Measurement Method |
Hot Filament Ion Gauge |
Hot Filament Ion Gauge |
Cold Cathode |
Measurement Range Torr |
1E-09 to 5E-02 (1.3E-09 to 6.7E-02) |
1E-09 to 5E-02 (1.3E-09 to 6.7E-02) |
7.6E-10 to 7.6E-03 (1E-09 to 1E-02) |
Accuracy (typical) |
±15% of reading (1e-8 to 5e-2 Torr) |
±15% of reading (1e-8 to 5e-2 Torr) |
±30% of reading (7.6e-10 to 7.6e-3 Torr) |
Units |
Controller Dependent |
Torr mbar Pa |
Controller Dependent |
Temperature - Operating (Range)°C (°F) |
0 to 40 (32 to 104) |
0 to 40 (32 to 104) |
5 to 55 (40 to 130) |
Temperature - Bakeout Max °F (°C) |
200 (392), Electronics Removed |
200 (392), Electronics Removed |
150 (300) |
Display Type |
No |
Digital |
No |
Set-Point Relays |
Controller Dependent |
1 |
Controller Dependent |
Relay Response |
Controller Dependent |
1A at 30 VDC resistive, 0.3 A at 125 VAC non-inductive |
Controller Dependent |
Analog Output |
Log linear 0 to 9 VDC, 1 V/decade |
Log-linear 0 to 9 VDC, 1 V/decade |
Voltage Output: 0 to 10.5 VDC Measurement Range: 0.667 to 10 VDC |
Input Power |
Powered by MGC 3200 |
20 to 28 VDC, 30 W protected against power reversal and transient over-voltages |
14.5 to 30 VDC, ≤2 W |
Communication, Standard |
Analog RS485 |
Analog RS485 |
Analog |
Connector |
9 Pin Sub D Male |
9 Pin Sub D Male |
FCC68 / RJ45 8 Pin |
Compliance and Standards |
CE RoHS |
CE RoHS |
CE RoHS UL CSA |