PREBUILT LAB & DEMO EQUIPMENT

Description

This is a brand new, never used, Closed Frame PRO Line Sputter System ready for immediate sale. It comes with a one-year, full manufacturer’s warranty.

Includes:

• Pfeiffer 685 L/s speed controlled turbo pump with nXDS 5 Edwards scroll pump. 3-position gate valve to allow for upstream pressure control.
• Wide range vacuum gauge reads from atmosphere to 10-9 Torr (Ion gauge and Pirani) Power Distribution: 208/220VAC, 50/60Hz, three-phase.
• Four, 3” sputter sources included with pneumatic source shutters and flex head assemblies.
• One KJLC 600W RF power supply with automatic matching network. One KJLC 300W RF power supply with automatic matching network.
• One KJLC 1kW DC power supply.
• 150mm, top mounted substrate platen, with primary rotation up to 20 rpm, 800⁰ C heating, O2 compatible, 100W RF bias, and a pneumatically actuated swing shutter.
• Three MKS 1179 mass flow controllers, and one MKS 626A Baratron pressure transducer.
• Full recipe driven computer control with data logging functionality.
• One-year warranty.
• KJLC technician on-site for two days for system start-up and training.
• Delivery: contact KJLC

Description

This is a brand new, never used, Open Frame LAB Line E-beam System ready for immediate sale. It comes with a one-year, full manufacturer’s warranty.

Includes:

• Brooks CTI-8F 1500 L/sec Cryo pump with Pfeiffer ACP15 dry roughing pump. 3-position gate valve to allow for upstream pressure control.
• Wide range vacuum gauge reads from atmosphere to 10-9 Torr (Ion gauge and Pirani) Power Distribution: 208/220VAC, 50/60Hz, three-phase.
• KJLC 8 pocket (12cc) electron beam source. Includes a 5kW power supply with programmable sweep and automatic crucible indexing, high voltage discharge hook, all electrical and waterh feedthroughs and shielding, and a pneumatically actuated source shutter.
• Single substrate, 150mm load lock.
• 150mm, top mounted substrate platen, with primary rotation up to 20 rpm, pneumatically actuated swing shutter and 350⁰ C heating via quartz lamp assembly.
• Film thickness controller capable of interfacing with five crystal sensors.
• Full recipe driven computer control with data logging functionality.
• One-year warranty.
• KJLC technician on-site for two days for system start-up and training.
• Delivery: contact KJLC

Description

Advanced Energy Overstock Equipment

Includes:

EJMDX1K-110

1kW DC Power Supply, 115V Input, 1000V/1A Output, Type N

Advanced Energy Model 3152105-009

Note - Not CE or CSA marked

Description

Advanced Energy Overstock Equipment

Includes:

EJMDX1K-220

1kW DC Power Supply, 220V Input, 1000V/1A Output, Type N

Advanced Energy Model 3152105-015

Note - Not CE or CSA marked

Description

Advanced Energy Overstock Equipment

Includes:

EJMDX500-110

500W DC Power Supply, 115V Input, 500V/1A Output, Type N

Advanced Energy Model 3152261-004

Note - Not CE or CSA marked

Description

Advanced Energy Overstock Equipment

Includes:

EJMDX500-220HIZ-N

500W DC Power Supply, 220V Input, Type N Connector, Hi-Z Unit

CE Marked

Description

Advanced Energy Overstock Equipment

Includes:

EJPINN10KPLS

10kW Pulsed DC Power Supply, RS-232, 5-350kHz

Advanced Energy Model 3152533-102

CE & CSA/NRTL

Description

TORUS 1, FLEX, CUSTOM DOUBLE ANGLE, STD MAG, REFERENCE DRAWING

Condition: New
Quantity: 2 Available