| Measurement Method |
Capacitance Manometer |
Capacitance Manometer |
Capacitance Manometer |
Capacitance Manometer |
Capacitance Manometer |
Capacitance Manometer |
| Active / Passive |
Active |
Active |
Active |
Active |
Active |
Active |
| Full Scale Range |
0.1 to 1000 |
10 to 1000 |
1 to 1000 |
1 to 1000 |
0.1 to 1000 |
1 to 25,000 |
| Lowest Measurement |
0.01% of Full Scale Value |
0.05% of Full Scale Value |
0.01% of Full Scale Value |
0.01% of Full Scale Value |
0.01% of Full Scale Value |
0.01% of Full Scale Value |
| Temperature Compensation, °C |
Ambient |
Ambient |
Ambient |
Ambient |
Ambient |
Ambient |
| Warm-up Time, min |
N/A |
N/A |
N/A |
N/A |
N/A |
N/A |
| Accuracy (typical) |
1000 Torr/1100 mbar to 1 torr F.S.: 0.2%
0.25 Torr F.S.: 0.25%
0.1 Torr/mbar F.S.: 0.5%
|
0.50% of reading
1% of reading
|
0.25% for 1 to 1000 Torr (0.15% optional)
0.50% for <1 Torr
|
0.25% of reading |
0.25% for 1 to 1000 Torr
0.50% for < 1 Torr
|
0.50% of reading |
| Response Time |
≥0.25 Torr / mbar: 30 ms
0.1 Torr / mbar: 130 ms
|
100 ms |
≥ 1 Torr: < 20 ms
< 1 Torr: < 40 ms
|
< 20 ms |
< 20 ms |
|
| Units |
Torr
mbar
|
Torr
mbar
|
Torr
mbar
|
Torr
mbar
|
Torr
mbar
|
Torr
mbar
|
| Temperature - Operating Range, °C (°F) |
5 to 50 (10 to 122) |
0 to 70 (32 to 158) |
0 to 50 (32 to 122) |
0 to 50 (32 to 122) |
0 to 50 (32 to 122) |
0 to 50 (32 to 122) |
| Temperature - Bakeout Max, °C (°F) |
≤110 (230) |
≤110 (230) |
≤50 (122) |
≤50 (122) |
≤50 (122) |
≤50 (122) |
| Diaphragm Composition |
Aluminum oxide ceramic (Al2O3) |
Aluminum Oxide Ceramic (AI2O3) |
Inconel® Nickel Alloys
Incoloy® Nickel Alloys
|
Inconel® Nickel Alloys
Incoloy® Nickel Alloys
|
Inconel® Nickel Alloys
Incoloy® Nickel Alloys
|
Inconel® Nickel Alloys
Incoloy® Nickel Alloys
|
| Set-Point Relays |
Controller Dependent |
Controller Dependent |
2 |
Controller Dependent |
Controller Dependent |
Controller Dependent |
| Analog Output |
0 to 10 VDC |
0 to 10 VDC |
0 to 10 VDC |
0 to 10 VDC |
0 to 10 VDC |
0 to 5 VDC
0 to 10 VDC
|
| Recommended Mounting Orientation |
Any, except for upside down |
Any, except for upside down |
Any, except for upside down |
Any, except for upside down |
Any, except for upside down |
Any, except for upside down |
| Input Power |
+14 to +30 V (DC), ≤ 1 W |
+13 to +30 VDC |
15 VDC to 30 VDC @ 35 mA |
±15VDC (±5%) @ 35 mA |
±15VDC (±5%) @ 35 mA |
0 to 10 Volt output, 13 VDC to 32 VDC @ 10 mA max
0 to 5 Volt output, 10.8 VDC to 32 VDC @ 10 mA max
(regulated if below 13 VDC)
|
| Connector |
15 Pin Sub D Male |
9 Pin Sub D Male
FCC68, 8 Pin
Binder M12, 8 Pin Male
|
15 Pin Sub D Male |
Terminal Block |
15 Pin Sub D Male |
9 Pin Sub D
15 Pin Sub D
15 Pin Sub D High Density
4 Pin Bayonet
5 Pin Terminal Strip
|
| Compliance and Standards |
CE
RoHS
UL
CSA
EN
SEMI
|
CE
RoHS
|
CE
RoHS
|
CE
RoHS
|
CE
RoHS
|
CE
RoHS
|
