set point)
Warm-up Time	<2 minutes (to within 0.2% of Full Scale of steady state performance)
Operating Temperature Range	10°C to 50°C (Ambient)
Storage Humidity	0 to 95% Relative Humidity, non-condensing
Storage Temperature	-20°C to 50° C
Leak Integrity - External	<1 x 10^-9 (scc/sec He)
Leak Integrity - Through Closed Valve	<1.0% of Full Scale at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is recommended)
Electrical Analog I/O Input Power Required	Max. current at start-up (first 2 sec): ±15 VDC (±5%) @ 200 mA Typical current at steady state: ±15 VDC (±5%) @ 100 mA
Electrical Analog I/O Flow Input/Output Signal - Voltage	0 to 5 VDC into >10K Ω

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MKS 1179C Mass Flow Controller Pin-outs

9-pin Type "D" Connector

Pin	Description
1	Valve Open/Close
2	Flow Signal Output
3	+15 VDC
4	Power Common
5	-15 VDC
6	Set Point Input
7	Signal Common
8	Signal Common
9	MKS Test Point

15-pin Type "D"

Pin	Description
1	MKS Test Point
2	Flow Signal Output
3	Valve Close (TTL low)
4	Valve Open (TTL low)
5	Power Supply Common
6	-15 VDC
7	+15 VDC
8	Set Point Input
9	No Connection
10	Optional Input
11	Signal Common
12	Signal Common
13 to 14	No Connection
15	Chassis Ground

Configuration Options

Ordering Code Example: 1179C01311CR1BV

Series	Code	Configuration
Type MFC Mass Flow Controller 1179C	1179C	1179C
Gas (Per Semi Standard E52-0703)	Code	Configuration
013 = Nitrogen = N₂	013	013
Flow Range Full Scale*	Code	Configuration
10 sccm (0.01 slm)	11C	11C
20 sccm (0.02 slm)	21C
50 sccm (0.05 slm)	51C
100 sccm (0.1 slm)	12C
200 sccm (0.2 slm)	22C
500 sccm (0.5 slm)	52C
1000 sccm (1 slm)	13C
2000 sccm (2 slm)	23C
5000 sccm (5 slm)	53C
10000 sccm (10 slm)	14C
20000 sccm (20 slm)	24C
Fittings (compatible with)	Code	Configuration
Swagelok^® 4 VCR male	R	R
Swagelok^® 4 VCO male	G
1/4" Swagelok^®	S
Valve	Code	Configuration
Normally closed	1	1
Connector	Code	Configuration
Analog 9-pin Type "D"	A	B
Analog 15-pin Type "D"	B	B
Seal Materials**	Code	Configuration
Viton™	V	V
Buna-N™	B
Neoprene™	N
Kalrez™	K

** The user should consult with their gas supplier on the appropriate elastomer which is compatible with the selected gas.

Remote Controllers

246 Power supply and Readout

247 Power supply and Readout

The MKS Instruments 246 single channel/readout is designed to control and display most MKS flow transducers. If multiple channels are required, the MKS Instruments 247 controller provides a four channel, sequentially selectable readout. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The unit supplies ±15 VDC power.

Features and Benefits:

Power and control between 1 - 4 MFC units.
Compatible with most MKS MFC units.
Standalone controllers

946 Vacuum System Controller

Versatile vacuum controller that supports a wide variety of pressure sensors, MFC's, and valves for system control.

Features and Benefits:

Simultaneous control and readout for up to six MFC's and/or vacuum gauges
Closed-loop pressure control option for use with MKS valves eliminates the need for separate pressure control electronics
Pressure readings from 1,000 Torr down to 10^-11 Torr, eliminating the need for individual electronics for each sensor
12 set point relays included in the base unit for system control flexibility
Standalone controller

PAC 100

Configurable and expandable module that can allow for full system control.

Features and Benefits:

Allows for continual module expansion for increased workload
Access to Control Workbench software to monitor, record, and control all connected devices
Compatible with MKS MFC's, direct and indirect gauging, valves, etc.
Controlled through a PLC
Low cost of ownership

Downloads:

246 Manual

247 Manual

246/247 Datasheet

946 Manual

946 Datasheet

PAC 100 Manual

PAC 100 Datasheet

For additional information about the 246/247, 946 or PAC 100 controllers, please contact us by clicking here .


