Linear Shift Mechanisms (linear translators) provide linear motion along the port axis (Z). Typical applications include the positioning of beamline filters, adjustment of sputter sources and deposition stages through to production style wafer applications. Fully bakeable to 250°C, the range is supplied on CF flanges and provides true UHV performance.
The bellows sealed Linear Shift Mechanisms provide smooth, precise motion via a kinematically-designed external leadscrew driven mechanism complete with anti-rotation and anti-deflection systems. This design ensures smooth and precise motion along the Z axis. The range has a high load capability ensured through its rigid construction.
The bellows are manufactured from 316L stainless steel as standard and offer a minimum design life of 10,000 cycles. Customized units are available offering a design life of up to 1 million cycles.
Product Selection
The Linear Shift Mechanism range is possibly the largest of its type on the market with over 500 variations. To simplify selection, the range is divided into five standard series to suit the majority of applications and includes strokes of up to 1 meter. A summary of each is included below as a quick reference guide.
| Code | Linear Shift Series | Summary |
|---|---|---|
| LSM | Standard | This is the most comprehensive series, offering a multitude of flange sizes, strokes up to 350mm, and actuation options |
| LSML | Long Travel | The Long Travel series includes an upgraded structure enabling up to 1m of stroke |
| LSMC | Compact | The Compact series has the shortest flange-to-flange dimension, offered with a variety of flange sizes and stroke |
| LSMT | Tilt | The Tilt series provides the ability to tilt the traveling flange by ±2° to allow final adjustment of the driven load |
| LSMX | X-Travel | The X-Travel series provides the ability to laterally adjust the traveling flange by ±5mm for final adjustment of the driven load |
Actuation Options
Linear Shift Mechanisms can be actuated manually, pneumatically, or via a DC or Stepper Motor
| Code | Actuation Method | Description |
|---|---|---|
| Blank | Manual | A manual handwheel provides the most basic method of actuation. Larger bore versions are fitted with a geared handwheel to overcome vacuum loading forces. |
| P | Pneumatic | Pneumatic actuators provide a simple solution to automated operation. |
| SD | DC Motorized | A 12 or 24VDC motor provides the motion and is mounted to the side of the leadscrew mechanism. |
| SS | Stepper Motorized | A stepper motor provides the motion and is mounted to the side of the leadscrew mechanism. |
| UP | Wiring Upgrade | When purchasing an LSM for use with one of our controllers an additional wiring upgrade is available. The upgrade includes a bakeable socket connector mountedto the frame to which the limit switches are pre-wired. On stepper-driven products an extra home switch is also provided. The motor lead terminates with a connectorfor plug & play connection to the controller. |
Position Readout/Feedback Options
Linear Shift Mechanisms are offered with a variety of position readout/feedback solutions
| Code | Item | Description |
|---|---|---|
| ES | Engraved Shaft | Linear Shift Mechanisms can be fitted with a scale with 1mm increments for visual positioning. |
| DLA | Digital Linear Scale | Digital scale displays are fitted to Linear Shift Mechanisms via a kinematic mount ensuring precise and repeatable location, which is critical for accurate repositioning after bakeout. The scale features large, easy to read characters that can be switched between metric and imperial units. The readout has a resolution of 10 microns (0.01mm). Users can set the ‘Origin’ at any position of its stroke, from which it will provide a plus/minus scale in the units selected. The ‘Origin’ is retained in its memory until re-set by the user, even when switched off. A second temporary ‘Zero’ facility is offered to enable one-off measurements to take place, which resets to the ‘Origin’ setting when turned off. |
| LP | Linear Potentiometer | The Linear potentiometer option is selected where position feedback of the Linear Shift Mechanism traveling flange is required for closed-loop control applications. The LP provides resolution and repeatability of 2 microns. The LP has a conductive resistive track and precious metal wiper that can be interfaced to a number of analog devices such as a PLC or motor controller. The LP is attached to the LSM frame with a kinematic mount enabling it to be removed if bakeout is required. |