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Fujikin FCST1000(M)F Mass Flow Controllers and Meters
Standard Digital Model. Elastomer and Metal Seal Digital Mass Flow Controllers and Meters.
Overview
Fujikin's advanced fluid and gas automatic control equipment, specialized gas control units, ceramic valves, ultra-high precision electrically-actuated needle valves, as well as ultra high purity valves, fittings and mass flow controllers are suitable for use in a wide range of discrete manufacturing and materials equipment and processes.
Fujikin's thermal series Mass Flow Controllers (FCS-T) are designed specifically for semiconductor and solar applications that combines high accuracy, better throughput and reduced system costs.
Specifications Table
| Model | FCST1005(M)F/TM1005(M)F |
|---|---|
| Flow Range (N2 Equivalent) | 10, 20, 30, 50, 100, 200, 300, 500 SCCM |
| Valve Type | N/C:Normally Closed |
| Controlled Volume Range | 2% ~ 100% F.S. |
| Flow Accuracy | ±1% F.S. (Accuracy guaranteed between 15~35°C) |
| Setting Signal | 0.1-5VDC |
| Output Signal | Analog 0-5VDC |
| Communication | 0-5VDC, Digital: RS485 (Fujikin Protocol), DeviceNet™ (SEMI E54 & ODVA SEMI SIG MFC PROFILE) |
| Repeatability | ±0.2% F.S. |
| Response Time | ≤1sec |
| Required Pressure Difference | 50-300kPa |
| MAX Operating Pressure | 400kPaG |
| Proof Pressure | 1MPaG |
| Guaranteed Operating Temperature Range | 5-50°C |
| External Leak Rate | Metal Seal:1 X 10 -11 Pa•m3/sec He, Elastomer Seal:1 X 10-7Pa•m3/sec He |
| Mounting Orientation | Can be mounted in any orientation |
| Current Consumption | +15VDC:25mA, -15VDC:180mA |
| Wetted Surface Material | 316L SS, Magnetic Stainless Steel, PTFE, Fluoro-Rubber (Chloroprene Rubber) |
| Seal Material | Metal Seal: SUS316L, Elastomer Seal:Fluoro-Rubber (Chloropene Rubber) |
| Actuator Type | Solenoid actuator |
| Surface Finish | None |
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