Fomblin® Inert PFPE fluids are chemically inert compounds of perfluoropolyether (PFPE) chains. Among their many features, Fomblin® Inert PFPE fluids are non-flammable, thermally stable, radioactively stable, high dielectric properties, and perform in both high and low temperatures. The presence of fluorine in Fomblin® Inert PFPE fluids provides thermal, chemical, and oxidative stability. The presence of oxygen in Fomblin® Inert PFPE fluids provides imparted flexibility to the polymer chain, excellent flow behavior at low temperatures, and a high viscosity index for linear PFPE’s. Due to the chemical inertness, Fomblin® Inert PFPE fluids is compatible with plastic, metal, and elastomers, along with a low miscibility with solvents and water.
Features
- Doesn't react with most corrosive vapors or act as a fuel when pumping oxygen or oxidizing agents
- Withstands high temperatures and oxygen conditions (photoresist stripping), processes forming Lewis acids (aluminum etching), products from sulfur hexafluoride etching, most acids, bases, and oxidizing agents
- Applications include extreme operating conditions, pumping oxygen or other oxidants, LPCVD, plasma etching, and reactive ion etching
- Choose Fomblin® by viscosity-use the fluid closest to the pump manufacturer's recommendation for normal fluids
- Recommended for direct and belt-driven rotary vane pumps used in extreme operating conditions found in semiconductor processing
- High thermal stability. Thermal decomposition will only occur at temperatures over 290°C (554°F)
- Extensively wide temperature range: -100 °C – 290 °C
- Weight loss as low as 0.3% at 204 °C
Specifications Table
Grade | ||||
---|---|---|---|---|
Vapor Pressure | ||||
Pour Point | ||||
Flash Point | ||||
Fire Point | ||||
Specific Gravity | ||||
Color | ||||
Hazardous Decomposition | ||||
Incompatibility | ||||
Hazardous Ingredients | ||||
Kinematic Viscosity | @100°C (212°F), 4 | @100°C (212°F), 7 | @100°C (212°F), 8 | @100°C (212°F), 11 |
Shelf Life
It is strongly recommended using all fluids and greases at the time of receipt, however when storage is necessary, rotate older stock into use first and observe the recommended parameters listed below.