High Power Pulsed Magnetron Sputtering (HPPMS) or High Power Impulse Magnetron Sputtering (HIPIMS) is a type of magnetron sputtering technique where high power pulses of hundreds of microseconds are applied to the magnetron target at frequencies ranging from a few Hz to several kHz.
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High Power Impulse Magnetron Sputtering (HIPIMS)
August 30, 2016 | By KJLC Innovate
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Vacuum Science