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KJLC® 909AR Series Ion Gauge
Our new series features hot filament transducers with integrated electronics.
These hot filament sensors are Bayard-Alpert style, utilizing a fine wire collector at the center of a grid. Due to its small area, few x-rays hit the collector; therefore, the gauge can measure very low pressures. These transducers include two yttria-coated iridium filaments for reduced downtime. Yttria-coated iridium is resistant to damage caused by high oxygen partial pressures and exposure to atmosphere. The tube operates at lower temperatures, giving a lower chemical reaction rate and minimizing thermal interference. The 909AR includes a screen to shield it from large particles.
Applications:
- Ideal measurement tools for high-vacuum applications, including pressure measurement of high-vacuum chambers and control or start-up of high-vacuum systems
- Measures base pressure and the pressure of back-filled gases
- Use in semiconductor processing and analytical systems
Features
- Wide measurement range of 10-10 to 10-2 Torr (mbar) for high-vacuum process monitoring
- Pressure-controlled e-beam degas for automated degas without filament shut down, patent pending
- Low-cost transducer alternative
- Compact design with integrated electronics and sensor in one unit
- Two-filament design for extended life
- Ease of operation with both analog and RS-232 digital communication
- Simultaneous pressure measurement during degas cycle
- Sensor portion of transducer can be replaced
- Process control set-point relay
- UHV-compatible materials used in sensor
- Reliable and repeatable pressure measurement for process stability
- CE marked, compliant with EMC Directive 89/336/EEC and Low Voltage Directive 73/23/EEC
Specifications Table
| Measurement Range | 3 x 10-10 to 5 x 10-2 Torr (4 x 10-10 to 6.5 x 10-2 mbar) |
| Communications Interface | RS-232 |
| Accuracy (% of measurement) | ±20% of Reading (typical) |
| Temperature (operating) | 0-40° C |
| Materials Exposed to Vacuum | 304 stainless steel, glass, tungsten, platinum-clad molybdenum, yttria-coated iridium (filament) |
| Repeatability (Typical) | Approximately 5% of Reading |
| Set-Point Range | 5 x 10-10 to 9.5 x 10-3 Torr (6.5 x 10-10 to 1.2 x 10-3 mbar) |
| Set-Point Relays | 1, SPDT, 1 A@ 30VAC/VDC (resistive) |
| Calibration Gas | Air/Nitrogen |
| Analog Outputs | 0-10 VDC, 1 volt/decade, semilogarithmic |
| Power Supply Requirements | 24 VDC, 15 W |
| Internal Volume | 23 cm3 |
| Response Time | 100 ms |
| Ion Gauge Type | Bayard Alpert |
| Ion Gauge Tubes | Degas: Electron beam (3 W) |