Measurement Method |
Pirani |
MEMS Pirani |
Convection Enhanced Pirani |
Convection Enhacned Pirani |
Convection Enhacned Pirani |
Active / Passive |
Active |
Active |
Active |
Active |
Active |
Measurement Range Torr (mbar) |
3.75e-4 to 760 (5e-4 to 1000) |
1e-5 to 1000 (1.3e-5 to 1333) |
1e-4 to 1000 Torr (1.3e-4 to 1333) |
1e-4 to 1000 Torr (1.3e-4 to 1333) |
1e-4 to 1000 Torr (1.3e-4 to 1333) |
Accuracy (typical) |
±50% of reading (3.75e-4 to 7.6e-4 Torr)
±15% of reading (7.6e-4 to 75 Torr)
±50% of reading (75 to 760 Torr)
|
±10% of reading (5e-4 to 1e-3 Torr)
±5% of reading (1e-3 to 100 Torr)
±25% of reading (100 Torr to atm)
|
0.1 mTorr resoution (5e-4 to 1e-3 Torr)
±10% of reading (1e-3 to 400 Torr)
±2.5% of reading (400 Torr to atm)
|
0.1 mTorr resoution (5e-4 to 1e-3 Torr)
±10% of reading (1e-3 to 400 Torr)
±2.5% of reading (400 Torr to atm)
|
0.1 mTorr resoution (5e-4 to 1e-3 Torr)
±10% of reading (1e-3 to 400 Torr)
±2.5% of reading (400 Torr to atm)
|
Units |
Controller Dependent |
Torr
mBar
Pa
|
Controller Dependent |
Torr / mTorr mBar |
Torr / mTorr mBar |
Temperature - Operating (Range)°C |
5 to 60 |
0 to 40 |
0 to 50 |
0 to 50 |
0 to 40 |
Temperature - Operating (Range)°F |
40 to 140 |
32 to 104 |
32 to 122 |
32 to 122 |
32 to 104 |
Display (selection guide) |
No |
Yes |
No |
Yes |
Yes |
Set-Point Relays |
2 Optional |
3 Optional |
No |
1 |
2 |
Analog Output |
0 to 10.3 VDC (voltage range)
1.9 to 10 VDC (measurement range)
|
1 to 9 VDC, 100Ω maximum
output impedance, 1 volt/decade
|
log-linear 1 to 8 VDC , 1 V/decade
non-linear analog S-curve 0.375 to 5.659 Vd
|
log-linear 1 to 8 VDC , 1 V/decade
non-linear analog S-curve 0.375 to 5.659 Vd
|
1a) non-linear S-curve 0.375‐5.659 VDC, or 1b) log-linear 1‐8 VDC, 1V/decade 2) linear 0‐10 VDC, user scalable |
Recommended Mounting Orientation |
Any |
Any |
Horizontal |
Horizontal |
Horizontal |
Input Power |
14 to 30 VDC, <2 W |
9 to 30 VDC, < 1.5 watts max |
12-28 VDC, 2 W |
12-28 VDC, 2 W |
12-28 VDC, 2 W |
Communications |
Analog |
Analog/Digital |
Analog/Digital |
Analog/Digital |
Analog/Digital |
Connector |
FCC68/RJ45 8 Pin Female |
9 Pin Sub D
15 Pin Sub D
FCC68/RJ45 8 Pin Female
Hirschmann 6 Pin
|
9 Pin Sub D |
9 Pin Sub D |
9 Pin Sub D
15 Pin Sub D
|
Compliance and Standards |
CE
RoHS
UL
CSA
|
EMC Directive 2004/108/EEC |
CE
RoHS
|
CE
RoHS
|
CE
RoHS
|
Benefits |
|
Vibration
Touch Screen Display
Alarm
Sleek Design
|
|
|
|