Representative Image
V72H Series:
Rectangular Transfer Valve (Slit Valves) - Heated Type
Applications
- Where heating is required, heated housing and blade heating is optional
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/flat panel processes
Features
- Heated gate (or heated gate and housing) to reduce particulate buildup
- Semi standard application (Semi E21-94, Semi E24-92, Semi E21.1-1296)
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
- Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly
Options
- Custom sizes available
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
Specifications Table
| Temperature (°C) | Valve body: Fluorocarbon 100°C (optional 180°C) Valve actuator: Fluorocarbon 80°C (optional 100°C) |
| Pressure Range (torr) | 1 X 10-9 mbar - ATM |
| Differential Press (torr) | ≤ 1.2 bar in either direction |
| Material | Valve body, bonnet seal, gate: AL6061 Welded bellows: AM350 Valve actuator: Stainless Steel, aluminum |
| Seal Material | Fluorocarbon (option KALREZ, ETC) |
| Leak Rate (cc/sec) | 1 X 10-9 mbar. l/s |
| Cycles Until Service (approx.) | ≥ 2 million |
| Position Indicator | Honeywell: 11SM-244-T, JS-5 |
| Operation | Double acting |
Dimensional Drawings