Power Supply and Readouts	246 Power Supply and Display	247 Power Supply and Display	946 Vacuum System Controller	PAC 100 Automation System
Display Type	3 1/2 digit 0.56" red LED, continuous display	3 1/2 digit 0.56" red LED, display is 1 of 4 sequentially selectable	320x240 color QVGA TFT LCD with back lighting. Up to 6 pressure or flow displays. Display indicators for unit of measure, calibration functions, user calibration, set points, PID control status and valve position.	PC (not included)
Channels	1 MFC	4 MFC's	6 of any combination below. MKS MFC's MKS Baratrons, MKS Piranis, MKS Convectron/Convection Series, MKS Hot and Cold Cathode Sensors, MKS Pressure Control Valves	4 of any combination below. MKS MFC's, MKS Baratrons **Other modules available
Setpoint Relays	No	No	Yes	Yes
Power Input	117/234 VAC ±15%, 50-60 Hz	117/234 VAC ±15%, 50-60 Hz	150 watts maximum 100 - 240 VAC 50/60 Hz	19VDC - 32VDC, Max - 5A (each for DC I/O and DC CORE)
Approximate List Price	$1225 (interface cable not included)	$1850 (interface cable not included)	$1814 to $5877 (region specific power cable included) (interface cables not included)	$1740 (interface cables not included)

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Notes:

*Please reference the specific controller pages for further details on compatible units

Notes:

**Other configurations are available. Please contact us by clicking here for further details and configurations.

Warning Notes:

If gases other than the calibrated gas are used, the user is responsible for ensuring seal material compatibility.

Start Your Configuration

1. Series:	MFC Mass Flow Controller 1179C [1179C]
2. Gas:
3. Flow Range Full Scale:
4. Fittings:
5. Valve Type:	Normally Closed [1]
6. Connector:
7. Seal Materials:

Ordering Table

Please reference the ordering table below for MFC's that we generally have in stock in one of our global warehouses.

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Type	Description	Seal	Flow Range	Connections	Fittings	Part Number	Price	In Stock	Add Item
Type	Description	Seal	Flow Range	Connections	Fittings	Part Number	Price	In Stock	Add Item
N2	MASS FLOW CONTROLLER, 1179C, N2, 1000 SCCM, SWAGELOK 4 VCR MALE, N.C., ANALOG 15 PIN SUB D MALE, VITON	Elastomer	20 to 1000 sccm	Analog, 15 Pin Sub D	Swagelok 4 VCR Male	1179C01313CR1BV	$1,445.00
N2	MASS FLOW CONTROLLER, 1179C, N2, 50 SCCM, 1/4" SWAGELOK, N.C., ANALOG 15 PIN SUB D MALE, VITON	Elastomer (Viton)	1 to 50 sccm	Analog 0-5 VDC, 15 Pin Sub D	1/4" Swagelok	1179C01351CS1BV	$1,445.00
N2	MASS FLOW CONTROLLER, 1179C, N2, 500 SCCM, SWAGELOK 4 VCR MALE, N.C., ANALOG 15 PIN SUB D MALE, VITON	Elastomer (Viton)	10 to 500 sccm	Analog 0-5 VDC, 15 Pin Sub D	Swagelok® 4 VCR male	1179C01352CR1BV	$1,445.00
N2	MASS FLOW CONTROLLER, 1179C, N2, 500 SCCM, 1/4" SWAGELOK, N.C., ANALOG 15 PIN SUB D MALE, VITON	Elastomer (Viton)	10 to 500 sccm	Analog 0-5 VDC, 15 Pin Sub D	1/4" Swagelok	1179C01352CS1BV	$1,445.00

Accessories Table

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Description	Reference	Part Number	Price	In Stock	Add Item
Description	Reference	Part Number	Price	In Stock	Add Item
NON RoHS/ CE, MASS FLOW CONTROLER POWER SUPPLY READOUT, SIN	246C Single Channel Display, Power Supply / Readout	246C	$1,416.00
NON RoHS/ CE, MASS FLOW CONTROLER POWER SUPPLY READOUT, FOU	247D 4 Channel Sequential Display, Power Supply / Readout	247D	$2,195.00
GASKET,VCR,CAJON,COPPER,1/4"	Gasket, 1/4" VCR, Cajon, Copper	4XVCR-GAC	$3.70
CABLE, MFC TO 246/247, 15 PIN, 10 FT.	15 Pin Sub-D 3-meter cable	RCBDMFC-1-10	$132.00
CABLE, MFC TO 246/247, 9 PIN, 10 FT.	9 Pin Sub-D 3-meter cable	RCBDMFC-3-10	$196.00
FITTING,ADAPTER,SS,1/4"FVCR TO 1/4"OD TUBE (SWAG)	Adaptor, SS, 1/4" FVCR to 1/4" OD Tube (Swagelok)	SS-4-WVCR-6-400	P.O.R.