| MFC Type |
Thermal |
Thermal |
Thermal |
Thermal |
Thermal |
Thermal |
| Full Scale Flow Range, sccm |
10 to 20,000 |
5 to 50,000 |
5 to 50,000 |
5 to 50,000 |
50,000 to 100,000 |
250,000 |
| Maximum Inlet Pressure, psid |
150 |
150 |
150 |
150 |
150 |
150 |
| Normal Operating Pressure Differential, psid |
10 to 5000 sccm; 10 to 40
10000 to 30000 sccm; 15 to 40
|
10 to 5000 sccm; 10 to 40
10000 to 20000 sccm; 15 to 40
30000 to 50000 sccm; 25 to 40
(N2 Full Scale)
(with atmospheric pressure at the MFC outlet)
|
10 to 5000 sccm; 10 to 40
10000 to 20000 sccm; 15 to 40
30000 to 50000 sccm; 25 to 40
(N2 Full Scale)
(with atmospheric pressure at the MFC outlet)
|
10 to 5000 sccm; 10 to 40
10000 to 20000 sccm; 15 to 40
30000 to 50000 sccm; 25 to 40
(N2 Full Scale)
(with atmospheric pressure at the MFC outlet)
|
50,000 - 100,000 sccm; 40 to 80
(N2 Full Scale with atmospheric pressure at the MFC outlet)
|
30 to 55 (dependent on fitting type) (with atmospheric pressure at the MFC outlet) |
| Seal Type |
Elastomer |
Elastomer |
Metal |
Elastomer |
Metal |
Elastomer |
| Integrated Software |
No |
Yes |
Yes |
Yes |
Yes |
Yes |
| Accuracy (typical) |
±1% of Full Scale |
±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
|
±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
|
±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
|
±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
|
±1% of set point for > 20% to 100% Full Scale
±0.25% of Full Scale for 5% to 20% Full Scale
|
| Repeatability |
±0.2% of Full Scale |
±0.3% of Full Scale |
±0.3% of Full Scale |
±0.3% of Full Scale |
±0.3% of Full Scale |
±0.5% of Full Scale |
| Resolution |
0.1% of Full Scale |
0.1% of Full Scale |
0.1% of Full Scale |
0.1% of Full Scale |
0.1% of Full Scale |
0.1% of Full Scale |
| Control Range |
2% to 100% of Full Scale (range on mech.) |
2% to 100% of Full Scale (range on mech.) |
2% to 100% of Full Scale (range on mech.) |
2% to 100% of Full Scale (range on mech.) |
2% to 100% of Full Scale (range on mech.) |
2% to 100% of Full Scale (range on mech.) |
| Warm-Up time |
<2 minutes (to within 0.2% of Full Scale of steady state performance) |
<30 minutes (to within 0.2% of Full Scale of steady state performance) |
<30 minutes (to within 0.2% of Full Scale of steady state performance) |
<30 minutes (to within 0.2% of Full Scale of steady state performance) |
<30 minutes (to within 0.2% of Full Scale of steady state performance) |
>60 minutes |
| Typical Setting Time, sec |
<0.8 seconds (to within 2% of set point) |
<0.750, typical above 5% Full Scale |
<0.750, typical above 5% Full Scale |
<0.750, typical above 5% Full Scale |
<0.750, typical above 5% Full Scale |
1 to 2 seconds typical above 10% Full Scale @ 50 psi |
| Temperature - Operating Range, °C (°F) |
10 to 50 (50 to 122) |
10 to 50 |
10 to 50 |
10 to 50 |
10 to 50 |
10 to 50 |
| Analog Output |
0 to 5 VDC into >10K Ω |
0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male)
4 to 20 mA (15 Pin Sub D Male)
|
0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male)
4 to 20 mA (15 Pin Sub D Male)
|
0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male)
4 to 20 mA (15 Pin Sub D Male)
|
0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male)
4 to 20 mA (15 Pin Sub D Male)
|
0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male)
4 to 20 mA (15 Pin Sub D Male)
|
| Input Power |
Max. current at start-up (first 2 sec): ±15 VDC (±5%) @ 200 mA
Typical current at steady state: ±15 VDC (±5%) @ 100 mA
|
+15 to +24 VDC @ (<4 watts) |
+15 to +24 VDC @ (<4 watts) |
+15 to +24 VDC @ (<4 watts) |
+15 to +24 VDC @ (<4 watts) |
+15 to +24 VDC @ (<4 watts) |
| Communications, Standard |
Analog |
Analog |
Analog |
Analog |
Analog |
Analog |
| Communications, Optional |
N/A |
RS485 (optional)
EtherCat (optional)
DeviceNet (optional)
Profibus (optional)
Profinet (optional)
|
RS485 (optional)
EtherCat (optional)
DeviceNet (optional)
Profibus (optional)
Profinet (optional)
|
RS485 (optional)
EtherCat (optional)
DeviceNet (optional)
Profibus (optional)
Profinet (optional)
|
RS485 (optional)
EtherCat (optional)
DeviceNet (optional)
Profibus (optional)
Profinet (optional)
|
RS485 (optional)
EtherCat (optional)
DeviceNet (optional)
Profibus (optional)
Profinet (optional)
|
| Compliance and Standards |
CE |
CE |
CE |
CE |
CE |
CE |
