| Measurement Method |
Cold Cathode / Pirani |
Hot Filament Ion Gauge / Convection Enhanced Pirani |
Hot Filament Ion Gauge / Convection Enhanced Pirani / Piezo |
Measurement Range
Torr |
7.6E-10 to 760 (1E-09 to 1000) |
1E-09 to 1000 (1.3E-09 to 1333) |
1e-9 to 1000 (1.3E-09 to 1333) |
| Accuracy (typical) |
±30% of reading (7.6e-10 to 76 Torr)
±50% of reading (76 to 760 Torr)
|
Ionization: ±15% of reading (1e-8 to 5e-2 Torr)
Convection: ±10% of reaching (1e-3 to 400 Torr); ±2.5% of reading (400 to 1000 Torr)
|
±15% of reading (1e-9 to 0.1 Torr)
±10% of reading (0.1 to 150 Torr)
±2.5% of reading (150 to 1000 Torr)
|
| Units |
Controller Dependent
|
Torr
mbar
Pa
|
Torr
mbar
Pa
|
| Ports |
Single Port |
Multi-port (2 or 3) |
Single Port |
| Temperature - Operating (Range)°C (°F) |
5 to 55 (40 to 130) |
0 to 40 (32 to 104) |
10 to 40 (50 to 104) |
| Temperature - Bakeout Max °F (°C) |
150 (300) |
200 (392), Electronics Removed |
105 (221), Electronics Removed |
| Display Type |
No |
Digital |
Optional, Digital |
| Set-Point Relays |
Controller Dependent |
3 |
3, Optional |
| Relay Response |
Controller Dependent |
1A at 30 VDC resistive, 0.3 A at 125 VAC non-inductive |
1 A at 30 VDC, resistive load |
| Analog Output |
0 to 10.5 VDC |
Ionization only: One log-linear 0 to 9 Vdc, 1 V/decade, semi-log
Used as a full range gauge: One 0.5 to 7 Vdc, 0.5 V/decade, semi-log Convection Gauge 1 & 2: Two 1-8 Vdc, 1 V/decade, semi-log or two non-linear 0.375 to 5.659 Vdc
|
Absolute Pressure: Logarithmic, 0.5 to 7.0 VDC, 0.5 V/decade
Differential Pressure: Linear 1-5 VDC, -750 to +250 Torr
(-1000 to +333mbar; -100 to +33 kPa)
|
| Input Power |
14.5 to 30 VDC, ±2 W |
20 to 28 VDC, 30 W protected against power reversal and transient over-voltages |
RS-485/Analog: 24 VDC +10% to -15%, 1 Amp, 22W nominal
DeviceNet: 24 VDC (11 to 26.4 VDC) at 0.2A nominal
|
| Communication |
Analog |
Analog
RS485 |
Analog |
| Connector |
FCC68/RJ45 8 Pin |
9 Pin Sub D Male |
15 Pin Sub D Male (RS485 / Analog)
5 Pin Micro Connector (DeviceNet)
|
| Compliance and Standards |
CE
RoHS
UL
CSA |
CE
RoHS |
CE
RoHS |
