| Measurement Method |
Capacitance Manometer |
Capacitance Manometer |
Capacitance Manometer |
Capacitance Manometer |
| Active / Passive |
Active |
Active |
Active |
Active |
| Full Scale Range |
0.05 to 1000 |
0.1 to 1000 |
0.02 to 25,000 |
0.05 to 25,000 |
| Lowest Measurement |
0.01% of Full Scale Value |
0.01% of Full Scale Value |
0.01% of Full Scale Value |
0.01% of Full Scale Value |
| Temperature Compensation, °C |
45
100
|
45
80
100
|
45 |
100 |
| Warm-up Time, min |
>30 |
2 hours for 1 to 1000 Torr models
3 hours for <1 Torr models
|
2 hours > 1 Torr units
4 hours < 1 Torr units
|
1 hour for 1000 Torr models
4 hours for 0.1 Torr models
|
| Accuracy (typical) |
0.15% of reading |
0.10% Reading (1 to 1000 Torr)
0.12% Reading (< 1 Torr)
|
0.12% of Reading
0.15% (0.25, 0.1, and 0.05 Torr versions)
|
0.25% of reading (1 to 1000 Torr)
0.50% of reading (0.25, 0.1, and 0.05 Torr versions)
|
| Units |
Torr
mbar
|
Torr
mbar
|
Torr
mbar
|
Torr
mbar
|
| Temperature - Operating Range, °C (°F) |
10 to 40 (50 to 105) |
15 to 40 (59 to 104) |
15 to 40 (59 to 104) |
15 to 50 (59 to 122) |
| Temperature - Bakeout Max, °C (°F) |
≤110 (230) |
≤50 (122) |
≤50 (122) |
≤65 (149) |
| Diaphragm Composition |
Aluminum oxide ceramic (Al2O3) |
Inconel® Nickel Alloys
Incoloy® Nickel Alloys
|
Inconel® Nickel Alloys
Incoloy® Nickel Alloys
|
Inconel® Nickel Alloys
Incoloy® Nickel Alloys
|
| Set-Point Relays |
2 |
2 |
Controller Dependent |
Controller Dependent |
| Analog Output |
0 to 10 VDC |
0 to 10 VDC |
0 to 10 VDC |
0 to 10 VDC |
| Recommended Mounting Orientation |
Any, except for upside down |
Any, except for upside down |
Any, except for upside down |
Any, except for upside down |
| Input Power |
+14 to +30 VDC or ±15 V (±5%)
≤ 12 W during heat up
≤ 8 W at operating temperature
|
±15 VDC (±5%) @ 0.40 amps (max)
+24 VDC ±10% @ 11 watts (max)
|
±15VDC (±5%) @ 35 mA
|
±15VDC (±5%) @ 35 mA
|
| Connector |
15 Pin Sub D Male |
15 Pin Sub D Male |
15 Pin Sub D Male |
15 Pin Sub D Male |
| Compliance and Standards |
CE
RoHS
UL
CSA
EN
SEMI
|
CE
RoHS
|
CE
RoHS
|
CE
RoHS
|
