Representative Image
V75 Series:
Large Rectangular Transfer Valve (Slit Valves)
Applications
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/flat panel processes
- All other cluster vacuum systems
Features
- Removable valve housing cover
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
- Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly
- Available with gates up to 150mm tall and 1500mm wide
Options
- Custom sizes available
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
Specifications Table
| Temperature (°C) | Valve body: 120°C Valve actuator: 80°C |
| Pressure Range (torr) | 1 X 10-7 mbar - ATM |
| Differential Press (torr) | ≤ 1.2 bar in either direction |
| Material | Valve body, bonnet seal, gate: AL6061 Welded bellows: AM350 Valve actuator: SS 304, AL6061 |
| Seal Material | Fluorocarbon (option KALREZ, ETC) |
| Leak Rate (cc/sec) | <1 X 10-7 mbar. l/s |
| Cycles Until Service (approx.) | ≥ 1 million |
| Position Indicator | Festo: SME-8M-DS-24V-k-2.5-OE |
| Operation | Double acting |